From david.gottfried at ien.gatech.edu Tue Aug 1 17:04:08 2023 From: david.gottfried at ien.gatech.edu (Gottfried, David) Date: Tue, 1 Aug 2023 21:04:08 +0000 Subject: [labnetwork] 2023 Workshop on Nanotechnology Infrastructure of the Future In-Reply-To: References: Message-ID: Please see information below regarding an open workshop to discuss ideas about the next iteration of national nanotechnology infrastructure, after the end of the NNCI in 2025. Join us in person in DC or online. David S. Gottfried, Ph.D. Director, NNCI Coordinating Office Director, SENIC Regents Researcher, Institute for Electronics and Nanotechnology Georgia Institute of Technology (404) 894-0479 dsgottfried at gatech.edu http://www.linkedin.com/in/davidgottfried/ =================================================== [cid:62da936d-dd2b-44fc-8d28-ca5023c3242b] Join us for the 2023 Workshop on Nanotechnology Infrastructure of the Future on September 12 & 13, 2023 in Washington D.C. or online. The current NSF-funded National Nanotechnology Coordinated Infrastructure (NNCI) ends in 2025, and we are looking ahead to the future and the next national resource in science and technology infrastructure. During this interactive workshop, you will provide essential insights and ideas towards shaping nanoscale research infrastructure. Please join us for a two-day, hybrid workshop featuring inspiring speakers from diverse disciplines and sectors, panel discussions, and idea generation. Registration (free) is now open (until Sept. 1). -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 376459 bytes Desc: image.png URL: From rmorrison at draper.com Wed Aug 2 09:45:52 2023 From: rmorrison at draper.com (Morrison, Richard H., Jr) Date: Wed, 2 Aug 2023 13:45:52 +0000 Subject: [labnetwork] MRL Furnace question Message-ID: Hi All, Happy summer, We have a vintage 2014 MRL LPCVD furnace, we are trying to convert a SiC tube to PolySilicon and in the middle of this MRL was sold to YES. Our contact at MRL/YES Tom Beck retired and now there is confusion on how we are going to finish the conversion. Any of you guys heard of a good contact at YES for MRL issues or if there is a MRL FSE doing free- lance work? Rick Richard Morrison DMTS Draper Laboratory 555 Technology Square Cambridge Ma 02139 Office: 617-258-3420 Cell: 508-930-3461 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rreger at purdue.edu Thu Aug 3 15:43:39 2023 From: rreger at purdue.edu (Reger, Ronald K) Date: Thu, 3 Aug 2023 19:43:39 +0000 Subject: [labnetwork] Job Openings at Purdue Birck Nanotechnology Center Message-ID: Dear Colleagues, We're expanding our team.....please pass along to anyone who might have an interest. Job posting # 26972: https://careers.purdue.edu/job/West-Lafayette-Microfab-Research-Engineer-IN-47906/1048512500/ Job posting # 27080: https://careers.purdue.edu/job/West-Lafayette-Microfab-Research-Engineer-IN-47906/1049731300/ Thanks, Ron Ron Reger Engineering Manager Birck Nanotechnology Center | Room 2289 | Office: 765.494.6667 | Email: rreger at purdue.edu Wiki: https://wiki.itap.purdue.edu/display/BNCWiki iLabs: https://purdue.ilabsolutions.com/homepage/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From kmcpeak at lsu.edu Fri Aug 4 15:23:58 2023 From: kmcpeak at lsu.edu (Kevin M McPeak) Date: Fri, 4 Aug 2023 19:23:58 +0000 Subject: [labnetwork] Branson Plasma Asher upgrade Message-ID: Dear Colleagues, Our Branson/IPC Series 2000 Plasma Asher at LSU isn't working, and we suspect it is the RF generator. Given the age of the tool, we are considering modernizing it with the Allwin upgrade: https://allwin21.com/upgrade-your-bransonipc-3000-plasma-asher-system/ If you have experience with the Allwin upgrade, I would appreciate your feedback via direct message. Thank you. Regards, Kevin From cveith at seas.upenn.edu Wed Aug 9 19:49:50 2023 From: cveith at seas.upenn.edu (Charles Veith) Date: Wed, 9 Aug 2023 19:49:50 -0400 Subject: [labnetwork] LED Lighting Conversion have arrived Message-ID: Good Evening: For universities, manufacturers and semiconductor firms who are looking at converting to LED, here is a firm. It seems that they already have a large beachhead with manufacturing and heading into Colleges Labs. Below is the information I received earlier this evening Regards, Charles Veith PS. The contact information is listed below First name Clay Last name Pemberton Email address clayton.pemberton at titanledus.com Question/Comment Hello, We are an LED manufacturer based in Phoenix, Arizona. Over the last two years we engineered, developed and tested our Spectrum Select Gold, an LED tube that utilizes GaN technology to omit spectral blue light from 250nm to 470nm. We offer our LED tubes in 2', 3', T5 and T8 sizes, they are designed to replace the discontinued GE CovrGuard and is a much better solution verses an amber or yellow light sleeve. We recently completed a retrofit of University of Utah's NanoFab using both the Spectrum Select Gold and our 5000k LED tubes. Montana State is re-lamping their cleanroom with our gold and white tubes, Harvard is currently testing our light. Intel is retrofitting their fabs with our tube, TI - Micron - Global Foundries - Applied Materials are currently testing and evaluating. I would like to discuss having our product information and testing data available as a resource for your community. https://titanledus.com/spectrumselect-gold Thank you, Clay Pemberton 602.390.0792 -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Thu Aug 10 08:45:38 2023 From: codreanu at udel.edu (Iulian Codreanu) Date: Thu, 10 Aug 2023 08:45:38 -0400 Subject: [labnetwork] LED Lighting Conversion have arrived In-Reply-To: References: Message-ID: <4068bf74-d417-afe4-0571-c52d268a8bb0@udel.edu> Good Morning, I tested their product. Please contact me if you would like to know what I determined. Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https://udnf.udel.edu On 8/9/2023 7:49 PM, Charles Veith wrote: > Good Evening: > ? ? ? ? For universities, manufacturers and semiconductor firms who > are looking at > converting to LED, here is a firm. It seems that they already have a > large beachhead > with manufacturing and heading into Colleges Labs. Below is the > information I received > earlier this evening > > Regards, > > Charles Veith > ? ? ? PS. The contact information is listed below > ? ? ?First name > Clay > > > > ????? Last name > Pemberton > > > > ????? Email address > clayton.pemberton at titanledus.com > > > > Question/Comment > Hello, > We are an LED manufacturer based in Phoenix, Arizona.? Over the last two > years we engineered, developed and tested our Spectrum Select Gold, an LED > tube that utilizes GaN technology to omit spectral blue light from > 250nm to > 470nm.? We offer our LED tubes in 2', 3', T5 and T8 sizes, they are > designed > to replace the discontinued GE CovrGuard and is a much better solution > verses > an amber or yellow light sleeve.? We recently completed a retrofit of > University of Utah's NanoFab using both the Spectrum Select Gold and our > 5000k LED tubes. Montana State is re-lamping their cleanroom with our gold > and white tubes, Harvard is currently testing our light.? Intel is > retrofitting their fabs with our tube, TI - Micron - Global Foundries - > Applied Materials are currently testing and evaluating. > I would like to discuss having our product information and testing data > available as a resource for your community. > https://titanledus.com/spectrumselect-gold > > Thank you, > Clay Pemberton > 602.390.0792 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at cns.fas.harvard.edu Thu Aug 10 10:34:01 2023 From: hathaway at cns.fas.harvard.edu (Mac Hathaway) Date: Thu, 10 Aug 2023 10:34:01 -0400 Subject: [labnetwork] LED Lighting Conversion have arrived In-Reply-To: References: Message-ID: <32667779-b417-4ae6-4d5f-6a9467e0d33b@cns.fas.harvard.edu> Hi Charles, We heard about these guys, and are about to begin testing some of their units in a custom test facility that we just brought online (aka "The Janitors Closet"). I'll report when we get some results. Mac Mac Hathaway Senior Process and Systems Engineer Harvard Center for Nanoscale Systems 11 Oxford St. Cambridge, MA02138 617-495-9012 On 8/9/2023 7:49 PM, Charles Veith wrote: > Good Evening: > ? ? ? ? For universities, manufacturers and semiconductor firms who > are looking at > converting to LED, here is a firm. It seems that they already have a > large beachhead > with manufacturing and heading into Colleges Labs. Below is the > information I received > earlier this evening > > Regards, > > Charles Veith > ? ? ? PS. The contact information is listed below > ? ? ?First name > Clay > > > > ????? Last name > Pemberton > > > > ????? Email address > clayton.pemberton at titanledus.com > > > > Question/Comment > Hello, > We are an LED manufacturer based in Phoenix, Arizona.? Over the last two > years we engineered, developed and tested our Spectrum Select Gold, an LED > tube that utilizes GaN technology to omit spectral blue light from > 250nm to > 470nm.? We offer our LED tubes in 2', 3', T5 and T8 sizes, they are > designed > to replace the discontinued GE CovrGuard and is a much better solution > verses > an amber or yellow light sleeve.? We recently completed a retrofit of > University of Utah's NanoFab using both the Spectrum Select Gold and our > 5000k LED tubes. Montana State is re-lamping their cleanroom with our gold > and white tubes, Harvard is currently testing our light.? Intel is > retrofitting their fabs with our tube, TI - Micron - Global Foundries - > Applied Materials are currently testing and evaluating. > I would like to discuss having our product information and testing data > available as a resource for your community. > https://titanledus.com/spectrumselect-gold > > Thank you, > Clay Pemberton > 602.390.0792 > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From alex.norman at princeton.edu Mon Aug 14 14:18:36 2023 From: alex.norman at princeton.edu (Alex I. Norman) Date: Mon, 14 Aug 2023 18:18:36 +0000 Subject: [labnetwork] DIRECTOR, Micro/nanofabrication center, Princeton University Message-ID: Director, Micro/Nanofabrication Center, Princeton Materials Institute, Princeton University Application for Senior Professional Specialist / Professional Specialist ***REVISED & REPOSTED*** (princeton.edu) Applications are invited from qualified candidates for the Director of the Micro/Nanofabrication Center (MNFC), within the Princeton Materials Institute. The MNFC is Princeton's central shared-use fabrication facility with over 15,000 sq ft. of clean room space, housing a large complement of tools dedicated to thin film deposition, photolithography, e-beam lithography, etching, soft materials and microfluidics, and processing from meso-scale to nanometer scales. The facility interfaces with researchers from academia and industry and plays a critical role in the Institute's research and educational mission. Further information about the Center can be found at https://mnfc.princeton.edu The Director serves as the primary scientific and operational leader, managing the daily activities of the MNFC and communication with facility stakeholders. Responsibilities will include oversight of technical staff, safety, user training, equipment maintenance, tool acquisition and installation, lab-based training and educational programs, and other aspects of facilities operations. The Director position is University-funded, without specific end date, and reports to the Associate Director for Facilities of the Institute. Successful candidates are expected to