[labnetwork] Recommendations for a new CMP

[Rowe, William J]

Good Morning,

At Purdue University, Birck Nanotechnology Center, we are looking to purchase a new CMP. Does anyone have any recommendations for a new CMP? We are looking for reliability, ease of use and quality results on the wafers.  Would like one with 200mm wafer capability. Thanks in advance for your inputs and suggestions.

Best Regards,

Bill

Bill Rowe
Research Engineer
Purdue University
Birck Nanotechnology Center
1205 W. State Street
West Lafayette, Indiana 47907
Office: (765)496-8389
Cell: (765)427-3587
wrowe at purdue.edu<mailto:wrowe at purdue.edu>

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