[labnetwork] Pulsed DC sputtering process

[Youry Borisenkov]

Hi All,
Here at Columbia University we have an AJA sputtering tool that, in
addition to RF sources, is also equipped with a pulsed DC power supply
(TruPlasma DC 4002 DC Generator).
After 5 years we finally have a student that wants to use this option.
I'm looking to have a short discussion with someone who has an established
pulsed DC sputtering process on their tool. To get an idea for
starting point parameters.

Thank you and have a beautiful day,
Youry
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20230822/a5f34ba2/attachment.html>