have experience in the operations of an academic cleanroom (detailed below). The candidate will be committed to leading a diverse cleanroom community composed of faculty, users, and staff, combined with an interest in helping develop research and educational support within the Institute and with local industry. Some specific duties and responsibilities include: *Supervising and managing technical staff members *Collaborating with users, faculty, and management to develop strategic near- and long-term research, capabilities, and implementation plans *Coordinating with facilities on tool installations and facility maintenance *Developing new education and training modules to support evolving needs as well as the educational mission of the University *Assisting with finding and competing for external research/operational funding opportunities *Reviewing and updating MNFC policies when needed; implement operational changes based on need and/or improved operational efficiency *Working closely with Users Committee to gather feedback to improve user experience, and/or expand capabilities *Financial responsibilities: approving purchases; annual budget preparation; reviewing, and providing adjustments to monthly reports; analysis of tools utilization; user rate development with central PMI office *Promoting the MNFC and engage with the scientific community - presenting at workshops, and conferences Essential Qualifications: *PhD preferred, or Advanced degree in a related field including 10+ years cleanroom experience *Leadership and management of personnel *Hands-on experience in all cleanroom technology areas including but not limited to photolithography, nanolithography, metrology, physical vapor deposition, chemical vapor deposition, pattern transfer, microfluidics, and soft lithography *Knowledge of safety and health issues concerning cleanroom, life safety, equipment, clean operations and protocols, and hazardous materials handling and disposal *Excellent communication skills are required to work and interface with all stakeholders Interested candidates should submit a cover letter, resume documenting their experience and skill set, and a list of 3 or more references. This position is subject to the University's background check policy. To apply visit https://www.princeton.edu/acad-positions/position/29441 For application information and how to voluntarily self-identify, please link to http://web.princeton.edu/sites/dof/ApplicantsInfo.htm Requisition No: D-23-PSM-00005 How to Apply The form below must be completed to submit your application for this position. It is recommended that you read through the entire application and gather the required application materials before beginning your application. You will not be able to save or return to edit a partial application. Only complete applications will be accepted for consideration and the application form must be completed in its entirety before it can be submitted. Upon submitting your application, you will receive a confirmation email at the email address that you provide in your application. In some cases, your references may be contacted using the email address that you provide for them and may be asked to provide their recommendation via a web-based form similar to the application form. Be sure to provide the correct email addresses for you and all of your references to ensure that communications from Princeton University are properly delivered. For more information send an email to alex.norman at princeton.edu or call 609-258-6855 Alexander Norman, Ph.D Executive Director, Princeton Materials Institute Princeton University Bowen Hall, Room 324 70 Prospect Street Princeton, NJ 08544 (609) 258-6855 alex.norman at princeton.edu [cid:image001.png at 01D8AB3A.9008D360] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 10599 bytes Desc: image001.png URL: From tucsonr at illinois.edu Tue Aug 15 12:16:27 2023 From: tucsonr at illinois.edu (Richelson, Tucson) Date: Tue, 15 Aug 2023 16:16:27 +0000 Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate Message-ID: Hello all, I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn't have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing). I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no. Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool? [cid:image001.png at 01D9CF69.BC18FC10] Best, Tucson Richelson ------------------------------------------------------------------------- Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL) University of Illinois Rm 2118, MC-249 208 North Wright St. Urbana, IL 61801 Office: +1 (217) 244-5138 Web: http://mntl.illinois.edu/ Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11105 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IMG_1647.JPG Type: image/jpeg Size: 1964408 bytes Desc: IMG_1647.JPG URL: From jmaduzi2 at illinois.edu Tue Aug 15 14:37:35 2023 From: jmaduzi2 at illinois.edu (Maduzia, Joe) Date: Tue, 15 Aug 2023 18:37:35 +0000 Subject: [labnetwork] UIUC - Cleanroom Engineer Position Message-ID: Hello, If you are interested in a Cleanroom employment opportunity, please take a look here. We have posted a new position for a Cleanroom Engineer at UIUC in Urbana-Champaign. https://mechse.illinois.edu/about/mechse-employment Thank You, JOE MADUZIA Interim Lab Coordinator, Grainger College of Engineering, MechSE, Univ of IL Senior Research Engineer, Grainger College of Engineering, MechSE, Univ of IL 2239 LuMEB | (P) 217.244.6302 https://cleanroom.mechse.illinois.edu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From yakimom at sunypoly.edu Tue Aug 15 15:59:26 2023 From: yakimom at sunypoly.edu (Michael Yakimov) Date: Tue, 15 Aug 2023 19:59:26 +0000 Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate In-Reply-To: References: Message-ID: You absolutely need a magnetic keeper, but Cu backing isnt mandatory. What I did in exact same situation was drilling a hole in a target to 3/4 depth (used lathe for centering) and threaded it with a bottoming tap. Then screw keeper to target using a vacuum screw. Gluing a keeper with epoxy or a through hole with Ti screw are other options. Get Outlook for Android ________________________________ From: labnetwork on behalf of Richelson, Tucson Sent: Tuesday, August 15, 2023 12:16:27 PM To: 'labnetwork at mtl.mit.edu' Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate Hello all, I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing). I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no. Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool? [cid:image001.png at 01D9CF69.BC18FC10] Best, Tucson Richelson ------------------------------------------------------------------------- Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL) University of Illinois Rm 2118, MC-249 208 North Wright St. Urbana, IL 61801 Office: +1 (217) 244-5138 Web: http://mntl.illinois.edu/ Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11105 bytes Desc: image001.png URL: From welander at slac.stanford.edu Tue Aug 15 16:36:40 2023 From: welander at slac.stanford.edu (Welander, Paul B.) Date: Tue, 15 Aug 2023 20:36:40 +0000 Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate In-Reply-To: References: Message-ID: Tucson, We also have a Pro-Line sputtering system from Lesker with Torus Mag-Keeper guns. We've sputtered Ti in this system, and our 1/4"-thick target has the keeper "washer" screwed directly into the back of the target. Lesker will typically offer this where they can drill and tap directly into the target material, and only utilize a backing plate where necessary. Hope that helps, and good luck! Paul ****************************************** Paul B. Welander, Ph.D. SLAC National Accelerator Laboratory 2575 Sand Hill Road, M/S 94 Menlo Park, CA 94025 welander at slac.stanford.edu ****************************************** ________________________________ From: labnetwork on behalf of Richelson, Tucson Sent: Tuesday, August 15, 2023 9:16 AM To: 'labnetwork at mtl.mit.edu' Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate Hello all, I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing). I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no. Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool? [cid:image001.png at 01D9CF69.BC18FC10] Best, Tucson Richelson ------------------------------------------------------------------------- Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL) University of Illinois Rm 2118, MC-249 208 North Wright St. Urbana, IL 61801 Office: +1 (217) 244-5138 Web: http://mntl.illinois.edu/ Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11105 bytes Desc: image001.png URL: From jarohr at seas.upenn.edu Tue Aug 15 16:42:11 2023 From: jarohr at seas.upenn.edu (Jason Rohr) Date: Tue, 15 Aug 2023 16:42:11 -0400 Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate In-Reply-To: References: Message-ID: Dear Tucson, Will it sit nicely in the MagKeeper gun without sliding off? As far as I understand, if the target slides to the side then you'll get a short between the cathode and anode through the Ti target, resulting in your plasma extinguishing. If it doesn't slide, then it probably works; however, I would get a new target for long-term use. I would be curious about the outcome. Jason R?hr UPenn QNF On Tue, Aug 15, 2023 at 3:42?PM Richelson, Tucson wrote: > Hello all, > > > > I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. > I have a student that would like to sputter Ti. I have a Ti target, but it > doesn?t have a backing. All of my other targets have backings. It seems > logical that if I want to use a target on a gun with a MagKeeper I would > need a backing (pictured is my Al target with a backing). > > > > I asked our Lesker sales rep and his response was to use the Ti target > without the backing. I asked if the target will slide off of the gun. His > response was no. > > > > Does this make sense? Does anyone have experience with sputtering Ti in a > Lesker tool? > > > > > > > > > > *Best,* > > *Tucson Richelson* > > ------------------------------------------------------------------------- > > *Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)* > > *University of Illinois* > Rm 2118, MC-249 > > *208 North Wright St. Urbana, IL 61801* > > Office: *+1 (217) 244-5138* > > Web: http://mntl.illinois.edu/ > > > Schedule training: > https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com > > > Under the Illinois Freedom of Information Act any written communication to > or from university employees regarding university business is a > public record and may be subject to public disclosure. > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK97lfmUIE$ > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11105 bytes Desc: not available URL: From mmoneck at andrew.cmu.edu Tue Aug 15 17:00:58 2023 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Tue, 15 Aug 2023 17:00:58 -0400 Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate In-Reply-To: References: Message-ID: Hi Tucson, We have a PVD75 system with the Torus Magkeeper guns. We run targets with and without a backing plate depending on the material. That said, all of the targets have a magnetic keeper either mounted to the backing plate or to the back of the target. The advantage of running without a backing plate is that you can go to higher power if needed. For Ti, we prefer to run the target without a backing plate, so in that case, the magnetic keeper is mounted directly to the back of the target. We have not attempted to run any targets without a keeper, and I would be hesitant to do so, as the keeper