[labnetwork] service (cleaning) for Ecosys Vector Ultra 3000 wet scrubber

Kyle Keenan kckeenan at seas.upenn.edu
Mon Apr 17 14:58:10 EDT 2023


Hello All,

I'm looking for recommendations for a company that can service/clean our
Ecosys Vector Ultra 3000 wet scrubber. We purchased it from Trillium
several years ago, however, they no longer have anyone available to service
the unit. The scrubber is used for LPCVD & MOVCD chemistries.

Thank you,
-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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