[labnetwork] In2Se3 sputtering
Zhichao Wang
zhichaow at udel.edu
Wed Sep 7 17:01:56 EDT 2022
Dear Lab network community,
We have a customer who is interested in sputtering In2Se3 films. In2Se3
does not seem to adversely affect vacuum. But it's listed as category 3
health hazard ("Acute Inhalation Toxicity - Dusts and Mists"). Does anyone
have experience with In2Se3 to share?
Any suggestions/Inputs are highly appreciated.
--
*Zhichao (Chao) Wang, Ph.D.*
*Nano Process Specialist*
*UDNF*
*University of Delaware*
*Pronouns: He/Him/His*
*------------------------*
*Office Number:(302) 831-4839*
*221 Academy St.,RM170*
*Newark, DE 19711*
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