[labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

[Jason Rohr]

Dear Tucson,

Will it sit nicely in the MagKeeper gun without sliding off? As far as I
understand, if the target slides to the side then you'll get a short
between the cathode and anode through the Ti target, resulting in your
plasma extinguishing. If it doesn't slide, then it probably works; however,
I would get a new target for long-term use.

I would be curious about the outcome.

Jason Röhr
UPenn QNF

On Tue, Aug 15, 2023 at 3:42 PM Richelson, Tucson <tucsonr at illinois.edu>
wrote:

> Hello all,
>
>
>
> I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers.
> I have a student that would like to sputter Ti. I have a Ti target, but it
> doesn’t have a backing. All of my other targets have backings. It seems
> logical that if I want to use a target on a gun with a MagKeeper I would
> need a backing (pictured is my Al target with a backing).
>
>
>
> I asked our Lesker sales rep and his response was to use the Ti target
> without the backing. I asked if the target will slide off of the gun. His
> response was no.
>
>
>
> Does this make sense? Does anyone have experience with sputtering Ti in a
> Lesker tool?
>
>
>
>
>
>
>
>
>
> *Best,*
>
> *Tucson Richelson*
>
> -------------------------------------------------------------------------
>
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