helps to ensure the target is centered and sitting in good electrical and thermal contact with the copper cooling surface. If you are running a confocal arrangement with angled cathodes, I would also be concerned that actuation of the shutter would create enough vibration to move the target in the absence of a keeper. Best Regards, Matt On Tue, Aug 15, 2023 at 3:44?PM Richelson, Tucson wrote: > Hello all, > > > > I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. > I have a student that would like to sputter Ti. I have a Ti target, but it > doesn?t have a backing. All of my other targets have backings. It seems > logical that if I want to use a target on a gun with a MagKeeper I would > need a backing (pictured is my Al target with a backing). > > > > I asked our Lesker sales rep and his response was to use the Ti target > without the backing. I asked if the target will slide off of the gun. His > response was no. > > > > Does this make sense? Does anyone have experience with sputtering Ti in a > Lesker tool? > > > > > > > > > > *Best,* > > *Tucson Richelson* > > ------------------------------------------------------------------------- > > *Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)* > > *University of Illinois* > Rm 2118, MC-249 > > *208 North Wright St. Urbana, IL 61801* > > Office: *+1 (217) 244-5138* > > Web: http://mntl.illinois.edu/ > > Schedule training: > https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com > > Under the Illinois Freedom of Information Act any written communication to > or from university employees regarding university business is a > public record and may be subject to public disclosure. > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- -- Matthew T. Moneck, Ph.D Executive Director, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11105 bytes Desc: not available URL: From carsen at stanford.edu Tue Aug 15 17:35:48 2023 From: carsen at stanford.edu (Carsen Kline) Date: Tue, 15 Aug 2023 21:35:48 +0000 Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate In-Reply-To: References: Message-ID: Hi Tucson, Except for extremely hard (W, Mo) or brittle materials (pressed powder oxides or nitrides), our MagKeeper targets are directly drilled and tapped with a single hole to attach the keeper button, no backing plate needed. Our target vendor provides this service and will also retrofit non-keeper targets in their machine shop. I would not attempt to run a non-keeper target on a MagKeeper gun, especially if it's inclined at an angle. Cheers, Carsen SNF ________________________________ From: labnetwork on behalf of Richelson, Tucson Sent: Tuesday, August 15, 2023 9:16 AM To: 'labnetwork at mtl.mit.edu' Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate Hello all, I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing). I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no. Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool? [cid:image001.png at 01D9CF69.BC18FC10] Best, Tucson Richelson ------------------------------------------------------------------------- Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL) University of Illinois Rm 2118, MC-249 208 North Wright St. Urbana, IL 61801 Office: +1 (217) 244-5138 Web: http://mntl.illinois.edu/ Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11105 bytes Desc: image001.png URL: From sostrow at stanford.edu Wed Aug 16 13:33:16 2023 From: sostrow at stanford.edu (Sara Ostrowski) Date: Wed, 16 Aug 2023 17:33:16 +0000 Subject: [labnetwork] Invitation to the 2023 Workshop on Nanotechnology Infrastructure of the Future In-Reply-To: <30cc0f5549a9aef0b39d79fd8.209f20fc05.20230816005412.cda884bb1e.3d1d5cec@mail82.sea172.mcdlv.net> References: <30cc0f5549a9aef0b39d79fd8.209f20fc05.20230816005412.cda884bb1e.3d1d5cec@mail82.sea172.mcdlv.net> Message-ID: Hello Labnetwork!! I thought some members of this group might be interested in this upcoming workshop about the future national resource in nanotechnology infrastructure (see announcement below). I hope some of you will join us either in-person or virtually! Best Regards, Sara Sara G. Ostrowski Ph.D. Associate Director nano at stanford | Stanford University 140D Paul G. Allen Building 330 Jane Stanford Way, Stanford CA 94305 Email: sostrow.stanford.edu Phone: +1.650.725.0293 Website: nano at stanford View this email in your browser [2023 Workshop on Nanotechnology Infrastructure of the Future] You are invited to the ?2023 Workshop on Nanotechnology Infrastructure of the Future?, organized by the National Nanotechnology Coordinated Infrastructure (NNCI) with support from the NSF. Because the current NSF-funded NNCI ends in 2025, it is a critical time to look ahead to the future national resource in science and technology infrastructure. During this interactive workshop, YOU can provide essential insights and ideas towards shaping this future nanotechnology infrastructure resource. Your input will help develop a public-facing white paper recommending a path forward to US government agencies. We would greatly value having your voice in this important discussion! Best Regards, The Workshop Organizing Committee September 12 and 13, 2023 | 10:00AM - 5:30PM ET In-person at the National Academy of Sciences Building (2101 Constitution Ave NW, Washington DC) or Online (link provided after registration) Registration Deadline: September 1, 2023 [Link to Workshop Website] [Link to Registration (free)] [NSF and NNCI] [Website icon] [Email icon] Copyright (C) 2023 nano at stanford. All rights reserved. You are receiving this email because you are an NSF Principal Investigator. You can update your email preferences or unsubscribe at any time. Want to change how you receive these emails? You can update your preferences or unsubscribe -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 3056 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 2917 bytes Desc: image002.png URL: From jasonh at lesker.com Wed Aug 16 16:40:02 2023 From: jasonh at lesker.com (Jason Hrebik) Date: Wed, 16 Aug 2023 20:40:02 +0000 Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate In-Reply-To: References: Message-ID: Hello Tuscan, I hope all is well with you. I received a copy of your e-mail below and wanted to chime in. All non-magnetic targets that are used with a Mag Keeper source, do require the backing/ magnetic ?keeper? for proper fit to the source. For your Ti target, we can have the ?keeper? added for you (we offer this service through our Materials group) OR we can provide the drawing showing the required hole pattern to be added locally and provide a keeper for you. Can you confirm the target size (OD) you are using? Thank you. Best Regards, Jason Jason Hrebik Senior Product Manager Tel: +1 (412) 387-9116| Cell: +1 (412) 735-9863 | Email: jasonh at lesker.com If this email is transmitted to you in error, please notify me, and then delete this email and all copies. If this email is sent for legal or business purposes, (a) this email and its content or attachments may include confidential and/or proprietary information of Kurt J. Lesker Company, in which case all rights to that information are reserved by the Company, and (b) your right and authorization to retain, and use, this information is limited to the purpose(s) expressly stated in, or reasonably implied by, this email. Any questions should be directed to me. Thank you. From: labnetwork > On Behalf Of Jason Rohr Sent: Tuesday, August 15, 2023 4:42 PM To: Richelson, Tucson > Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate Dear Tucson, Will it sit nicely in the MagKeeper gun without sliding off? As far as I understand, if the target slides to the side then you'll get a short between the cathode and anode through the Ti target, resulting in your plasma extinguishing. If it doesn't slide, then it probably works; however, I would get a new target for long-term use. I would be curious about the outcome. Jason R?hr UPenn QNF On Tue, Aug 15, 2023 at 3:42?PM Richelson, Tucson > wrote: Hello all, I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing). I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no. Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool? [cid:189fae7b9e84cff311] Best, Tucson Richelson ------------------------------------------------------------------------- Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL) University of Illinois Rm 2118, MC-249 208 North Wright St. Urbana, IL 61801 Office: +1 (217) 244-5138 Web: http://mntl.illinois.edu/ Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK97lfmUIE$ -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 11105 bytes Desc: image001.png URL: From prnelson at cpp.edu Thu Aug 17 20:36:52 2023 From: prnelson at cpp.edu (Phyllis R. Nelson) Date: Fri, 18 Aug 2023 00:36:52 +0000 Subject: [labnetwork] Build or rent small Class 5 space? Message-ID: Hi all, I am part of a team that is proposing a smallsat project requiring the assembly of a cubesat with an optical subsystem. We would like to do the assembly in a Class 5 cleanroom space. We estimate that we will require approximately 150 to 200 square feet, plus the usual gowning transition space. Any suggestions on the advisability of renting or building such space would be greatly appreciated. If anyone knows of a facility which supports outside users or sublease in the greater Los Angeles area, that would be especially welcome. Thanks! Phyllis R. Nelson, PhD Professor, Electrical and Computer Engineering Faculty Director of Data Analytics California State Polytechnic University, Pomona email: prnelson at cpp dot edu director space: SSB 3340A7 faculty office: 9-317 phone: (909) 869-2649 (email preferred) Scientists discover the world that exists. Engineers create the world that never was. - Theodore von K?rm?n -------------- next part -------------- An HTML attachment was scrubbed... URL: From dwayne.chrusch at umanitoba.ca Fri Aug 18 10:10:49 2023 From: dwayne.chrusch at umanitoba.ca (Dwayne Chrusch) Date: Fri, 18 Aug 2023 14:10:49 +0000 Subject: [labnetwork] Build or rent small Class 5 space? In-Reply-To: References: Message-ID: Hello Phyllis, In 2015 we bought a soft wall cleanroom (ISO 5/Class 100) from Terra Universal for a new laser mill. We are happy with the room. It will soon be home for our new P7 Surface Profiler (KLA-Tencor). Link; https://www.terrauniversal.com/softwall-cleanrooms.php Below [my signature] is a list of common supplies that we use in our cleanrooms. The part numbers are from VWR Canada and Fisher Sci. (so you don?t have to look for everything yourself). Some part# may be outdated, but the web page(s) should suggest a replacement. We use the Durx wipes inside the cleanroom and the Kimwipes in the Chase area. The kimwipes give off particles when they are dry. If I remember correctly, the Durx wipes are rate for Class 100/ISO 5. We haven?t had any issues with these. In fact, our particle counter indicates that our Litho room is ISO4/Class 10 (it only needs to be ISO5/Class 100). Regards, Dwayne D. Chrusch, BSc. (EE), MSc. (he/him) Operations Manager, Training & Safety Coordinator Nanosystem Fabrication Lab (NSFL) E3-471 Engineering 75A Chancellor's Circle University of Manitoba Winnipeg, Manitoba Canada, R3T 5V6 > 351 Dev CA11025-170 > Acetone CAJT9005-5 (old) / BDH2025-1GLP > CaCl2 CAAA12316-A7 > Ethanol CA71007-222 / > A9954 (Fischer Sci) > H2O2 CAHX0635-2 > H2SO4 CA11024-170 > HF Gel CA06645 > HPR 504 CA11019-872 > IPA CAJT9079-5 > Methanol / BP11054 > Cleanroom Gloves 89130-852 / 17-986-004 > Cotton 80081-602 MCR Safety > NDex CA32891-809 / 29-635-200 > Neoprene 80081-504 > Vinyl 12000-146 > > Kimwipes CA21905-011 / 06-666-1A > Durx wipes 21913-412 / 1798779A > > Glasses CA14227-708 & CA33002-210 > Lab coats 82128-748 > Hair nets 10135-742 > Masks 414004-667 > Respirator ??? > Shoe covers 21923-234 > > Bottles, Glass 16218-186 > Beakers 10754-956 > Flowmeter 54848-092 > uScope slides 470145-790 > Petri, Pyrex 76175-266 > Petri, Styr 75838-866 > Wash Bottle 03-409-20D > Silicone tube 89068-474 > Swabs 89022-998 > Syringe 10mL 97048-652 > On Aug 17, 2023, at 7:36 PM, Phyllis R. Nelson wrote: > > Caution: This message was sent from outside the University of Manitoba. > > Hi all, > > I am part of a team that is proposing a smallsat project requiring the assembly of a cubesat with an optical subsystem. We would like to do the assembly in a Class 5 cleanroom space. We estimate that we will require approximately 150 to 200 square feet, plus the usual gowning transition space. > > Any suggestions on the advisability of renting or building such space would be greatly appreciated. If anyone knows of a facility which supports outside users or sublease in the greater Los Angeles area, that would be especially welcome. > > Thanks! > > > Phyllis R. Nelson, PhD > Professor, Electrical and Computer Engineering > Faculty Director of Data Analytics > California State Polytechnic University, Pomona > > email: prnelson at cpp dot edu > > director space: SSB 3340A7 > faculty office: 9-317 > phone: (909) 869-2649 (email preferred) > > Scientists discover the world that exists. Engineers create the world that never was. - Theodore von K?rm?n > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From wjkiethe at ncsu.edu Fri Aug 18 11:30:14 2023 From: wjkiethe at ncsu.edu (William Kiether) Date: Fri, 18 Aug 2023 11:30:14 -0400 Subject: [labnetwork] Ebara Pump Setup Message-ID: Hello, We are trying to test some Ebara dry pump/blower combos that we got from a tool donation and are having problems with the setup. The pumps are EST200WN models with both a pump and a blower, but the controllers are only recognizing them as EST10N, which are smaller units w/o the blower option. When powered up, only the pump will turn on. This occurs whether we are using the Ebara controller or the remote option with jumpers. The power is 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody encountered this problem? The Ebara documentation has not been helpful for this issue. Bill Kiether NCSU Nanofabrication Facility -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Fri Aug 18 12:27:38 2023 From: schweig at umich.edu (Dennis Schweiger) Date: Fri, 18 Aug 2023 12:27:38 -0400 Subject: [labnetwork] Ebara Pump Setup In-Reply-To: References: Message-ID: Bill, On the Ebara A70's we use, there is a delay that is vacuum related between the start of the mechanical pump, before the blower fires up. Is it possible that this is your issue? Dennis 734.647.2055 Ofc On Fri, Aug 18, 2023 at 12:21?PM William Kiether wrote: > Hello, > > We are trying to test some Ebara dry pump/blower combos that we got from a > tool donation and are having problems with the setup. The pumps are > EST200WN models with both a pump and a blower, but the controllers are only > recognizing them as EST10N, which are smaller units w/o the blower option. > When powered up, only the pump will turn on. This occurs whether we are > using the Ebara controller or the remote option with jumpers. The power is > 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody > encountered this problem? The Ebara documentation has not been helpful for > this issue. > > Bill Kiether > NCSU Nanofabrication Facility > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From wjkiethe at ncsu.edu Fri Aug 18 13:26:36 2023 From: wjkiethe at ncsu.edu (William Kiether) Date: Fri, 18 Aug 2023 13:26:36 -0400 Subject: [labnetwork] Ebara Pump Setup In-Reply-To: References: Message-ID: No, we are aware of the 30 second delay, and have let it go for up to 10 minutes - we also haven?t detected any voltage being sent to the blowers Bill On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger wrote: > Bill, > > On the Ebara A70's we use, there is a delay that is vacuum related between > the start of the mechanical pump, before the blower fires up. Is it > possible that this is your issue? > > Dennis > > 734.647.2055 Ofc > > On Fri, Aug 18, 2023 at 12:21?PM William Kiether > wrote: > >> Hello, >> >> We are trying to test some Ebara dry pump/blower combos that we got from >> a tool donation and are having problems with the setup. The pumps are >> EST200WN models with both a pump and a blower, but the controllers are only >> recognizing them as EST10N, which are smaller units w/o the blower option. >> When powered up, only the pump will turn on. This occurs whether we are >> using the Ebara controller or the remote option with jumpers. The power is >> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody >> encountered this problem? The Ebara documentation has not been helpful for >> this issue. >> >> Bill Kiether >> NCSU Nanofabrication Facility >> > _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > -------------- next part -------------- An HTML attachment was scrubbed... URL: From rob.breisch at trilliumus.com Fri Aug 18 13:36:32 2023 From: rob.breisch at trilliumus.com (Rob Breisch) Date: Fri, 18 Aug 2023 17:36:32 +0000 Subject: [labnetwork] Ebara Pump Setup In-Reply-To: References: Message-ID: Bill - Do you need a contact at Ebara that can help? Or have you already tried them. I?m not familiar with the problem you are speaking of, but on Edwards pumps of that vintage there is a rotary dial on the electric module to let you set the model. Seems unlikely both would have the same problem though if it was that. More likely they?ve lost some setting and are defaulting back to new board state. Rob Breisch 801-726-5035 > On Aug 18, 2023, at 10:05 AM, William Kiether wrote: > > ? > Hello, > > We are trying to test some Ebara dry pump/blower combos that we got from a tool donation and are having problems with the setup. The pumps are EST200WN models with both a pump and a blower, but the controllers are only recognizing them as EST10N, which are smaller units w/o the blower option. When powered up, only the pump will turn on. This occurs whether we are using the Ebara controller or the remote option with jumpers. The power is 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody encountered this problem? The Ebara documentation has not been helpful for this issue. > > Bill Kiether > NCSU Nanofabrication Facility > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork From spaolini at cns.fas.harvard.edu Fri Aug 18 18:54:00 2023 From: spaolini at cns.fas.harvard.edu (Paolini, Steven) Date: Fri, 18 Aug 2023 22:54:00 +0000 Subject: [labnetwork] Ebara Pump Setup In-Reply-To: References: Message-ID: Most mech pump/ blower packages use pressure as a signal for the blower to cut in. I would isolate the package by dead heading the pump and seeing if the blower kicks in. If so, you have an upstream vacuum leak that prevents the blower from triggering. Equipment Dood Get Outlook for iOS ________________________________ From: labnetwork on behalf of William Kiether Sent: Friday, August 18, 2023 1:26:36 PM To: Dennis Schweiger Cc: Lab Network (labnetwork at mtl.mit.edu) ; Philip Barletta ; Erik Vick Subject: Re: [labnetwork] Ebara Pump Setup No, we are aware of the 30 second delay, and have let it go for up to 10 minutes - we also haven?t detected any voltage being sent to the blowers Bill On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger > wrote: Bill, On the Ebara A70's we use, there is a delay that is vacuum related between the start of the mechanical pump, before the blower fires up. Is it possible that this is your issue? Dennis 734.647.2055 Ofc On Fri, Aug 18, 2023 at 12:21?PM William Kiether > wrote: Hello, We are trying to test some Ebara dry pump/blower combos that we got from a tool donation and are having problems with the setup. The pumps are EST200WN models with both a pump and a blower, but the controllers are only recognizing them as EST10N, which are smaller units w/o the blower option. When powered up, only the pump will turn on. This occurs whether we are using the Ebara controller or the remote option with jumpers. The power is 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody encountered this problem? The Ebara documentation has not been helpful for this issue. Bill Kiether NCSU Nanofabrication Facility _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From wjkiethe at ncsu.edu Fri Aug 18 23:49:30 2023 From: wjkiethe at ncsu.edu (William Kiether) Date: Fri, 18 Aug 2023 23:49:30 -0400 Subject: [labnetwork] Ebara Pump Setup In-Reply-To: References: Message-ID: I am dead heading the package, it gets to 450 mTorr - still no blower On Fri, Aug 18, 2023 at 6:54 PM Paolini, Steven < spaolini at cns.fas.harvard.edu> wrote: > Most mech pump/ blower packages use pressure as a signal for the blower to > cut in. I would isolate the package by dead heading the pump and seeing if > the blower kicks in. If so, you have an upstream vacuum leak that prevents > the blower from triggering. > > Equipment Dood > > Get Outlook for iOS > ------------------------------ > *From:* labnetwork on behalf of William > Kiether > *Sent:* Friday, August 18, 2023 1:26:36 PM > *To:* Dennis Schweiger > *Cc:* Lab Network (labnetwork at mtl.mit.edu) ; > Philip Barletta ; Erik Vick > *Subject:* Re: [labnetwork] Ebara Pump Setup > > No, we are aware of the 30 second delay, and have let it go for up to 10 > minutes - we also haven?t detected any voltage being sent to the blowers > > Bill > > On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger > wrote: > > Bill, > > On the Ebara A70's we use, there is a delay that is vacuum related between > the start of the mechanical pump, before the blower fires up. Is it > possible that this is your issue? > > Dennis > > 734.647.2055 Ofc > > On Fri, Aug 18, 2023 at 12:21?PM William Kiether > wrote: > > Hello, > > We are trying to test some Ebara dry pump/blower combos that we got from a > tool donation and are having problems with the setup. The pumps are > EST200WN models with both a pump and a blower, but the controllers are only > recognizing them as EST10N, which are smaller units w/o the blower option. > When powered up, only the pump will turn on. This occurs whether we are > using the Ebara controller or the remote option with jumpers. The power is > 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody > encountered this problem? The Ebara documentation has not been helpful for > this issue. > > Bill Kiether > NCSU Nanofabrication Facility > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimm at science.xyz Sat Aug 19 19:57:25 2023 From: jimm at science.xyz (Jim Mitchell) Date: Sat, 19 Aug 2023 19:57:25 -0400 Subject: [labnetwork] Ebara Pump Setup In-Reply-To: References: Message-ID: Bill, some things to try. Check the phase connections for both pumps. Check the vac switch for operation when pumping down. Look for a configuration menu on the controller, maybe it has a dead battery and is defaulting. We have some of these, I'll look for a manual. Jim On Sat, Aug 19, 2023, 7:47 AM William Kiether wrote: > I am dead heading the package, it gets to 450 mTorr - still no blower > > > On Fri, Aug 18, 2023 at 6:54 PM Paolini, Steven < > spaolini at cns.fas.harvard.edu> wrote: > >> Most mech pump/ blower packages use pressure as a signal for the blower >> to cut in. I would isolate the package by dead heading the pump and seeing >> if the blower kicks