[labnetwork] Microfabrication class

[Football]

Hi Sergi,

What I did before is to teach undergraduates how to fabricate Ni-Cr
thermocouples on 4" wafers. The idea was similar to Philipp's. The goal was
to make a simple device but would need most of the commonly used microfab
procedures. The Ni-Cr thermocouple fabrication needed mask design, wafer
cleaning, oxidation, spin-coating, photolithography with alignments
(provided more complexity), film deposition, and wet etching, etc. End of
the day students get a wafer diced and many devices. Then we tested a few
of them to see if it works and what the temperature response curve was.

Thanks,



*Fubo Rao, Ph.D.,*

*Nanofabrication Cleanroom Manager,*

*Center for Nanoscale Materials,*

*Argonne National Laboratory*

*9700 S. Cass Ave, Lemont, IL 60439*

*Phone: 630-252-5708*

*Email: **frao at anl.gov* <frao at anl.gov>

On Tue, Oct 11, 2022 at 6:40 AM Philipp Altpeter <
philipp.altpeter at physik.uni-muenchen.de> wrote:

> Dear Sergi,
>
> One of the simplest devices that could be fabricated within a
> microfabrication class would be a metal, thin film temperature sensor:
> etching a meander in a thin metal film such as Aluminum (involving thin
> film deposition, photolithography and wet etching or lift-off), bonding the
> device in a chip carrier and measure it on a hot plate. Very simple, very
> straight forward, you start with a (piece of) Wafer and end up with a
> somewhat functional device.
>
> Best,
>
> Philipp
>
>
> Am 07.10.2022 um 19:39 schrieb Sergi Lendinez:
>
> Dear labnetwork community,
>
>
>
> Here at LSU we are planning to start a microfabrication class soon, and I
> would like to ask for your opinions about setting up this kind of class at
> a university. I am not sure if this topic has been discussed here before,
> so I apologize for any possible duplication.
>
>
> Any information would be very helpful, like do's and don't's, devices
> being fabricated, number of students, students/teacher ratio, course load,
> etc.
>
>
> I'd like to fabricate some CMOS device, but we lack some critical
> equipment such as a diffusion tube furnace, cvd, or packaging tools, so I'm
> looking for alternate ideas: maybe a photodiode/detector, a Hall sensor or
> some micro-fluidic channels. If anyone has some experience fabricating
> these devices in a class setup, is there anything you'd be willing to share?
>
>
> Many thanks,
>
> Sergi
>
>
>
> *---*
>
> *Sergi Lendinez, Ph. D.*
> Assistant Director NFF | Louisiana State University
>
> Center for Advanced Microstructures and Devices (CAMD)
>
> 6980 Hefferson Highway, Baton Rouge, LA 70803
> (225) 578-9378
>
> sergilendi at lsu.edu | *lsu.edu/nanofabrication*
> <https://lsu.edu/nanofabrication>
>
>
>
> _______________________________________________
> labnetwork mailing listlabnetwork at mtl.mit.eduhttps://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
> --
> Philipp Altpeter
> Fakultät für Physik der LMU und
> Center for NanoScience (CeNS)
> LS Prof. Efetov
> Geschwister-Scholl-Platz 1
> D-80539 München
> T. +49 (0)89 2180-3733
>
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