[labnetwork] Ta etch recipe

Tue May 10 12:46:50 EDT 2022

Howdy All,
We have an Oxford Plasmalab 100 ICP RIE in AggieFab, and a user is attempting to develop a Ta etch recipe with straight sidewalls. If anyone has experience developing such a process and can share pointers, we would be very appreciative!

Thanks for your help.

Sandra G. Malhotra, Ph.D.  |  Technical Lab Manager

AggieFab Nanofabrication Facility
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University
3253 TAMU | College Station, TX 77843
ph: 979.845.3199  |  sandra.malhotra at tamu.edu
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TEXAS A&M UNIVERSITY | FEARLESS on Every Front
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