[labnetwork] Looking for small footprint LPCVD system
Beaudoin, Mario
beaudoin at physics.ubc.ca
Fri May 27 18:43:13 EDT 2022
I'm looking for a recommended small footprint LPCVD system. My
cleanroom "chase" is above the room so the entire furnace system needs
to be inside the clean area. I'm looking for maximum 4" size wafers.
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