[labnetwork] Rotational ALD for AZO process?

Timothy J Gilheart gilheart at rice.edu
Wed Oct 19 11:20:54 EDT 2022


Howdy all,

Does anyone have the ability to support a rotational ALD process for core-shell nanoparticles similar to the one described in this article (but with AZO-ZnO and/or AZO-Al2O3 instead of Fe3O4-ZnO):

https://www.sciencedirect.com/science/article/pii/S1567173916302668

A diagram from the paper of the relevant apparatus is also attached. Our Veeco Savannah tool is not  equipped for this sort of application.

Happy to refer the student here who needs this to anyone who might be able to support this, either within the lab-network community or outside to a commercial service provider. 

Thanks,

-- 
Tim Gilheart, Ph.D.
Research Scientist - Nanofabrication Cleanroom Manager,
Shared Equipment Authority (SEA), Rice University
https://research.rice.edu/sea/rice-nanofabrication-facility <https://research.rice.edu/sea/rice-nanofabrication-facility>
Cell: 832-341-5488 | Office: 713-348-3159 | gilheart at rice.edu

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