in. If so, you have an upstream vacuum leak that >> prevents the blower from triggering. >> >> Equipment Dood >> >> Get Outlook for iOS >> ------------------------------ >> *From:* labnetwork on behalf of William >> Kiether >> *Sent:* Friday, August 18, 2023 1:26:36 PM >> *To:* Dennis Schweiger >> *Cc:* Lab Network (labnetwork at mtl.mit.edu) ; >> Philip Barletta ; Erik Vick >> *Subject:* Re: [labnetwork] Ebara Pump Setup >> >> No, we are aware of the 30 second delay, and have let it go for up to 10 >> minutes - we also haven?t detected any voltage being sent to the blowers >> >> Bill >> >> On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger >> wrote: >> >> Bill, >> >> On the Ebara A70's we use, there is a delay that is vacuum related >> between the start of the mechanical pump, before the blower fires up. Is >> it possible that this is your issue? >> >> Dennis >> >> 734.647.2055 Ofc >> >> On Fri, Aug 18, 2023 at 12:21?PM William Kiether >> wrote: >> >> Hello, >> >> We are trying to test some Ebara dry pump/blower combos that we got from >> a tool donation and are having problems with the setup. The pumps are >> EST200WN models with both a pump and a blower, but the controllers are only >> recognizing them as EST10N, which are smaller units w/o the blower option. >> When powered up, only the pump will turn on. This occurs whether we are >> using the Ebara controller or the remote option with jumpers. The power is >> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody >> encountered this problem? The Ebara documentation has not been helpful for >> this issue. >> >> Bill Kiether >> NCSU Nanofabrication Facility >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> >> _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From bernhard.reineke at uni-paderborn.de Mon Aug 21 03:23:46 2023 From: bernhard.reineke at uni-paderborn.de (Bernhard Reineke) Date: Mon, 21 Aug 2023 07:23:46 +0000 Subject: [labnetwork] Edwards nXDS6i pump Message-ID: Hello, we have an Edwards nXDS6i pump in our laboratory. The pump is broken and vibrates excessively. As the cost of maintaining the pump by the company is very expensive, we decided to open it and fix it ourselves. However, we can't remove the screw on the pump's back to access the motor compartment. Does anyone know how to remove this screw? Best, Bernhard Reineke Matsudo PHOQS Paderborn University 33100 Paderborn Germany -------------- next part -------------- An HTML attachment was scrubbed... URL: From kckeenan at seas.upenn.edu Mon Aug 21 09:54:24 2023 From: kckeenan at seas.upenn.edu (Kyle Keenan) Date: Mon, 21 Aug 2023 09:54:24 -0400 Subject: [labnetwork] Edwards nXDS6i pump In-Reply-To: References: Message-ID: Hi Bernhard, Just my opinion but, in my experience, trying to do anything other than replacing tip seals, o-rings and exhaust valve kits is not worth the time and effort. Any money you save will likely be outweighed by lost productivity, that is, assuming you are able to get the pump working properly, which is much more difficult than it may seem. Good luck. Kyle On Mon, Aug 21, 2023 at 8:22?AM Bernhard Reineke < bernhard.reineke at uni-paderborn.de> wrote: > Hello, > > > we have an Edwards nXDS6i pump in our laboratory. The pump is broken and > vibrates excessively. As the cost of maintaining the pump by the company is > very expensive, we decided to open it and fix it ourselves. However, we > can't remove the screw on the pump's back to access the motor compartment. > Does anyone know how to remove this screw? > > > Best, > > > Bernhard Reineke Matsudo > > PHOQS > > Paderborn University > > 33100 Paderborn > > Germany > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!QY5hf9E96ckkQnYJpebMFKUGFTCj7zs1ykZ6tNshWsCIA2Vvbxg6XnxqYtUJA3lgYg_oh7BLyxBuVUJzBidP5nFdoJoirVeoeBahV4c$ > -- Kyle Keenan Senior Manager - Laboratory Operations Quattrone Nanofabrication Facility University of Pennsylvania P: 215-898-7560 F: 215-573-4925 -------------- next part -------------- An HTML attachment was scrubbed... URL: From r.khanna at ucl.ac.uk Mon Aug 21 12:31:41 2023 From: r.khanna at ucl.ac.uk (Khanna, Rohit) Date: Mon, 21 Aug 2023 16:31:41 +0000 Subject: [labnetwork] Edwards nXDS6i pump In-Reply-To: References: Message-ID: Hi Bernhard, I had a similar issue with the nxdx10i pumps. These units are a little tricky to service as there is a elaborate procedure to remove the bearings from these pumps which involves thermal contraction or expansion to create clearance to remove the bearing one could use a oven to heat the pumps or possibly use liquid nitrogen to cool the metal parts. At the time we bought he pump repair kit Edwards were selling bearing kits for these pumps the first thing I would suggest is check if you can still buy the bearing kits for these pumps. If yes I will be on a position to share more information with you for repairing these pumps. These pumps are good as they have inverter drives for the 3 phase induction/bldc motors however I think the bearing design for these motors is a bit delicate if these pumps are abused. If needed I will be able to mail you the images I had taken to disassemble the pump. Warm Regards Rohit Khanna Electronic Test & Measurement Engineer London Centre for NANO Technology, UCL Ph:+44-020-76799984 Lab: +44 20 3108 1516 Int Ext: 39984 ________________________________ From: labnetwork on behalf of Bernhard Reineke Sent: 21 August 2023 08:23 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Edwards nXDS6i pump ? Caution: External sender Hello, we have an Edwards nXDS6i pump in our laboratory. The pump is broken and vibrates excessively. As the cost of maintaining the pump by the company is very expensive, we decided to open it and fix it ourselves. However, we can't remove the screw on the pump's back to access the motor compartment. Does anyone know how to remove this screw? Best, Bernhard Reineke Matsudo PHOQS Paderborn University 33100 Paderborn Germany -------------- next part -------------- An HTML attachment was scrubbed... URL: From dlafleur at cns.fas.harvard.edu Mon Aug 21 13:32:14 2023 From: dlafleur at cns.fas.harvard.edu (LaFleur, David W) Date: Mon, 21 Aug 2023 17:32:14 +0000 Subject: [labnetwork] Edwards nXDS6i pump In-Reply-To: References: Message-ID: <29523E08-099D-4DE2-ACCC-AF4C0AAFA2D2@cns.fas.harvard.edu> Hi Bernhard, I?ve been in this business for 40 years and from my experience Kyle is absolutely correct. You don?t want to get into rebuilding pumps unless you have a shop and experience personal set up for doing this kind of work. It?s just not worth it. There is a reason why it?s expensive. David LaFleur Equipment Engineer CNS, Harvard University 11 Oxford St. Cambridge, Ma. 02138 From: "labnetwork-bounces at mtl.mit.edu" on behalf of Kyle Keenan Date: Monday, August 21, 2023 at 11:37 AM To: Bernhard Reineke Cc: "labnetwork at mtl.mit.edu" Subject: Re: [labnetwork] Edwards nXDS6i pump Hi Bernhard, Just my opinion but, in my experience, trying to do anything other than replacing tip seals, o-rings and exhaust valve kits is not worth the time and effort. Any money you save will likely be outweighed by lost productivity, that is, assuming you are able to get the pump working properly, which is much more difficult than it may seem. Good luck. Kyle On Mon, Aug 21, 2023 at 8:22?AM Bernhard Reineke > wrote: Hello, we have an Edwards nXDS6i pump in our laboratory. The pump is broken and vibrates excessively. As the cost of maintaining the pump by the company is very expensive, we decided to open it and fix it ourselves. However, we can't remove the screw on the pump's back to access the motor compartment. Does anyone know how to remove this screw? Best, Bernhard Reineke Matsudo PHOQS Paderborn University 33100 Paderborn Germany _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!QY5hf9E96ckkQnYJpebMFKUGFTCj7zs1ykZ6tNshWsCIA2Vvbxg6XnxqYtUJA3lgYg_oh7BLyxBuVUJzBidP5nFdoJoirVeoeBahV4c$ -- Kyle Keenan Senior Manager - Laboratory Operations Quattrone Nanofabrication Facility University of Pennsylvania P: 215-898-7560 F: 215-573-4925 -------------- next part -------------- An HTML attachment was scrubbed... URL: From christophe.clement at polymtl.ca Tue Aug 22 09:01:00 2023 From: christophe.clement at polymtl.ca (=?iso-8859-1?Q?Christophe_Cl=E9ment?=) Date: Tue, 22 Aug 2023 09:01:00 -0400 (EDT) Subject: [labnetwork] Gas controller issue Message-ID: <08f101d9d4f8$afc19e60$0f44db20$@polymtl.ca> Hello everyone A few years ago we bought a gas detection controller type MP204 with SM-95 transmitters from International Sensor Technology . We currently have a malfunction on the controller (an electronic board has burned out) and I would like to send the controller for repair. However, the company seems to no longer exist... their e-mail and website return a 404 error (www.intlsensor.com) Do you know of a third-party company that would be able to repair this type of controller and check transmitter? Here is the controller type: Thank you for your help! Christophe Christophe Cl?ment Technicien laboratoire Laboratoire de microfabrication (LMF) Groupe des Couches Minces (GCM) www.gcmlab.ca Ecole Polytechnique de Montr?al www.polymtl.ca D?partement de g?nie physique * 2900 Boulevard Edouard Monpetit Pavillon JAB Campus de l'Universit? de Montr?al Montr?al (Qu?bec) H3T 1J4 8 christophe.clement at polymtl.ca ( 514 340 4711 #2417 Fax : 514 340 5195 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 56249 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 35401 bytes Desc: not available URL: From wrowe at purdue.edu Tue Aug 22 10:46:39 2023 From: wrowe at purdue.edu (Rowe, William J) Date: Tue, 22 Aug 2023 14:46:39 +0000 Subject: [labnetwork] Recommendations for a new CMP Message-ID: Good Morning, At Purdue University, Birck Nanotechnology Center, we are looking to purchase a new CMP. Does anyone have any recommendations for a new CMP? We are looking for reliability, ease of use and quality results on the wafers. Would like one with 200mm wafer capability. Thanks in advance for your inputs and suggestions. Best Regards, Bill Bill Rowe Research Engineer Purdue University Birck Nanotechnology Center 1205 W. State Street West Lafayette, Indiana 47907 Office: (765)496-8389 Cell: (765)427-3587 wrowe at purdue.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From Travis at evolvediamonds.com Tue Aug 22 14:26:41 2023 From: Travis at evolvediamonds.com (Travis Wade) Date: Tue, 22 Aug 2023 14:26:41 -0400 Subject: [labnetwork] Seeking a service engineer for a 2000 vintage Zygo Optical Profilometer Message-ID: Dear Colleagues, We have an older (~2000) Zygo optical profilometer (NV5000) that requires some maintenance and troubleshooting. Zygo no longer supports the tool. Is anyone aware of anyone providing service for such instruments, preferably near Massachusetts? Best regards, Travis ---------------------------------------------- Travis Wade, Ph.D. Evolve Diamonds LLC Ph. +1 (978) 434-2283 www.EvolveDiamonds.