[labnetwork] [EXTERNAL] N2 consumption by SRDs

[Morrison, Richard H., Jr]

HI,



Here at Draper we shut off the N2 when not in use and we have every user run the SRD before they use it to ensure that there is not extra particles generated. If you do not run it for a cycle the SRD tend to deposit a lot of particles on your wafer.



Rick





Richard Morrison

DMTS

Draper Laboratory

555 Technology Square

Cambridge Ma  02139

Office: 617-258-3420

Cell: 508-930-3461







From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathan Nelson - Fitzpatrick
Sent: Wednesday, April 5, 2023 2:47 PM
To: labnetwork at mtl.mit.edu
Subject: [EXTERNAL] [labnetwork] N2 consumption by SRDs



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Hi labnetwork,



My lab is going through a process of auditing our Nitrogen use, and an early target for saving on N2 are our spin rinse dryers.



We have four Sitek SRDs which are configured to continuously purge with N2 and to run occasionally (on a timer) to exercise the SRDs and run some DI water through them.  The constant N2 purge obviously consumes a ton of N2.



We're considering either:



*       Purchasing an (expensive) valve from Sitek that would cut off N2 flow when the SRD controllers are off.  We would then leave the SRD controllers off when they are not enabled by our lab users.
*       Or we might consider setting up an interlock to drive a solenoid valve that would cut off N2 flow to the SRDs when they are not enabled in our lab management software.



I'm wondering what other interesting solutions people have fashioned to reduce N2 consumption by SRDs?



I'm also curious if there are any pitfalls we should look out for when pursuing something like this?



Many thanks in advance,

  -Nathan



--

Nathan Nelson-Fitzpatrick  PhD, PEng   (He/Him)

Director, Quantum-Nano Fabrication and Characterization Facility (QNFCF)

Office of Research

University of Waterloo

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P: 519-888-4567 ext. 31796

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