[labnetwork] Thin film sputtering issue

[Morrison, Richard H., Jr]

Looks like either dried solvent trail or dried water trail, left behind when the liquid dried.

Rick

Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Saba Sadeghi
Sent: Thursday, September 8, 2022 2:29 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Thin film sputtering issue

Dear colleagues,

I was hoping to get your input on a sputtering issue; the pictures attached are from a magnetron-sputtered metal film (200nm), growth rate of 3 A/s at elevated growth temperature. Can you identify these features and what could have caused them?

Thank you very much for your feedback,

Best,
Saba
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