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill_flounders at berkeley.edu Tue Aug 22 15:32:55 2023 From: bill_flounders at berkeley.edu (Albert William Flounders) Date: Tue, 22 Aug 2023 12:32:55 -0700 Subject: [labnetwork] Seeking a service engineer for a 2000 vintage Zygo Optical Profilometer In-Reply-To: References: Message-ID: I've always wanted to write this... Go See the Wizard of Boz https://wizardofboz.com/ Bill Flounders UC Berkeley On Tue, Aug 22, 2023 at 12:18?PM Travis Wade wrote: > Dear Colleagues, > > We have an older (~2000) Zygo optical profilometer (NV5000) that requires > some maintenance and troubleshooting. Zygo no longer supports the tool. > > Is anyone aware of anyone providing service for such instruments, > preferably near Massachusetts? > > Best regards, > > Travis > ---------------------------------------------- > Travis Wade, Ph.D. > Evolve Diamonds LLC > Ph. +1 (978) 434-2283 > www.EvolveDiamonds.com > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From yb2471 at columbia.edu Tue Aug 22 21:07:14 2023 From: yb2471 at columbia.edu (Youry Borisenkov) Date: Tue, 22 Aug 2023 18:07:14 -0700 Subject: [labnetwork] Pulsed DC sputtering process Message-ID: Hi All, Here at Columbia University we have an AJA sputtering tool that, in addition to RF sources, is also equipped with a pulsed DC power supply (TruPlasma DC 4002 DC Generator). After 5 years we finally have a student that wants to use this option. I'm looking to have a short discussion with someone who has an established pulsed DC sputtering process on their tool. To get an idea for starting point parameters. Thank you and have a beautiful day, Youry -------------- next part -------------- An HTML attachment was scrubbed... URL: From lopezg at seas.upenn.edu Tue Aug 22 19:47:28 2023 From: lopezg at seas.upenn.edu (Gerald Lopez) Date: Tue, 22 Aug 2023 19:47:28 -0400 Subject: [labnetwork] Last Call: Register for MAEBL 2023 at UChicago Message-ID: Dear Colleagues: The 7th *Meeting for Advanced Electron Beam Lithography* (MAEBL) on *September 12-14, 2023, *will take place at the *University of Chicago *(UChicago)* and online*. The hybrid event will stream the live talks through the GatherTown platform, but *attendees are strongly encouraged to attend in person*. - *Register: *https://maebl.eventbrite.com . - Full Registration is the same if you attend online or in person. - *NEW: *Student Registration has been created to encourage growth in student participation online or in person. - View Program - *MAEBL 2023* - Day 0 - Sept 12, 2023: Host tour and Operations Discussion - Day 1 - Sept 13, 2023: MAEBL Foundations Workshop - Day 2 - Sept 14, 2023: MAEBL Core Meeting - MAEBLx - shorter meetings and online only - North America: November 15, 2023 EDT MAEBL 2023 is a highly anticipated 2.5-day event featuring diverse activities to foster knowledge exchange and community engagement among electron beam lithographers. On day 0, attendees are invited to participate in a tour of the esteemed University of Chicago Pritzker Nanofabrication Facility and a lab operations discussion segment for those arriving early and attending in person. Day 1 will feature the MAEBL Foundations Workshop, designed specifically for beginners of electron beam lithography (EBL), including researchers and students. This workshop offers an excellent opportunity for participants to acquire or brush up on their knowledge of EBL fundamentals, such as machine-agnostic tool operation, data preparation, and process development. By the end of the Foundations Workshop, participants will have developed a sound understanding of EBL and be encouraged to participate in the MAEBL Core Workshop. The final component of the event is the MAEBL Core Meeting, which serves as a platform for the community to engage in meaningful conversations and learn from one another. The meeting aims to connect active novices with experienced EBL tool owners and users in an open forum to exchange practical and directly applicable EBL knowledge. Attendees are encouraged to network with an opportunity to present their most challenging patterns or processing issues for collaborative expert advice from the community. The event features invited talks from users in the field, adding to the richness of the conversation. Register at https://maebl.eventbrite.com and PLEASE ENCOURAGE STUDENTS to attend! * Registration is only $175* ($87.50/students) for the full meeting at UChicago and bonus meetings (MAEBLx) access, whether attending online or in person. Questions can be sent to gerald at maebl.org. Sincerely, Gerald- Gerald G. Lopez, Ph.D. (he/him/his) Director of Operations and Business Development & Center Associate Director University of Pennsylvania | Singh Center for Nanotechnology NNCI Mid-Atlantic Nanotechnology Hub (MANTH) ? nnci.net 3205 Walnut Street, Philadelphia, PA 19104 USA Deliveries: 3231 Walnut Street, LRSM Building, Philadelphia, PA 19104 nano.upenn.edu ? lopezg at seas.upenn.edu ? +1-215-573-4041 ? linkedin.com/in/geraldglopez/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From sament at cghnulls.com Wed Aug 23 11:12:59 2023 From: sament at cghnulls.com (Shelby Ament) Date: Wed, 23 Aug 2023 15:12:59 +0000 Subject: [labnetwork] Help finding pick/tweezers to handle 9x9x0.25 glass substrates Message-ID: Hello, I work with the University of Arizona's Nanofabrication facility. I was wondering if anyone could help me in sourcing some tooling. In particular, I'm looking for "tongs" or manual "picks" to hold 9"x9"x0.25" glass photomask substrates. I really don't know where to start in terms of manufacturers. Any help you could provide is much appreciated. Thank you! [cid:image003.png at 01D9D599.8F12B220] Best regards, Shelby [cid:image001.png at 01D9D599.2FAE1270] Shelby Ament, PhD Senior Optical Engineer 520-833-5761 ext. 704 cghnulls.com [cid:image002.png at 01D9D599.2FAE1270] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 13524 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 182049 bytes Desc: image002.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 1208686 bytes Desc: image003.png URL: From bob at eecs.berkeley.edu Wed Aug 23 12:12:47 2023 From: bob at eecs.berkeley.edu (Robert M. HAMILTON) Date: Wed, 23 Aug 2023 09:12:47 -0700 Subject: [labnetwork] Help finding pick/tweezers to handle 9x9x0.25 glass substrates In-Reply-To: References: Message-ID: https://www.h-square.com/product-category/manual-wafer-handling/mechanical-picks/ Robert Hamilton Mobile 510-325-7557 (mobile) Email preferred: roberthamilton at berkeley.edu On Wed, Aug 23, 2023 at 8:47?AM Shelby Ament wrote: > Hello, > > > > I work with the University of Arizona?s Nanofabrication facility. I was > wondering if anyone could help me in sourcing some tooling. > > > > In particular, I'm looking for "tongs" or manual "picks" to hold > 9"x9"x0.25" glass photomask substrates. > > I really don't know where to start in terms of manufacturers. Any help you > could provide is much appreciated. Thank you! > > > > > > > > Best regards, > > Shelby > > > > *Shelby Ament, PhD* > > Senior Optical Engineer > > 520-833-5761 ext. 704 > > cghnulls.com > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 13524 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 182049 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 1208686 bytes Desc: not available URL: From vsoares at inesc-mn.pt Wed Aug 23 12:31:03 2023 From: vsoares at inesc-mn.pt (=?iso-8859-1?Q?Virg=EDnia_Soares?=) Date: Wed, 23 Aug 2023 17:31:03 +0100 Subject: [labnetwork] Help finding pick/tweezers to handle 9x9x0.25 glass substrates In-Reply-To: References: Message-ID: <000001d9d5df$35a74c00$a0f5e400$@inesc-mn.pt> Hi Shelby, SPS International has mask handling picks, that?s where we bought ours from. https://www.sps-international.com/webshop/handling-shipping/photomask-handli ng/mask-pick-side-grip/p1/ Melhores Cumprimentos/Best Regards Virginia Soares INESC-MN Rua Alves Redol,9 1000-029 Lisboa Portugal www.inesc-mn.pt From: labnetwork On Behalf Of Shelby Ament Sent: 23 de agosto de 2023 16:13 To: labnetwork at mtl.mit.edu Subject: [labnetwork] Help finding pick/tweezers to handle 9x9x0.25 glass substrates Hello, I work with the University of Arizona?s Nanofabrication facility. I was wondering if anyone could help me in sourcing some tooling. In particular, I'm looking for "tongs" or manual "picks" to hold 9"x9"x0.25" glass photomask substrates. I really don't know where to start in terms of manufacturers. Any help you could provide is much appreciated. Thank you! Best regards, Shelby Shelby Ament, PhD Senior Optical Engineer 520-833-5761 ext. 704 cghnulls.com -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image004.png Type: image/png Size: 9655 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 25915 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 9633 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 98456 bytes Desc: not available URL: From price.798 at osu.edu Wed Aug 23 12:39:28 2023 From: price.798 at osu.edu (Price, Aimee) Date: Wed, 23 Aug 2023 16:39:28 +0000 Subject: [labnetwork] Help finding pick/tweezers to handle 9x9x0.25 glass substrates In-Reply-To: References: Message-ID: Hi Shelby, I had H-Squared make mask picks for my 4? and 5? plates. We had them made custom so they could be used in our specific process chemicals. We were making masks and reticles with our EBL and wet etching them. My contact there is no longer there (from 2010, yes I?ve been doing this a long time). However, we also have purchased other vacuum products more recently, with good results. H-Square Corp. | Innovative, Automated Semiconductor Handling Solutions I hope that helps. Best, Aimee Bross Price Manager, Nanofabrication The Ohio State University Nanotech West Lab Institute for Materials Research 1381 Kinnear Road Suite 100 Columbus, OH 43212 614-292-2753 Price.798 at osu.edu Nanotech.osu.edu Pronouns: she/her/hers Commercial Chair, 66th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN) May 30-June 2, 2023, San Francisco, CA Conference Chair, 67th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN) | https://eipbn.org | From: labnetwork On Behalf Of Shelby Ament Sent: Wednesday, August 23, 2023 11:13 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Help finding pick/tweezers to handle 9x9x0.25 glass substrates Hello, I work with the University of Arizona?s Nanofabrication facility. I was wondering if anyone could help me in sourcing some tooling. In particular, I'm looking for "tongs" or manual "picks" to hold 9"x9"x0.?25" Hello, I work with the University of Arizona?s Nanofabrication facility. I was wondering if anyone could help me in sourcing some tooling. In particular, I'm looking for "tongs" or manual "picks" to hold 9"x9"x0.25" glass photomask substrates. I really don't know where to start in terms of manufacturers. Any help you could provide is much appreciated. Thank you! [cid:image003.png at 01D9D5BD.C5530D70] Best regards, Shelby [cid:image004.png at 01D9D5BD.C5530D70] Shelby Ament, PhD Senior Optical Engineer 520-833-5761 ext. 704 cghnulls.com [cid:image005.png at 01D9D5BD.C5530D70] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 1208686 bytes Desc: image003.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image004.png Type: image/png Size: 13524 bytes Desc: image004.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image005.png Type: image/png Size: 182049 bytes Desc: image005.png URL: From demis at ucsb.edu Wed Aug 23 14:41:41 2023 From: demis at ucsb.edu (Demis D. John) Date: Wed, 23 Aug 2023 11:41:41 -0700 Subject: [labnetwork] Help finding pick/tweezers to handle 9x9x0.25 glass substrates In-Reply-To: References: Message-ID: Here are a few links I have on-hand: https://www.h-square.com/product-category/manual-wafer-handling/mechanical-picks/ Wafer/Reticle Handling | VWR -- Demis (contact info ) *Reminder*: The UCSB NanoFab has a publications policy On Wed, Aug 23, 2023 at 8:44?AM Shelby Ament wrote: > Hello, > > > > I work with the University of Arizona?s Nanofabrication facility. I was > wondering if anyone could help me in sourcing some tooling. > > > > In particular, I'm looking for "tongs" or manual "picks" to hold > 9"x9"x0.25" glass photomask substrates. > > I really don't know where to start in terms of manufacturers. Any help you > could provide is much appreciated. Thank you! > > > > > > > > Best regards, > > Shelby > > > > *Shelby Ament, PhD* > > Senior Optical Engineer > > 520-833-5761 ext. 704 > > cghnulls.com > > > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 13524 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 182049 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.png Type: image/png Size: 1208686 bytes Desc: not available URL: From gheorghe.iordache at infim.ro Thu Aug 24 06:07:01 2023 From: gheorghe.iordache at infim.ro (Gheorghe IORDACHE) Date: Thu, 24 Aug 2023 13:07:01 +0300 Subject: [labnetwork] Cleanroom Designers - Freelance or Perm - Multiple Openings Message-ID: <003001d9d672$b9eb6d50$2dc247f0$@infim.ro> Dear All, You may know somebody interested in the openings below? Kind regards, Gheorghe IORDACHE gigi.iordache.business at gmail.com Linkedin: https://www.linkedin.com/in/gheorghe-iordache-phd-physics-mba/ ================================= ?Cleanroom Designers - Freelance or Perm - Multiple Openings ?.., I have a client located in Scandinavia who are looking for multiple Cleanroom Designers for a Battery manufacturing plant. This is to start immediately on a long-term contract as freelancer for a 6-month rolling mission or they have the option to join on a permanent basis if you prefer. They do need people with construction experience. Battery focus clean room which means extreme dryness. To be considered you must meet the following criteria: ? Fluent in English ? Willing to work 1 month remote on 1 month onsite (option to work full time on site if you prefer) ? Strong background in Cleanroom Designs from scratch Experienced with working with Battery, Pharmaceutical, Semi-conductor or Optics Manufacturing is a plus. ??? Hourly rate or Salary expectations depend on your experience If you are interested or know anyone that could be, please send an updated CV to jack.molloy at g2recruitment.com soon rather than later or drop me a message on LinkedIn. Best wishes, Jack Molloy IT Infrastructure and Engineering Specialist | Belgium +32 (0) 2 808 1290 jack.molloy at g2recruitment.com ? -- This email has been checked for viruses by Avast antivirus software. www.avast.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From j8lee at eng.ucsd.edu Fri Aug 25 17:26:50 2023 From: j8lee at eng.ucsd.edu (Jihwan Lee) Date: Fri, 25 Aug 2023 14:26:50 -0700 Subject: [labnetwork] Ovens for curing polyimide Message-ID: Dear network, Does anyone know of suitable alternatives other than systems provided by Yield Engineering Systems (YES) or Despatch Industries for Polyimide curing ovens? Any suggestions will be much appreciated. Regards, Jihwan Lee -------------- next part -------------- An HTML attachment was scrubbed... URL: From yb2471 at columbia.edu Mon Aug 28 20:21:47 2023 From: yb2471 at columbia.edu (Youry Borisenkov) Date: Mon, 28 Aug 2023 20:21:47 -0400 Subject: [labnetwork] Expertec furnace o-rings Message-ID: Hi, We need to replace one of the o-rings on our cvd furnace (it is the buffer o-ring that goes between the glass tube and the metal front clamp). The lead time is 12 weeks and we would like to try bring up the tool faster. Is there an o-ring supplier that you know of, that might have some non standard parts? Or will be willing to manufacture a custom part for us? Thank you, Youry Cni- Columbia University -------------- next part -------------- An HTML attachment was scrubbed... URL: From cveith at seas.upenn.edu Tue Aug 29 03:41:18 2023 From: cveith at seas.upenn.edu (Charles Veith) Date: Tue, 29 Aug 2023 03:41:18 -0400 Subject: [labnetwork] Expertec furnace o-rings In-Reply-To: References: Message-ID: Good Morning Youry: Here is a firm that I have used in the past. The cost is significantly lower and lead time were up to six week. Process Technologies, Inc Jim Paino 610-603-7525 painoj at ptipro.com orings On Mon, Aug 28, 2023 at 10:40?PM Youry Borisenkov wrote: > Hi, > We need to replace one of the o-rings on our cvd furnace (it is the buffer > o-ring that goes between the glass tube and the metal front clamp). The > lead time is 12 weeks and we would like to try bring up the tool faster. > Is there an o-ring supplier that you know of, that might have some non > standard parts? Or will be willing to manufacture a custom part for us? > > Thank you, > Youry > Cni- Columbia University > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!Rt2lJWmOYoar94whNqvy3nY4l9S8PSUqSIJQDDyYwsXhc06FGNmiRqm6bOqizoiCOz9BVKreawoI9xUfvtJQ8Q$ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mapril at draper.com Tue Aug 29 04:15:18 2023 From: mapril at draper.com (April, Mark R.) Date: Tue, 29 Aug 2023 08:15:18 +0000 Subject: [labnetwork] [EXTERNAL] Expertec furnace o-rings In-Reply-To: References: Message-ID: Good Morning Youry, I use this company to purchase my o-rings, they have good prices and turnaround Fred Pourmirzaie Managing Director [cid:image001.png at 01D9DA2F.68B5C000] www.flodynamix.com 111 Deerwood Rd. Suite 200 San Ramon, CA 94583 T: (925) 690-5107 F: (925) 735-2022 C: (925) 381 2286 Good Luck Mark R. April Senior Equipment Engineer Microfabrication Laboratory [color_logo_small4] 555 Technology Square Cambridge, MA 02139 mapril at draper.com O # 617-258-1613 C # 617-455-1596 www.draper.com From: labnetwork On Behalf Of Youry Borisenkov Sent: Monday, August 28, 2023 8:22 PM To: Fab Network Subject: [EXTERNAL] [labnetwork] Expertec furnace o-rings CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe. Hi, We need to replace one of the o-rings on our cvd furnace (it is the buffer o-ring that goes between the glass tube and the metal front clamp). The lead time is 12 weeks and we would like to try bring up the tool faster. Is there an o-ring supplier that you know of, that might have some non standard parts? Or will be willing to manufacture a custom part for us? Thank you, Youry Cni- Columbia University -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 7762 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 1560 bytes Desc: image002.png URL: From dc3719 at columbia.edu Tue Aug 29 14:46:43 2023 From: dc3719 at columbia.edu (Dhan Cardinal) Date: Tue, 29 Aug 2023 14:46:43 -0400 Subject: [labnetwork] CIC1200 Gen 2 Power Supply for Suss MA6 DUV Message-ID: Hi everyone, I was wondering if anyone has any experience getting the Gen 2 PSU to work with a DUV? Our sensors measure the intensity of both 240 nm and 405nm but we're not getting any read-out on the PSU touchscreen. Thank you, -- Dhan Cardinal Senior Staff Associate II / Cleanroom Engineer Columbia Nano Initiative (CNI) Columbia University CEPSR, Room 1001 530 W. 120th Street New York, NY 10027 *Columbia Nano Initiative * -------------- next part -------------- An HTML attachment was scrubbed... URL: From Howard.Northfield at uottawa.ca Tue Aug 29 15:24:04 2023 From: Howard.Northfield at uottawa.ca (Howard Northfield) Date: Tue, 29 Aug 2023 19:24:04 +0000 Subject: [labnetwork] [EXTERNAL] Expertec furnace o-rings In-Reply-To: References: Message-ID: I like: ACE Seal 23 Las Colinas Lane, Suite 112 San Jose, CA 95119 408-513-1070 I believe they make them, wide variety of materials. They have minimum order quantities but the prices are reasonable. Turn around time may not meet your immediate needs but is not very long. Howard Northfield Research Associate Advanced Research Complex (ARC) University of Ottawa ________________________________ From: labnetwork on behalf of April, Mark R. Sent: Tuesday, August 29, 2023 4:15 AM To: Youry Borisenkov ; Fab Network Subject: Re: [labnetwork] [EXTERNAL] Expertec furnace o-rings Attention : courriel externe | external email Good Morning Youry, I use this company to purchase my o-rings, they have good prices and turnaround Fred Pourmirzaie Managing Director [cid:image001.png at 01D9DA2F.68B5C000] www.flodynamix.com 111 Deerwood Rd. Suite 200 San Ramon, CA 94583 T: (925) 690-5107 F: (925) 735-2022 C: (925) 381 2286 Good Luck Mark R. April Senior Equipment Engineer Microfabrication Laboratory [color_logo_small4] 555 Technology Square Cambridge, MA 02139 mapril at draper.com O # 617-258-1613 C # 617-455-1596 www.draper.com From: labnetwork On Behalf Of Youry Borisenkov Sent: Monday, August 28, 2023 8:22 PM To: Fab Network Subject: [EXTERNAL] [labnetwork] Expertec furnace o-rings CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe. Hi, We need to replace one of the o-rings on our cvd furnace (it is the buffer o-ring that goes between the glass tube and the metal front clamp). The lead time is 12 weeks and we would like to try bring up the tool faster. Is there an o-ring supplier that you know of, that might have some non standard parts? Or will be willing to manufacture a custom part for us? Thank you, Youry Cni- Columbia University -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 7762 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.png Type: image/png Size: 1560 bytes Desc: image002.png URL: From wchoe at tystar.com Tue Aug 29 20:18:58 2023 From: wchoe at tystar.com (wchoe at tystar.com) Date: Tue, 29 Aug 2023 17:18:58 -0700 Subject: [labnetwork] Engineering Position at Tystar Corporation Message-ID: Tystar is growing fast! We are hoping to expand our engineering and field service departments with the help of one or more qualified candidates. A background in electrical engineering/electronics and/or experience with diffusion/LPCVD furnace systems is preferred. On-the-job training will be provided. Must love to travel-we have customers all over the world! If you or someone you know may be interested in working as a Tystar field service engineer, please email careers at tystar.com . Best Regards, Wayne Choe, Ph.D. CEO 7050 Lampson Ave., Garden Grove, CA 92841 Tel: 310-781-9219 Fax: 310-781-9438 www.tystar.com -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: application/octet-stream Size: 3034 bytes Desc: not available URL: From robert.macdonald at ge.com Thu Aug 31 12:50:10 2023 From: robert.macdonald at ge.com (Macdonald, Robert (GE Aerospace, US)) Date: Thu, 31 Aug 2023 16:50:10 +0000 Subject: [labnetwork] Argon vs Krypton for sputtering Message-ID: Hi all, I'm wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier. In practice I see Ar used for all materials. Any thoughts or opinions would be of interest. Thanks, Rob Robert MacDonald MEMS Engineer GE Research 1 Research Circle Niskayuna, NY 12309 518 312-5646 Robert.macdonald at ge.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From rmorrison at draper.com Thu Aug 31 14:21:59 2023 From: rmorrison at draper.com (Morrison, Richard H., Jr) Date: Thu, 31 Aug 2023 18:21:59 +0000 Subject: [labnetwork] [EXTERNAL] Argon vs Krypton for sputtering In-Reply-To: References: Message-ID: HI, At Draper we use Argon and Krypton. For sputtering on polymers we have found that Kr works better for the sputter clean and since it is larger atom it does not implant very far into the polymer and oxides. Rick From: labnetwork On Behalf Of Macdonald, Robert (GE Aerospace, US) Sent: Thursday, August 31, 2023 12:50 PM To: labnetwork at mtl.mit.edu Subject: [EXTERNAL] [labnetwork] Argon vs Krypton for sputtering CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe. Hi all, I'm wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier. In practice I see Ar used for all materials. Any thoughts or opinions would be of interest. Thanks, Rob Robert MacDonald MEMS Engineer GE Research 1 Research Circle Niskayuna, NY 12309 518 312-5646 Robert.macdonald at ge.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From bill_flounders at berkeley.edu Thu Aug 31 14:39:38 2023 From: bill_flounders at berkeley.edu (Albert William Flounders) Date: Thu, 31 Aug 2023 11:39:38 -0700 Subject: [labnetwork] Argon vs Krypton for sputtering In-Reply-To: References: Message-ID: Robert, Interesting question. I think it's driven by cost Ar is almost 1% in air while all other noble gases are in the ppm range (Kr ~1ppm) The ionization energy for Ar and Kr is similar (both much lower than Ne and He) so you get good ionization yield from Ar. I'm not sure that the sputter yield gain of Kr would be worth the significant additional cost. I'm curious what other replies you receive. Bill Flounders UC Berkeley On Thu, Aug 31, 2023 at 10:48?AM Macdonald, Robert (GE Aerospace, US) < robert.macdonald at ge.com> wrote: > Hi all, > > > > I?m wondering when folks use Krypton or other noble gasses for sputtering > in their facilities, and why. I have read that ideally, one matches the > atomic weight of the target with the gas. Thus, Neon for lighter targets, > Krypton for heavier. > > > > In practice I see Ar used for all materials. > > > > Any thoughts or opinions would be of interest. > > > > Thanks, > > > > Rob > > > > > > > > Robert MacDonald > > MEMS Engineer > > GE Research > > 1 Research Circle > > Niskayuna, NY 12309 > > 518 312-5646 > > Robert.macdonald at ge.com > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From lopezg at seas.upenn.edu Thu Aug 31 14:44:48 2023 From: lopezg at seas.upenn.edu (Gerald Lopez) Date: Thu, 31 Aug 2023 14:44:48 -0400 Subject: [labnetwork] LAST CALL for MAEBL In-Person Registration Message-ID: Dear Colleagues: Tomorrow, in-person registration ends at 6 pm ET. You and your colleagues are cordially invited to register for the 7th *Meeting for Advanced Electron Beam Lithography* (MAEBL) on *September 12-14, 2023 *at the *University of Chicago *(UChicago)* and online*. The hybrid event will stream the live talks through the GatherTown platform, but *attendees are strongly encouraged to attend in person*. - *Register: *https://maebl.eventbrite.com . - Full Registration is the same ($175) if you attend online or in person. - *NEW: *Student Registration ($87.50) has been created to encourage growth in student participation online or in person. - View the Program - MAEBL 2023 - Day 0 - Sept 12, 2023: Host tour and Operations Discussion - Day 1 - Sept 13, 2023: MAEBL Foundations Workshop - Day 2 - Sept 14, 2023: MAEBL Core Meeting - MAEBLx - shorter meetings and online only - North America: November 15, 2023 MAEBL 2023 is a highly anticipated 2.5-day event, featuring diverse activities to foster knowledge exchange and community engagement among electron beam lithographers. On day 0, attendees are invited to participate in a tour of the esteemed University of Chicago Pritzker Nanofabrication Facility and a lab operations discussion segment for those arriving early and attending in person. Day 1 will feature the MAEBL Foundations Workshop, designed specifically for electron beam lithography (EBL) beginners, including researchers and students. This workshop offers an excellent opportunity for participants to acquire or brush up on their knowledge of EBL fundamentals, such as machine-agnostic tool operation, data preparation, and process development. By the end of the Foundations Workshop, participants will have developed a sound understanding of EBL and be encouraged to participate in the MAEBL Core Workshop. The final component of the event is the MAEBL Core Meeting, which serves as a platform for the community to engage in meaningful conversations and learn from one another. The meeting aims to connect active novices with experienced EBL tool owners and users in an open forum to exchange practical and directly applicable EBL knowledge. Attendees are encouraged to network with an opportunity to present their most challenging patterns or processing issues for collaborative expert advice from the community. The event features invited talks from users in the field, adding to the richness of the conversation. Register at https://maebl.eventbrite.com and feel free to invite others that might be interested. * Registration is only $175* ($87.50/students) for the full meeting at UChicago and bonus meetings (MAEBLx) access, whether attending online or in person. All attendees will receive a commemorative MAEBL 2023 t-shirt. We look forward to seeing you soon, and please don't hesitate to contact me with any questions or concerns. Sincerely, Gerald G. Lopez, Ph.D. (he/him/his) Co-Founder and Board Chair, MAEBL Register: maebl.eventbrite.com www.maebl.org | Follow us on LinkedIn Gerald G. Lopez, Ph.D. (he/him/his) Director of Operations and Business Development & Center Associate Director University of Pennsylvania | Singh Center for Nanotechnology NNCI Mid-Atlantic Nanotechnology Hub (MANTH) ? nnci.net 3205 Walnut Street, Philadelphia, PA 19104 USA Deliveries: 3231 Walnut Street, LRSM Building, Philadelphia, PA 19104 nano.upenn.edu ? lopezg at seas.upenn.edu ? +1-215-573-4041 ? linkedin.com/in/geraldglopez/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From yb2471 at columbia.edu Thu Aug 31 20:44:07 2023 From: yb2471 at columbia.edu (Youry Borisenkov) Date: Thu, 31 Aug 2023 17:44:07 -0700 Subject: [labnetwork] Expertec furnace o-rings In-Reply-To: References: Message-ID: Hi all, Thank you for your help We were able to solve this issue quickly, thanks to this *amazing community!* here is a list of the O-Ring suppliers you recommended: Company contact person phone number email Process Technologies, Inc Jim Paino (610) 603-7525 painoj at ptipro.com Flodynamix Fred Pourmirzaie (925) 690-5107 Flodynamix at Flodynamix.com Parker (800) 272-7537 cparker at support.parker.com Sealing Devices (716) 684-7600 seals at sealingdevices.com Potter Associates (585) 288-2850 info at potterassoc.com Web Seal (800 )366-1320 sales at websealinc.com Gasket Packing & Seal Supply Company Inc (505) 343-1411 kevin at gpssupplyco.com ACE Seal (408) 513-1070 https://www.aceseal.com/contact On Mon, Aug 28, 2023 at 5:21?PM Youry Borisenkov wrote: > Hi, > We need to replace one of the o-rings on our cvd furnace (it is the buffer > o-ring that goes between the glass tube and the metal front clamp). The > lead time is 12 weeks and we would like to try bring up the tool faster. > Is there an o-ring supplier that you know of, that might have some non > standard parts? Or will be willing to manufacture a custom part for us? > > Thank you, > Youry > Cni- Columbia University > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Thu Aug 31 19:08:17 2023 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Thu, 31 Aug 2023 19:08:17 -0400 Subject: [labnetwork] Argon vs Krypton for sputtering In-Reply-To: References: Message-ID: <4CDF0D2C-FEE1-49EE-BFDC-5FAD1CD595EA@andrew.cmu.edu> HI Rob, This paper may help. We did heaps of sputtering measurements for spacecraft materials at CSU?usually with Xenon?. But occasionally with Argon and Krypton. Enjoy... https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf? IEPC-2005-293 PDF Document ? 544 KB Best, Mark Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu ...Success consists of getting up just one more time than you fall? OG > On Aug 31, 2023, at 12:50 PM, Macdonald, Robert (GE Aerospace, US) wrote: > > Hi all, > > I?m wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier. > > In practice I see Ar used for all materials. > > Any thoughts or opinions would be of interest. > > Thanks, > > Rob > > > > Robert MacDonald > MEMS Engineer > GE Research > 1 Research Circle > Niskayuna, NY 12309 > 518 312-5646 > Robert.macdonald at ge.com > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: preview.png Type: image/png Size: 31270 bytes Desc: not available URL: From mmoneck at andrew.cmu.edu Thu Aug 31 21:32:10 2023 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Thu, 31 Aug 2023 21:32:10 -0400 Subject: [labnetwork] Argon vs Krypton for sputtering In-Reply-To: References: Message-ID: Hi Rob, The main factor in most cases is cost. Argon is heavy enough to provide good sputter yield in most cases, and cheap enough that it typically wins in terms of economics and efficiency. That said, there are use cases for the other gases. We used to run projects developing magnetic media for hard disk applications. There have been studies done looking at the effects of neon, krypton, argon, and even xenon on the film growth and the resulting grain structure, and there can be differences, especially if you are doing bias sputtering. On the flip side, similar studies have been done for ion beam etching, where there are advantages of using krypton or neon over argon. For example, you can change the etching profile and in some cases minimize the faceting effects. Best Regards, Matt On Thu, Aug 31, 2023 at 1:49?PM Macdonald, Robert (GE Aerospace, US) < robert.macdonald at ge.com> wrote: > Hi all, > > > > I?m wondering when folks use Krypton or other noble gasses for sputtering > in their facilities, and why. I have read that ideally, one matches the > atomic weight of the target with the gas. Thus, Neon for lighter targets, > Krypton for heavier. > > > > In practice I see Ar used for all materials. > > > > Any thoughts or opinions would be of interest. > > > > Thanks, > > > > Rob > > > > > > > > Robert MacDonald > > MEMS Engineer > > GE Research > > 1 Research Circle > > Niskayuna, NY 12309 > > 518 312-5646 > > Robert.macdonald at ge.com > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- -- Matthew T. Moneck, Ph.D Executive Director, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From demis at ucsb.edu Thu Aug 31 21:49:09 2023 From: demis at ucsb.edu (Demis D. John) Date: Thu, 31 Aug 2023 18:49:09 -0700 Subject: [labnetwork] Argon vs Krypton for sputtering In-Reply-To: <4CDF0D2C-FEE1-49EE-BFDC-5FAD1CD595EA@andrew.cmu.edu> References: <4CDF0D2C-FEE1-49EE-BFDC-5FAD1CD595EA@andrew.cmu.edu> Message-ID: We use Ar for our 2-inch magnetron sputter recipes, and Xe for our ion beam sputter system - which gets us higher dep rate. The ion Beam ignites and grid cleans with cheaper Ar, but recipes switch to Xe for dep steps only. ? Demis On Thu, Aug 31, 2023 at 17:04 Mark Weiler wrote: > HI Rob, > > This paper may help. We did heaps of sputtering measurements for > spacecraft materials at CSU?usually with Xenon?. But occasionally with > Argon and Krypton. Enjoy... > > > [image: preview.png] > > IEPC-2005-293 > > PDF Document ? 544 KB > > > > > Best, > > Mark > > Mark Weiler > Manager, Equipment & Facilities > Bertucci Nanotechnology Laboratory > Eden Hall Nanofabrication Cleanroom > Carnegie Mellon University > P: 412-268-2471 > F: 412-268-3497 > http://www.nanofab.ece.cmu.edu > > ...Success consists of getting up just one more time than you fall? OG > > > > > > > > > On Aug 31, 2023, at 12:50 PM, Macdonald, Robert (GE Aerospace, US) < > robert.macdonald at ge.com> wrote: > > Hi all, > > I?m wondering when folks use Krypton or other noble gasses for sputtering > in their facilities, and why. I have read that ideally, one matches the > atomic weight of the target with the gas. Thus, Neon for lighter targets, > Krypton for heavier. > > In practice I see Ar used for all materials. > > Any thoughts or opinions would be of interest. > > Thanks, > > Rob > > > > Robert MacDonald > MEMS Engineer > GE Research > 1 Research Circle > > Niskayuna, NY 12309 > > 518 312-5646 > Robert.macdonald at ge.com > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: preview.png Type: image/png Size: 31270 bytes Desc: not available URL: