From pradnya.chabbi at gmail.com Sat Dec 2 02:08:13 2023 From: pradnya.chabbi at gmail.com (Pradnya Chabbi) Date: Sat, 2 Dec 2023 12:38:13 +0530 Subject: [labnetwork] Wafer alignment and bonding Message-ID: Looking for a wafer bonder service to align and bond a 4-inch SOI wafer with a 4-inch glass wafer. Any leads are appreciated. -- Thanks in Advance Pradnya ------------------------------------------- Research Scholar Birla Institute of Technology, Pilani, Rajasthan, India -------------- next part -------------- An HTML attachment was scrubbed... URL: From daniel.woodie at cornell.edu Sat Dec 2 11:25:17 2023 From: daniel.woodie at cornell.edu (Dan P. Woodie) Date: Sat, 2 Dec 2023 16:25:17 +0000 Subject: [labnetwork] Job Posting - Safety Manager / Facilities Engineer, College of Engineering, Cornell University Message-ID: Fellow Cleanroom Enthusiasts, After 24 years here at Cornell, I am leaving in January to be the Director of the Micro/Nano Fabrication Center at the Princeton Materials Institute. I wanted to reach out to this community to let them know of a job opportunity here at Cornell involving the intersection of safety and facilities engineering for advanced research spaces, including the Cornell NanoScale Facility. The position is a combination of safety and facilities engineering for the 14 advanced research buildings managed by the College of Engineering. We are seeking individuals with technical experience in advanced research spaces, hazardous gases / chemicals, and Toxic Gas Monitoring Systems (TGMS). The position has been very challenging and rewarding the past 12 years, working with the world-class faculty on advanced labs in every engineering discipline, as well as the award-winning Engineering Project Teams (https://www.engineering.cornell.edu/students/undergraduate-students/special-programs/project-teams). This is a time for high growth of the College, with many renovations and new facilities being constructed that you can help design. Cornell has many great benefits, including a tuition benefit for children (not just at Cornell!), and Ithaca is a beautiful place to live in the idyllic Finger Lakes region of Central NY. If you have any questions about the job or Cornell, I am happy to chat. I am also looking forward to engaging more with this group in my new position. Thank you. Job Posting https://cornell.wd1.myworkdayjobs.com/en-US/CornellCareerPage/job/Ithaca-Main-Campus/Engineering-Saftey-Manager---Cornell-Engineering_WDR-00041354-1 Dan Daniel Woodie Safety Manager / Facilities Engineer College of Engineering Cornell University 202 Ward Center Ithaca, NY 14853 (607)254-4891 (607)227-2993 - cell LinkedIn: https://www.linkedin.com/in/danielpwoodie For facilities info or to submit a help request visit the COE Facilities Portal: https://facilities.coecis.cornell.edu Or email your request to: faccoecis-help at cornell.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From trieu.nguyen at mail.wvu.edu Sat Dec 2 19:05:54 2023 From: trieu.nguyen at mail.wvu.edu (Trieu Nguyen) Date: Sun, 3 Dec 2023 00:05:54 +0000 Subject: [labnetwork] Wafer alignment and bonding In-Reply-To: References: Message-ID: Hi Pradrya, You can contact me directly for me more info and discussion. Best wishes, Trieu From: labnetwork On Behalf Of Pradnya Chabbi Sent: Saturday, December 2, 2023 2:08 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Wafer alignment and bonding Looking for a wafer bonder service to align and bond a 4-inch SOI wafer with a 4-inch glass wafer. Any leads are appreciated. -- Thanks in Advance Pradnya ------------------------------------------- Research Scholar Birla Institute of Technology, Pilani, Rajasthan, India -------------- next part -------------- An HTML attachment was scrubbed... URL: From guilhem.ribeill at rtx.com Sun Dec 3 09:31:45 2023 From: guilhem.ribeill at rtx.com (Ribeill, Guilhem J RTX) Date: Sun, 3 Dec 2023 14:31:45 +0000 Subject: [labnetwork] Disco DAD service Message-ID: Hello all, Our team is looking for a vendor to help with the refurbishment of a Disco DAD-2H/6 saw. Does anyone have a recommendation for someone they've worked with on a similar project? Thanks in advance! Best, Guilhem --------------- Guilhem Ribeill, PhD Quantum Engineering and Computing Raytheon BBN Office: (617) 873-3208 Cell: (919) 413-8072 -------------- next part -------------- An HTML attachment was scrubbed... URL: From furao at ucsd.edu Sun Dec 3 13:43:27 2023 From: furao at ucsd.edu (Fubo Rao) Date: Sun, 3 Dec 2023 10:43:27 -0800 Subject: [labnetwork] Job Posting - Lead Microfabrication Process Engineer @UCSD Message-ID: Dear Colleagues, The Nano3 Research Facility at UC San Diego has an immediate position opening for an experienced Micro- /Nano- fabrication expert to be our Lead Process Engineer. The Nano- science, engineering and medicine Research Facility (Nano3) is a user facility consisting 7000+ square feet of cleanrooms equipped with many advanced tools such as EBPG5200, 100 kV Electron Beam Lithography, Heidelberg NanoFrazor Explore, the first thermal scanning probe lithography system, Finetech Fineplacer sigma, a sub-micron flip-chip bonder. Nano3 also has 3000+ square feet of analytical and design labs with various advanced tools, including FIB, HR-TEM, advanced AFM, Microfluidics lab. Nano3 is a proud member of the *National Nanotechnology Coordinated Infrastructure* (NNCI). Besides its premier location, UCSD offers many good benefits, including 13 paid holidays, *Pension retirement plan*, tuition benefits, and many others... Job Posting https://employment.ucsd.edu/lead-microfabrication-process-engineer-126860/job/27365672 Thanks, Fubo Rao, Ph.D., Technical Director, Nano3 Research Facility Qualcomm Institute/Atkinson Hall, UC San Diego 9500 Gilman Drive #0436 La Jolla, CA 92093-0436 E-mail: furao at ucsd.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From rrenzas at unr.edu Mon Dec 4 01:51:50 2023 From: rrenzas at unr.edu (Russell Renzas) Date: Mon, 4 Dec 2023 06:51:50 +0000 Subject: [labnetwork] Toxic gas delivery for small fabs? Message-ID: Hi, I'm Russ, some of you know me from Oxford Instruments - I just left to direct a new 3k sqft academic fab at University of Nevada Reno. How do the smaller university fabs handle toxic gas delivery? e.g. Cl2, BCl3, H2... Any recommendations for systems/vendors? And do you generally keep cylinders for that in an external bunker-type place, or nearer point of use (in a service chase)? SF6 and the like don't need anything special, correct? Also is it now typical to abate fluorinated etch gases which I thought requires expensive burn boxes, or do the dry bed systems suffice? Bit embarrassed that I don't know this stuff better, but I never had to think about it before. Happy holidays, Russ Russ Renzas University of Nevada, Reno Google Scholar, LinkedIn ? My position at UNR starts in mid-January 2024. ? -------------- next part -------------- An HTML attachment was scrubbed... URL: From deonc69 at illinois.edu Mon Dec 4 09:27:54 2023 From: deonc69 at illinois.edu (Collins, Deon) Date: Mon, 4 Dec 2023 14:27:54 +0000 Subject: [labnetwork] Toxic gas delivery for small fabs? In-Reply-To: References: Message-ID: The first things you want to find out are the local, state, and federal code on these materials. Being a new fabrication, you will most likely have to abide by the most up to date codes and their revisions. As Holonyak Lab was design and built in the late 80's the way I manage HPM's may be very different from your requirements. We have 2 toxic gas vaults with gas cabinets for delivery We use Ps-7's(electrochromic sensors) and CL-96(Hydride tape) for gas monitoring. In our case H2 is delivered from a tube trailer. Every and all piping is coaxial as well as orbital welded up until it is distributed in the chase to our clean rooms. From there we rely in VCR connections and H2 monitoring for leaks 24/7. Our current CL2, BCL3 delivery system is being replaced by new cabinets from CSI. We had elected to install these cabinets in our toxic gas vaults but may need to pivot due to the length of the delivery path. As far as abatement, HMNTL used to run outdated and unreliable CDO's. We are pivoting to a water scrubber just for the etching tools. This what has been recommended for our etch tools but depending on the material you are processing you may need another type of abatement device. I might add we run our exhaust through a second large scrubber as that is the exhaust source for toxic sources. Again, I would suggest researching your specific codes before jumping to conclusions. Semi Standards is good place to start. Deon D. Collins FACILITY MANAGER The Grainger College Of Engineering UIUC Holonyak Micro & Nanotechnology Lab 208 N Wright St Rm. 1114 | MC-249 Urbana, IL 61801 217-300-7531 | deonc69 at illinois.edu [cid:image001.png at 01DA268B.C6B87D20] Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure. Life is not about watching other people live it. It's about you living your own! From: labnetwork On Behalf Of Russell Renzas Sent: Monday, December 4, 2023 12:52 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Toxic gas delivery for small fabs? Hi, I'm Russ, some of you know me from Oxford Instruments - I just left to direct a new 3k sqft academic fab at University of Nevada Reno. How do the smaller university fabs handle toxic gas delivery? e.g. Cl2, BCl3, H2... Any recommendations for systems/vendors? And do you generally keep cylinders for that in an external bunker-type place, or nearer point of use (in a service chase)? SF6 and the like don't need anything special, correct? Also is it now typical to abate fluorinated etch gases which I thought requires expensive burn boxes, or do the dry bed systems suffice? Bit embarrassed that I don't know this stuff better, but I never had to think about it before. Happy holidays, Russ Russ Renzas University of Nevada, Reno Google Scholar, LinkedIn - My position at UNR starts in mid-January 2024. - -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 2602 bytes Desc: image001.png URL: From kckeenan at seas.upenn.edu Mon Dec 4 09:41:47 2023 From: kckeenan at seas.upenn.edu (Kyle Keenan) Date: Mon, 4 Dec 2023 09:41:47 -0500 Subject: [labnetwork] Toxic gas delivery for small fabs? In-Reply-To: References: Message-ID: I'd recommend Applied Energy Systems gas cabinets and VMB's. On Mon, Dec 4, 2023 at 8:11?AM Russell Renzas wrote: > Hi, I'm Russ, some of you know me from Oxford Instruments - I just left to > direct a new 3k sqft academic fab at University of Nevada Reno. > > How do the smaller university fabs handle toxic gas delivery? e.g. Cl2, > BCl3, H2... Any recommendations for systems/vendors? And do you generally > keep cylinders for that in an external bunker-type place, or nearer point > of use (in a service chase)? SF6 and the like don't need anything special, > correct? > > Also is it now typical to abate fluorinated etch gases which I thought > requires expensive burn boxes, or do the dry bed systems suffice? > > Bit embarrassed that I don't know this stuff better, but I never had to > think about it before. > > Happy holidays, > > Russ > > Russ Renzas > University of Nevada, Reno > Google Scholar > , > LinkedIn > > > ? My position at UNR starts in mid-January 2024. ? > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!X3BsOnYi-zers1pYSfUp6Rov5zE-QwMgZ3Qfubsf7liWUqN_f4LT70eD-KfU52YzHL5SRYc56kvJZgNWpd-Z$ > -- Kyle Keenan Senior Manager - Laboratory Operations Quattrone Nanofabrication Facility University of Pennsylvania P: 215-898-7560 F: 215-573-4925 -------------- next part -------------- An HTML attachment was scrubbed... URL: From dcakiroglu at alumni.sabanciuniv.edu Mon Dec 4 12:47:04 2023 From: dcakiroglu at alumni.sabanciuniv.edu (Dilek Cakiroglu (Alumni)) Date: Mon, 4 Dec 2023 19:47:04 +0200 Subject: [labnetwork] Passivation of ALD chamber and pocket Si wafer Message-ID: Hi, I am dealing with contamination of the ALD chamber and also pocket Si wafer. What is the best way to passivate the ALD chamber and also the Si pocket wafer which has high levels of Na and K contamination? Also, does anyone have any experience of the barrier properties of common ALD dielectrics like Al2O3, SiO2, and HfO2 for e.g. Na, Cu, Sn, Zn, Fe, K? Thank you, Dilek -------------- next part -------------- An HTML attachment was scrubbed... URL: From fabien.dauzou at edgehogtech.com Mon Dec 4 14:26:51 2023 From: fabien.dauzou at edgehogtech.com (Fabien Dauzou) Date: Mon, 4 Dec 2023 19:26:51 +0000 Subject: [labnetwork] Size GEN 2 ALD transfer recipe roadblock In-Reply-To: References: Message-ID: Hello labnetwork, We have an ALD chamber of approximately 0.2 m3 (0.6 x 0.6 x 0.6 m) and we have been transferring recipe from a much smaller chamber. However, it is challenging to get a good sequential infiltration synthesis (SIS). What have been the main roadblock when scaling up ALD chamber size to replicate recipe? Gas flow, pulse duration, pumping time, temperature? Best regards, Bien cordialement, Fabien Dauzou, Dipl. Ing. Manager Processes at Edgehog Photovoltaic Enthusiast | Cleantech Optimist fabien.dauzou at edgehogtech.com |Mob: 438-868-1657 | https://www.edgehogtech.com/ https://www.linkedin.com/company/edgehog/ 355 Peel St., Suite 303, Montreal, QC, Canada, H3C 2G9[SF_TAG_MEMBER_OF_CMYK] [cid:image006.png at 01DA26BC.38CE9220] Think green, before printing this email. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image004.jpg Type: image/jpeg Size: 20360 bytes Desc: image004.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image006.png Type: image/png Size: 1825583 bytes Desc: image006.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 10328 bytes Desc: image002.jpg URL: From michael.call at maine.edu Mon Dec 4 14:28:33 2023 From: michael.call at maine.edu (Michael Call) Date: Mon, 4 Dec 2023 14:28:33 -0500 Subject: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller Message-ID: We have recently had a failure of the VAT valve PM-7 controller on our STS DRIE. I've tried contacting SPTS, VAT and distributors for help. The CM gauge read back always reads 100mTorr(maximum) at the controller. I've measured and verified that the correct voltage to and from the CM gauge is correct. So, I have verified that the problem is the VAT PM-7 control box. Has anyone on the list had a similar issue with the controller? And is there someone still supporting the STS multiplex DRIE? Thank you -- Mike Call CORE Facilities Manager University of Maine Coordinated Operating Research Entities Cleanroom/TASC ESRB Barrows Hall Room 294 207-581-3382 [image: image.png] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: From codreanu at udel.edu Mon Dec 4 15:02:47 2023 From: codreanu at udel.edu (Iulian Codreanu) Date: Mon, 4 Dec 2023 15:02:47 -0500 Subject: [labnetwork] Toxic gas delivery for small fabs? In-Reply-To: References: Message-ID: Welcome Russ! As some of our colleagues have/will mentioned/mention, it is best to work with your local folks such as EHS, fire marshal, and city code enforcers. At times you may have to educate them on certain topics. Gathering input from other places across the country as you are doing should be very helpful in your conversations. At Delaware I have gas room for corrosives (placed in gas cabinets) and an inerts "farm". I also have a bunker that houses pyrophorics and flammables (also placed in gas cabinets). The BCl3 cabinet is located in the chase close to the tools that need it (there are very clever folks on this mailing list who know how to flow things like BCl3 across hundreds of feet). All corrosives, flammables, and toxics are transported to the tools via coaxial lines. I also have a toxic gas monitoring system with various levels of integration with the tools, the fire alarm system, and the the building management system. The gas equipment provided by Applied Energy Systems seems to be very popular with the university cleanrooms and with good reason; I've been happy with their products for the past 16 years. Abatement of fluorinated gases seems to also be a local code item and I do not have to abate them here. Good luck! Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https://udnf.udel.edu On 12/4/2023 1:51 AM, Russell Renzas wrote: > Hi, I'm Russ, some of you know me from Oxford Instruments - I just > left to direct a new 3k sqft academic fab at University of Nevada Reno. > > How do the smaller university fabs handle toxic gas delivery? e.g. > Cl2, BCl3, H2... Any recommendations for systems/vendors? And do you > generally keep cylinders for that in an external bunker-type place, or > nearer point of use (in a service chase)? ?SF6 and the like don't need > anything special, correct? > > Also is it now typical to abate fluorinated etch gases which I thought > requires expensive burn boxes, or do the dry bed systems suffice? > > Bit embarrassed that I don't know this stuff better, but I never had > to think about it before. > > Happy holidays, > > Russ > > Russ Renzas > University of Nevada, Reno > Google Scholar > , > LinkedIn > > ? My position at UNR starts in mid-January 2024. ? > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.martin at louisville.edu Mon Dec 4 16:13:02 2023 From: michael.martin at louisville.edu (Martin, Michael) Date: Mon, 4 Dec 2023 21:13:02 +0000 Subject: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller In-Reply-To: References: Message-ID: Hi Mike, We have a spare STS with a PM-7 we can part out if you are interested. Just PM me if you want further info. Regards, Michael ________________________________ From: labnetwork on behalf of Michael Call Sent: Monday, December 4, 2023 2:28 PM To: Lab Network (labnetwork at mtl.mit.edu) Subject: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe. We have recently had a failure of the VAT valve PM-7 controller on our STS DRIE. I've tried contacting SPTS, VAT and distributors for help. The CM gauge read back always reads 100mTorr(maximum) at the controller. I've measured and verified that the correct voltage to and from the CM gauge is correct. So, I have verified that the problem is the VAT PM-7 control box. Has anyone on the list had a similar issue with the controller? And is there someone still supporting the STS multiplex DRIE? Thank you -- Mike Call CORE Facilities Manager University of Maine Coordinated Operating Research Entities Cleanroom/TASC ESRB Barrows Hall Room 294 207-581-3382 [https://ci3.googleusercontent.com/mail-sig/AIorK4zSLdJ1j6oJvWxnjJq9B-cnc8zTM6HSHyLqdX5rg3c7diC0sz-_-2H5t3FOKOobCH-tGU5_-6w] [image.png] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: image.png URL: From bgila at ufl.edu Mon Dec 4 16:13:36 2023 From: bgila at ufl.edu (Gila,Brent P) Date: Mon, 4 Dec 2023 16:13:36 -0500 Subject: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller In-Reply-To: References: Message-ID: <050b0d3f-fcc5-4ca1-adf2-7b933d73a700@ufl.edu> Hello Mike, We had that issue several years ago and replace the PM-7 controller.? This was at a time when VAT was still supporting that unit (2014).? You may need to reach out to a 3rd party like ClassOne to see if they have a PM-7 controller or are able to repair one. Best Regards, Brent -- Brent P. Gila, PhD. Associate Director, Research Service Centers University of Florida 1041 Center Drive Gainesville, Florida 32611 Tel:352-273-2245,? Fax:352-846-2877 email: bgila at ufl.edu On 12/4/2023 2:28 PM, Michael Call wrote: > *[External Email]* > > We have recently had a failure of the VAT valve PM-7 controller on our > STS DRIE.? I've tried contacting SPTS, VAT and distributors for help.? > The CM gauge read back always reads 100mTorr(maximum) at the > controller.? I've measured and verified that the correct voltage > to?and from the CM gauge is correct.? So, I have verified that the > problem is the VAT PM-7 control box.? Has anyone on? the list had a > similar issue with the controller?? And is there someone still > supporting the STS multiplex DRIE? > > Thank you > > -- > Mike Call > CORE Facilities Manager > University of Maine > Coordinated Operating Research Entities Cleanroom/TASC > ESRB Barrows Hall Room 294 > 207-581-3382 > > image.png > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: From hathaway at cns.fas.harvard.edu Mon Dec 4 16:29:02 2023 From: hathaway at cns.fas.harvard.edu (Hathaway, Malcolm R) Date: Mon, 4 Dec 2023 21:29:02 +0000 Subject: [labnetwork] Size GEN 2 ALD transfer recipe roadblock In-Reply-To: References: Message-ID: Hi Fabien, So, a thing to remember is that ALD in its pure form is putting monolayers of reactant on a surface. The monolayer formed is somewhat independent of vapor pressure, flow and other "cvd" variables, and often only mildly dependent on temperature, depending what the reactants are. In sequential infiltration synthesis, you are depending on the diffusion of precursor into a substrate to change the substrate somehow. As soon as you say "diffusion", now you have a process very much influenced by "cvd" variables such as partial pressure, total pressure, temperature, exposed area, flow variations, etc. Thus, upscaling an ALD process for SIS purposes is a rather more complicated kettle of fish compared to upscaling a "typical" ALD process. I assume you are using a bigger chamber to put more substrates in? Or perhaps a larger individual substrate? What do you reckon is the % change in substrate surface area and "infiltration volume" between old and new chamber? What is the chemistry that you are using? We can discuss this more off-line, if folks feel it is too much into the weeds for a general labnetwork discussion... Mac Hathaway ALD Process Engineer Harvard CNS ________________________________ From: labnetwork on behalf of Fabien Dauzou Sent: Monday, December 4, 2023 2:26 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Size GEN 2 ALD transfer recipe roadblock Hello labnetwork, We have an ALD chamber of approximately 0.2 m3 (0.6 x 0.6 x 0.6 m) and we have been transferring recipe from a much smaller chamber. However, it is challenging to get a good sequential infiltration synthesis (SIS). What have been the main roadblock when scaling up ALD chamber size to replicate recipe? Gas flow, pulse duration, pumping time, temperature? Best regards, Bien cordialement, Fabien Dauzou, Dipl. Ing. Manager Processes at Edgehog Photovoltaic Enthusiast | Cleantech Optimist fabien.dauzou at edgehogtech.com |Mob: 438-868-1657 | https://www.edgehogtech.com/ https://www.linkedin.com/company/edgehog/ 355 Peel St., Suite 303, Montreal, QC, Canada, H3C 2G9[SF_TAG_MEMBER_OF_CMYK] [cid:image006.png at 01DA26BC.38CE9220] Think green, before printing this email. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image006.png Type: image/png Size: 1825583 bytes Desc: image006.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 10328 bytes Desc: image002.jpg URL: From jimm at science.xyz Mon Dec 4 19:05:48 2023 From: jimm at science.xyz (Jim Mitchell) Date: Mon, 4 Dec 2023 19:05:48 -0500 Subject: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller In-Reply-To: References: Message-ID: I have had a similar problem with a VAT controller. There is a battery backed memory chip in the unit that needs to be replaced every couple of years. Once replaced you can recalibrate as per the manual. Jim On Mon, Dec 4, 2023, 3:42 PM Michael Call wrote: > We have recently had a failure of the VAT valve PM-7 controller on our STS > DRIE. I've tried contacting SPTS, VAT and distributors for help. The CM > gauge read back always reads 100mTorr(maximum) at the controller. I've > measured and verified that the correct voltage to and from the CM gauge is > correct. So, I have verified that the problem is the VAT PM-7 control > box. Has anyone on the list had a similar issue with the controller? And > is there someone still supporting the STS multiplex DRIE? > > Thank you > > -- > Mike Call > CORE Facilities Manager > University of Maine > Coordinated Operating Research Entities Cleanroom/TASC > ESRB Barrows Hall Room 294 > 207-581-3382 > > [image: image.png] > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: From rosendo.bindoy at kaust.edu.sa Mon Dec 4 23:46:36 2023 From: rosendo.bindoy at kaust.edu.sa (Rosendo Bindoy) Date: Tue, 5 Dec 2023 04:46:36 +0000 Subject: [labnetwork] [EXTERNAL] Re: STS(SPTS) Multiplex DRIE VAT valve controller In-Reply-To: References: Message-ID: Hello Michael, I agree with Jim. There is an SRAM on that unit that once battery is out everything in that memory will be wiped out. You need to replace battery periodically as per the manual. https://www.lesker.com/newweb/valves/vat/files/283507.pdf?ls=1 Regards, Rosendo Rosendo Bindoy (he/his/him) Equipment Specialist KAUST Nanofabrication Core Lab ________________________________ From: labnetwork on behalf of Jim Mitchell Sent: Tuesday, December 5, 2023 3:42 AM To: Michael Call Cc: Lab Network (labnetwork at mtl.mit.edu) Subject: [EXTERNAL] Re: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller I have had a similar problem with a VAT controller. There is a battery backed memory chip in the unit that needs to be replaced every couple of years. Once replaced you can recalibrate as per the manual. Jim On Mon, Dec 4, 2023, 3:42 PM Michael Call > wrote: We have recently had a failure of the VAT valve PM-7 controller on our STS DRIE. I've tried contacting SPTS, VAT and distributors for help. The CM gauge read back always reads 100mTorr(maximum) at the controller. I've measured and verified that the correct voltage to and from the CM gauge is correct. So, I have verified that the problem is the VAT PM-7 control box. Has anyone on the list had a similar issue with the controller? And is there someone still supporting the STS multiplex DRIE? Thank you -- Mike Call CORE Facilities Manager University of Maine Coordinated Operating Research Entities Cleanroom/TASC ESRB Barrows Hall Room 294 207-581-3382 [https://ci3.googleusercontent.com/mail-sig/AIorK4zSLdJ1j6oJvWxnjJq9B-cnc8zTM6HSHyLqdX5rg3c7diC0sz-_-2H5t3FOKOobCH-tGU5_-6w] [image.png] _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: image.png URL: From brian.wajdyk at uky.edu Tue Dec 5 11:35:20 2023 From: brian.wajdyk at uky.edu (Wajdyk, Brian L.) Date: Tue, 5 Dec 2023 16:35:20 +0000 Subject: [labnetwork] Dektak 6m profilometer Message-ID: Hello, We are having an issue with our Dektak (Veeco) 6M. Does anyone here know anyone with expertise working on these units? It's showing abrupt steps on a patternless wafer. Thanks, Brian ********************************************* Brian Wajdyk Facility Manager / Research Center for Nanoscale Science and Engineering. University of Kentucky Office: ASTeCC 372 Email: Brian.Wajdyk at uky.edu Ph: 859-218-6548 ********************************************* -------------- next part -------------- An HTML attachment was scrubbed... URL: From brian.wajdyk at uky.edu Tue Dec 5 12:58:16 2023 From: brian.wajdyk at uky.edu (Wajdyk, Brian L.) Date: Tue, 5 Dec 2023 17:58:16 +0000 Subject: [labnetwork] Free Two-Photon Polymerization (2PP) quick turnaround test print Message-ID: We at the Center for Nanoscale Science and Engineering have an opportunity that may benefit some of your users. We are offering seed funds to use our Nanoscribe Photonic Professional GT with a near immediate turnaround. Send us a STL file and we will send you a model and image within a day or two. The general model is a polymer but there are many different materials and we would be happy to help find an electrically conductive or biocompatible polymer to work with. Feel free to send this to educational (K-12 and university) as well as research users. We even have experience with creating content for elementary level students. More information can be found at https://cense.engr.uky.edu/equipment/nanoscale-3d-printing/nanoscale-3d-printing-request/ ********************************************* Brian Wajdyk Facility Manager / Research Center for Nanoscale Science and Engineering. University of Kentucky Office: ASTeCC 372 Email: Brian.Wajdyk at uky.edu Ph: 859-218-6548 ********************************************* -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.call at maine.edu Tue Dec 5 15:03:01 2023 From: michael.call at maine.edu (Michael Call) Date: Tue, 5 Dec 2023 15:03:01 -0500 Subject: [labnetwork] [EXTERNAL] Re: STS(SPTS) Multiplex DRIE VAT valve controller In-Reply-To: References: Message-ID: Thank you all for the help. We're sending it to Jeff Hawks for repair. Mike On Mon, Dec 4, 2023 at 11:46?PM Rosendo Bindoy wrote: > Hello Michael, > > I agree with Jim. There is an SRAM on that unit that once battery is out > everything in that memory will be wiped out. You need to replace battery > periodically as per the manual. > > https://www.lesker.com/newweb/valves/vat/files/283507.pdf?ls=1 > > Regards, > Rosendo > > Rosendo Bindoy (he/his/him) > Equipment Specialist > KAUST Nanofabrication Core Lab > ------------------------------ > *From:* labnetwork on behalf of Jim > Mitchell > *Sent:* Tuesday, December 5, 2023 3:42 AM > *To:* Michael Call > *Cc:* Lab Network (labnetwork at mtl.mit.edu) > *Subject:* [EXTERNAL] Re: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve > controller > > I have had a similar problem with a VAT controller. There is a battery > backed memory chip in the unit that needs to be replaced every couple of > years. Once replaced you can recalibrate as per the manual. > > Jim > > On Mon, Dec 4, 2023, 3:42 PM Michael Call wrote: > >> We have recently had a failure of the VAT valve PM-7 controller on our >> STS DRIE. I've tried contacting SPTS, VAT and distributors for help. The >> CM gauge read back always reads 100mTorr(maximum) at the controller. I've >> measured and verified that the correct voltage to and from the CM gauge is >> correct. So, I have verified that the problem is the VAT PM-7 control >> box. Has anyone on the list had a similar issue with the controller? And >> is there someone still supporting the STS multiplex DRIE? >> >> Thank you >> >> -- >> Mike Call >> CORE Facilities Manager >> University of Maine >> Coordinated Operating Research Entities Cleanroom/TASC >> ESRB Barrows Hall Room 294 >> 207-581-3382 >> >> [image: image.png] >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> >> > -- Mike Call CORE Facilities Manager University of Maine Coordinated Operating Research Entities Cleanroom/TASC ESRB Barrows Hall Room 294 207-581-3382 [image: image.png] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: From djculver at aol.com Tue Dec 5 18:59:47 2023 From: djculver at aol.com (Dennis Culver) Date: Tue, 5 Dec 2023 23:59:47 +0000 (UTC) Subject: [labnetwork] Dektak 6m profilometer In-Reply-To: References: Message-ID: <2072574613.320942.1701820787467@mail.yahoo.com> Hello Brian,Although I do not work on/with the Dektak 6M product, I do work on older Veeco/Sloan Technology Profilers.? The most likely issue if those erroneous step heights are the same magnitude is an open/bent pin on the A/D convertor or a bad buffer IC on the output data bits of that A/D converter.? Use ESD precautions when?poking around with the electronics so no more issues are created from mishandling! Best Regards,?Dennis J.? CulverCulver Consulting5960 Valentine Rd.Suite 14, Mail Box 13Ventura, CA 93003-6793PH(805) 648-1184FX(805) 648-1485Cell (805)680-7389www.culverequipment.com On Tuesday, December 5, 2023 at 03:33:26 PM PST, Wajdyk, Brian L. wrote: Hello, We are having an issue with our Dektak (Veeco) 6M.? Does anyone here know anyone with expertise working on these units?? It's showing abrupt steps on a patternless wafer.?? Thanks,Brian ********************************************* Brian Wajdyk Facility?Manager / Research?Center for Nanoscale Science and Engineering.? University of Kentucky Office: ASTeCC 372 Email: Brian.Wajdyk at uky.edu Ph: 859-218-6548 *********************************************_______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From kamalyadav2848 at gmail.com Tue Dec 5 22:44:15 2023 From: kamalyadav2848 at gmail.com (Kamal Yadav) Date: Tue, 5 Dec 2023 20:44:15 -0700 Subject: [labnetwork] Toxic gas delivery for small fabs? In-Reply-To: References: Message-ID: Hi Russ, Hope you doing well. For Cl2, BCl3, HBr you can have a gas cabinet and you use near point of use. We had that at Caltech. AES was the vendor for the gas cabinet. Also Norcimbus (reverse of submicron). Gases such as SF6, CF4, are considered inert and don't need gas detectors or cabinets. Mostly your flow rates will be low and I have seen academia avoiding scrubber for Cl2 but ideally they are recommended and must. These gases are toxic so you need toxic gas alarms inside the cabinet, which usually have it, and also near the tool or chase where there is possibility of leak. You need toxic gas alarm system which connects your gas detectors in cabinet, near the tool, etc where you have installed them. Co-axial lines (SS) are recommended/must for toxic gases. It's a secondary containment. BCL3 condensation is a concern but ideally you use it at a pressure that you don't need heater jackets on the SS tubing. I also heard heater jackets can't cover the lines 100% anyway so that condenses regardless. Toxic gas cabinets are common and most importantly they have auto shut off valve and purge options. There are many features on these cabinets and vendors can walk you through for what's absolutely needed. For H2, if it's forming gas, it's not much of a concern, I think. For 100%H2 cabinet is a must I think. Thanks, Kamal On Mon, Dec 4, 2023, 6:09 AM Russell Renzas wrote: > Hi, I'm Russ, some of you know me from Oxford Instruments - I just left to > direct a new 3k sqft academic fab at University of Nevada Reno. > > How do the smaller university fabs handle toxic gas delivery? e.g. Cl2, > BCl3, H2... Any recommendations for systems/vendors? And do you generally > keep cylinders for that in an external bunker-type place, or nearer point > of use (in a service chase)? SF6 and the like don't need anything special, > correct? > > Also is it now typical to abate fluorinated etch gases which I thought > requires expensive burn boxes, or do the dry bed systems suffice? > > Bit embarrassed that I don't know this stuff better, but I never had to > think about it before. > > Happy holidays, > > Russ > > Russ Renzas > University of Nevada, Reno > Google Scholar > , LinkedIn > > > ? My position at UNR starts in mid-January 2024. ? > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From YagciH at cardiff.ac.uk Wed Dec 6 07:53:12 2023 From: YagciH at cardiff.ac.uk (=?iso-8859-1?Q?H=FCseyin_Yagci?=) Date: Wed, 6 Dec 2023 12:53:12 +0000 Subject: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300 Message-ID: Hello, We have an ECM Jipelec JetFirst 300 RTA, capable of going to 1200C in our clean room. The system has a central thermocoupler (K-type TC) for calibration and readout, three peripheral read-only TCs and a pyrometer for high temperatures. The pyrometer reading is referenced to the central TC reading. Couple of weeks ago we noticed our contact performances varied across wafers and decided to change the central TC. The newly put TC reads up to 30C lower than the previous one, as well as all the peripheral TCs. The company does not seem to be checking the uniformity between the TCs they send, and we basically do not if the new TC is reading correctly or not. We are looking for a way to calibrate them in-house, without getting NPL involved. Did anybody encounter a similar problem before? Many thanks, Huseyin Bilge Yagci Cardiff University -------------- next part -------------- An HTML attachment was scrubbed... URL: From hosler0 at purdue.edu Wed Dec 6 10:19:27 2023 From: hosler0 at purdue.edu (Hosler, Richard S) Date: Wed, 6 Dec 2023 15:19:27 +0000 Subject: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300 In-Reply-To: References: Message-ID: I've had many struggles with our Jipelec Jetfirst 200C over the years, but most of the issues have to do with the pyrometer's reference table which is calibrated against the TC. I would check your TC calibration file to make sure that any corrections that may have been added to the previous TC aren't skewing the replacement's results. A decently stable TC probably won't have any adjustments at all in the table file. I also purchased a dry-block thermal calibrator to do some sanity checks on various thermocouples as well, up to at least 430C anyway. We used to use the thin wire type PT018 TCs and those aren't made anymore in Jipelec's form factor. The newer ones are rigid, and while they last longer I feel that the response isn't as fast and they are more prone to contaminating the chamber during the higher temperatures when doing pyrometer re-calibration. The older PIMS software on my tool seems to be doing some weird linear interpolation on a decidedly non-linear response curve, and it's hard to get an accurate adjustment for the whole 500-1200C range. Other problem spots that may be affecting your readings at higher temperatures would be contamination on your upper quartz window and material falling down the pyrometer well onto the BaF2 window above the sensor itself. The large window can be acid cleaned and the BaF2 window should just have the material gently removed. Hope that helps. Richard Hosler Senior Research Engineer Birck Nanotechnology Center | Room 2287C Office: 765.494.4712 | Email: richhosler at purdue.edu Wiki: https://wiki.itap.purdue.edu/display/BNCWiki iLabs: https://purdue.ilabsolutions.com/homepage/ ________________________________ From: labnetwork on behalf of H?seyin Yagci Sent: Wednesday, December 6, 2023 7:53 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300 You don't often get email from yagcih at cardiff.ac.uk. Learn why this is important ---- External Email: Use caution with attachments, links, or sharing data ---- Hello, We have an ECM Jipelec JetFirst 300 RTA, capable of going to 1200C in our clean room. The system has a central thermocoupler (K-type TC) for calibration and readout, three peripheral read-only TCs and a pyrometer for high temperatures. The pyrometer reading is referenced to the central TC reading. Couple of weeks ago we noticed our contact performances varied across wafers and decided to change the central TC. The newly put TC reads up to 30C lower than the previous one, as well as all the peripheral TCs. The company does not seem to be checking the uniformity between the TCs they send, and we basically do not if the new TC is reading correctly or not. We are looking for a way to calibrate them in-house, without getting NPL involved. Did anybody encounter a similar problem before? Many thanks, Huseyin Bilge Yagci Cardiff University -------------- next part -------------- An HTML attachment was scrubbed... URL: From trieu.nguyen at mail.wvu.edu Wed Dec 6 11:28:02 2023 From: trieu.nguyen at mail.wvu.edu (Trieu Nguyen) Date: Wed, 6 Dec 2023 16:28:02 +0000 Subject: [labnetwork] Inquiry about wet bench certification standards and processes In-Reply-To: References: Message-ID: Dear Colleagues, We are currently in the process of reviewing our wet bench setup, as shown in the attached picture (Terra Universal Inc., Custom Modular Wet Processing Station). We are seeking to ensure that our equipment meets all necessary safety and regulatory standards and are considering certification. I am reaching out to inquire if your laboratory has a similar wet bench and, if so, to gather some insights: 1. Certification Standards and Requirements: What specific standards and requirements are necessary for a wet bench like ours to be certified? Are there any industry-specific or regulatory guidelines that we need to be aware of? 1. Certifying Authorities: Could you provide information on which organizations or authorities are qualified to certify wet benches? How do we initiate contact with them, and what is the typical timeline for the certification process? Any information or experiences you can share regarding these topics would be greatly valuable to us. Thank you in advance and look forward to hearing from you. [A white lab counter with black pipes and red containers Description automatically generated] Trieu Nguyen, PhD Cleanroom(s) manager Shared Research Facilities West Virginia University Office: WH 409 | ESB G60 Email: trieu.nguyen at mail.wvu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image003.jpg Type: image/jpeg Size: 21958 bytes Desc: image003.jpg URL: From carl.chow at hpe.com Thu Dec 7 17:33:18 2023 From: carl.chow at hpe.com (Chow, Carl) Date: Thu, 7 Dec 2023 22:33:18 +0000 Subject: [labnetwork] FREE KInetic Systems Vibraplane table Message-ID: We have a Kinetic Systems Vibraplane table Model 1202-24-12 we would like to donate for free to a good home. It used to hold a microscope which was shipped to another lab. We are located in the Bay Are in Milpitas, CA. The table top weighs 800 lbs and the leg stand adds another 300 lbs. The table has casters. Please contact me if you want to pick it up. Regards, Carl Chow Cleanroom Engineer Hewlett Packard Enterprise Labs 820 N. McCarthy Blvd. Milpitas, CA 95035 carl.chow at hpe.com -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IMG_5680.jpg Type: image/jpeg Size: 297965 bytes Desc: IMG_5680.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IMG_5681.jpg Type: image/jpeg Size: 122645 bytes Desc: IMG_5681.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IMG_5682.jpg Type: image/jpeg Size: 198057 bytes Desc: IMG_5682.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: IMG_5683.jpg Type: image/jpeg Size: 232389 bytes Desc: IMG_5683.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: 1201 Instruction Manual March 2008.pdf Type: application/pdf Size: 1192759 bytes Desc: 1201 Instruction Manual March 2008.pdf URL: From YagciH at cardiff.ac.uk Mon Dec 11 08:37:42 2023 From: YagciH at cardiff.ac.uk (=?iso-8859-1?Q?H=FCseyin_Yagci?=) Date: Mon, 11 Dec 2023 13:37:42 +0000 Subject: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300 In-Reply-To: References: Message-ID: All of the comments make sense. Unfortunately, our tool (or previus usage on it) does not. The TC calibration file is just empty. Full of quotation marks and no actual data. The process engineer that signed the tool off is not here anymore and we don't know if this list was supposed to be empty (as if, the values are hardcoded into the tool/board) or it was overwritten with an empty reading accidentally. We are trying to get in touch with the supplier, but hasn't been fruitful so far. Many thanks for your valuable suggestions. Huseyin Bilge Yagci Cardiff University ________________________________ From: Hosler, Richard S Sent: 06 December 2023 15:19 To: H?seyin Yagci ; labnetwork at mtl.mit.edu Subject: Re: Calibration for thermocouplers for Jipelec JetFirst300 External email to Cardiff University - Take care when replying/opening attachments or links. Nid ebost mewnol o Brifysgol Caerdydd yw hwn - Cymerwch ofal wrth ateb/agor atodiadau neu ddolenni. I've had many struggles with our Jipelec Jetfirst 200C over the years, but most of the issues have to do with the pyrometer's reference table which is calibrated against the TC. I would check your TC calibration file to make sure that any corrections that may have been added to the previous TC aren't skewing the replacement's results. A decently stable TC probably won't have any adjustments at all in the table file. I also purchased a dry-block thermal calibrator to do some sanity checks on various thermocouples as well, up to at least 430C anyway. We used to use the thin wire type PT018 TCs and those aren't made anymore in Jipelec's form factor. The newer ones are rigid, and while they last longer I feel that the response isn't as fast and they are more prone to contaminating the chamber during the higher temperatures when doing pyrometer re-calibration. The older PIMS software on my tool seems to be doing some weird linear interpolation on a decidedly non-linear response curve, and it's hard to get an accurate adjustment for the whole 500-1200C range. Other problem spots that may be affecting your readings at higher temperatures would be contamination on your upper quartz window and material falling down the pyrometer well onto the BaF2 window above the sensor itself. The large window can be acid cleaned and the BaF2 window should just have the material gently removed. Hope that helps. Richard Hosler Senior Research Engineer Birck Nanotechnology Center | Room 2287C Office: 765.494.4712 | Email: richhosler at purdue.edu Wiki: https://wiki.itap.purdue.edu/display/BNCWiki iLabs: https://purdue.ilabsolutions.com/homepage/ ________________________________ From: labnetwork on behalf of H?seyin Yagci Sent: Wednesday, December 6, 2023 7:53 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300 You don't often get email from yagcih at cardiff.ac.uk. Learn why this is important ---- External Email: Use caution with attachments, links, or sharing data ---- Hello, We have an ECM Jipelec JetFirst 300 RTA, capable of going to 1200C in our clean room. The system has a central thermocoupler (K-type TC) for calibration and readout, three peripheral read-only TCs and a pyrometer for high temperatures. The pyrometer reading is referenced to the central TC reading. Couple of weeks ago we noticed our contact performances varied across wafers and decided to change the central TC. The newly put TC reads up to 30C lower than the previous one, as well as all the peripheral TCs. The company does not seem to be checking the uniformity between the TCs they send, and we basically do not if the new TC is reading correctly or not. We are looking for a way to calibrate them in-house, without getting NPL involved. Did anybody encounter a similar problem before? Many thanks, Huseyin Bilge Yagci Cardiff University -------------- next part -------------- An HTML attachment was scrubbed... URL: From odc1n08 at soton.ac.uk Mon Dec 11 11:56:58 2023 From: odc1n08 at soton.ac.uk (Owain Clark) Date: Mon, 11 Dec 2023 16:56:58 +0000 Subject: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300 In-Reply-To: References: Message-ID: You don't need the supplier; all the information is in the tool manual to recalibrate, and it is a fairly simple process to follow. T/C is a known type to 1300C and reads a temperature directly when in good contact with wafer. Pyrometer mV readings are measured by setting the TC control temp or power % manually. Then you fill in the C:mV look up file, and auto tune all heat zones of the tool for PID gains using the TC and then with the pyrometer control. When controlling the pyrometer directly via PLC for PID tuning, you must shift the mV value with a multiplier constant to hit the required temp. That's all in the manual. If you want to set lamp bank gains using multiple TCs for wafer heating uniformity per zone, this is done as a last step manually with as many TC's in contact with the wafer as you like. Any TC over #1 is for information only, not process control. This is quite an important process to master, if you change substrate material emissivity or even just anneal conditions sometimes it is worth recalibrating around the loop for best control. You will get an empty TC PID file if someone writes it without having values in all the cells, either white or yellow - I forget which. You must read values out of the PLC to PIMS before you write a file to disk. Else it will all be blank like you see. A simple thing to write a few lines of code to prevent, but whoever coded PIMs was not big on that sort of error catching. BR, O. From: labnetwork On Behalf Of H?seyin Yagci Sent: 11 December 2023 13:38 To: Hosler, Richard S ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300 You don't often get email from yagcih at cardiff.ac.uk. Learn why this is important CAUTION: This e-mail originated outside the University of Southampton. All of the comments make sense. Unfortunately, our tool (or previus usage on it) does not. The TC calibration file is just empty. Full of quotation marks and no actual data. The process engineer that signed the tool off is not here anymore and we don't know if this list was supposed to be empty (as if, the values are hardcoded into the tool/board) or it was overwritten with an empty reading accidentally. We are trying to get in touch with the supplier, but hasn't been fruitful so far. Many thanks for your valuable suggestions. Huseyin Bilge Yagci Cardiff University ________________________________ From: Hosler, Richard S > Sent: 06 December 2023 15:19 To: H?seyin Yagci >; labnetwork at mtl.mit.edu > Subject: Re: Calibration for thermocouplers for Jipelec JetFirst300 External email to Cardiff University - Take care when replying/opening attachments or links. Nid ebost mewnol o Brifysgol Caerdydd yw hwn - Cymerwch ofal wrth ateb/agor atodiadau neu ddolenni. I've had many struggles with our Jipelec Jetfirst 200C over the years, but most of the issues have to do with the pyrometer's reference table which is calibrated against the TC. I would check your TC calibration file to make sure that any corrections that may have been added to the previous TC aren't skewing the replacement's results. A decently stable TC probably won't have any adjustments at all in the table file. I also purchased a dry-block thermal calibrator to do some sanity checks on various thermocouples as well, up to at least 430C anyway. We used to use the thin wire type PT018 TCs and those aren't made anymore in Jipelec's form factor. The newer ones are rigid, and while they last longer I feel that the response isn't as fast and they are more prone to contaminating the chamber during the higher temperatures when doing pyrometer re-calibration. The older PIMS software on my tool seems to be doing some weird linear interpolation on a decidedly non-linear response curve, and it's hard to get an accurate adjustment for the whole 500-1200C range. Other problem spots that may be affecting your readings at higher temperatures would be contamination on your upper quartz window and material falling down the pyrometer well onto the BaF2 window above the sensor itself. The large window can be acid cleaned and the BaF2 window should just have the material gently removed. Hope that helps. Richard Hosler Senior Research Engineer Birck Nanotechnology Center | Room 2287C Office: 765.494.4712 | Email: richhosler at purdue.edu Wiki: https://wiki.itap.purdue.edu/display/BNCWiki iLabs: https://purdue.ilabsolutions.com/homepage/ ________________________________ From: labnetwork > on behalf of H?seyin Yagci > Sent: Wednesday, December 6, 2023 7:53 AM To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300 You don't often get email from yagcih at cardiff.ac.uk. Learn why this is important ---- External Email: Use caution with attachments, links, or sharing data ---- Hello, We have an ECM Jipelec JetFirst 300 RTA, capable of going to 1200C in our clean room. The system has a central thermocoupler (K-type TC) for calibration and readout, three peripheral read-only TCs and a pyrometer for high temperatures. The pyrometer reading is referenced to the central TC reading. Couple of weeks ago we noticed our contact performances varied across wafers and decided to change the central TC. The newly put TC reads up to 30C lower than the previous one, as well as all the peripheral TCs. The company does not seem to be checking the uniformity between the TCs they send, and we basically do not if the new TC is reading correctly or not. We are looking for a way to calibrate them in-house, without getting NPL involved. Did anybody encounter a similar problem before? Many thanks, Huseyin Bilge Yagci Cardiff University -------------- next part -------------- An HTML attachment was scrubbed... URL: From beaudoin at physics.ubc.ca Mon Dec 11 18:46:39 2023 From: beaudoin at physics.ubc.ca (Beaudoin, Mario) Date: Mon, 11 Dec 2023 15:46:39 -0800 Subject: [labnetwork] SOP for PKP-308PI resist? Message-ID: <7ec70593-bb8e-4f8a-afb9-becf5640accc@physics.ubc.ca> Dear Network, I have a user with need of using PKP-308PI resist.? I don't have experience with it.? My first attempt, following company specs, resulted in absolutely no adhesion to a silicon wafer. Any info on this resist would be greatly appreciated. Regards, Mario -- -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Mario Beaudoin SBQMI sig 3.jpg Type: image/jpeg Size: 22413 bytes Desc: not available URL: From grallion at ncsu.edu Tue Dec 12 08:13:28 2023 From: grallion at ncsu.edu (Greg Allion) Date: Tue, 12 Dec 2023 08:13:28 -0500 Subject: [labnetwork] multiple job openings at NC State Nanofab Message-ID: Greetings Colleagues, Please forward this to any potential candidates that may come to mind. The North Carolina State University Nanofabrication Facility (NNF) is expanding again. We will be leading a DOD funded CHIPS act Hub for wide bandgap semiconductors (CLAWS). We will be filling multiple leadership and engineering positions. The ideal candidates will be familiar with semiconductor fab processing, comfortable working in a rapidly expanding environment, and have an interest in educating the future workforce. Processing experience with wide band gap materials is highly desirable. NC State University is located in Raleigh at the eastern tip of the Research Triangle which is defined by the top 3 research Universities in the state. The triangle area has become one of the largest research parks in the country and is one of the fastest growing regions. We?re still very close to a midwest cost of living, are in the goldilocks zone regarding winter, and only a 2-3hr drive from either the beach or the mountains. Please see the attached flyers for additional information and general job descriptions. Feel free to contact me directly in addition to the email listed at the bottom of the flyer if you have any additional questions. Best Regards, Greg -- Greg Allion NC State University Nanofabrication Facility (NNF) Process Integration Engineering Manager Monteith Research Center 2410 Campus Shore Drive rm.243C Raleigh, NC 27606 -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: CLAWS Flyer_Leadership and Admin Positions.pdf Type: application/pdf Size: 82693 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: CLAWS Flyer_Engineering Positions.pdf Type: application/pdf Size: 91791 bytes Desc: not available URL: From brian.wajdyk at uky.edu Tue Dec 12 12:33:28 2023 From: brian.wajdyk at uky.edu (Wajdyk, Brian L.) Date: Tue, 12 Dec 2023 17:33:28 +0000 Subject: [labnetwork] Dektak 6m profilometer In-Reply-To: <2072574613.320942.1701820787467@mail.yahoo.com> References: <2072574613.320942.1701820787467@mail.yahoo.com> Message-ID: Very helpful. Thank you! ********************************************* Brian Wajdyk Facility Manager / Research Center for Nanoscale Science and Engineering. University of Kentucky Office: ASTeCC 372 Email: Brian.Wajdyk at uky.edu Ph: 859-218-6548 ********************************************* ________________________________ From: Dennis Culver Sent: Tuesday, December 5, 2023 6:59 PM To: labnetwork at mtl.mit.edu ; Wajdyk, Brian L. Subject: Re: [labnetwork] Dektak 6m profilometer You don't often get email from djculver at aol.com. Learn why this is important CAUTION: External Sender Hello Brian, Although I do not work on/with the Dektak 6M product, I do work on older Veeco/Sloan Technology Profilers. The most likely issue if those erroneous step heights are the same magnitude is an open/bent pin on the A/D convertor or a bad buffer IC on the output data bits of that A/D converter. Use ESD precautions when poking around with the electronics so no more issues are created from mishandling! Best Regards, Dennis J. Culver Culver Consulting 5960 Valentine Rd. Suite 14, Mail Box 13 Ventura, CA 93003-6793 PH(805) 648-1184 FX(805) 648-1485 Cell (805)680-7389 www.culverequipment.com On Tuesday, December 5, 2023 at 03:33:26 PM PST, Wajdyk, Brian L. wrote: Hello, We are having an issue with our Dektak (Veeco) 6M. Does anyone here know anyone with expertise working on these units? It's showing abrupt steps on a patternless wafer. Thanks, Brian ********************************************* Brian Wajdyk Facility Manager / Research Center for Nanoscale Science and Engineering. University of Kentucky Office: ASTeCC 372 Email: Brian.Wajdyk at uky.edu Ph: 859-218-6548 ********************************************* _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From repemc at rit.edu Fri Dec 15 11:48:57 2023 From: repemc at rit.edu (Robert Pearson) Date: Fri, 15 Dec 2023 16:48:57 +0000 Subject: [labnetwork] High temp (1700C) anneal capability Message-ID: I have a senior undergraduate who is fabricating silicon carbide Schottky Barrier Diodes. We are sending the wafers out for guard ring implants (aluminum) but do not have a suitable high temperature anneal furnace (>1600C). I would like to hear from anyone who has this capability to see what sort of arrangements we can make. Sincerely, Rob Robert E. Pearson, PhD. Rochester Institute of Technology Electrical and Microelectronic Engineering Kate Gleason College of Engineering 585 475-2923 Robert.pearson at rit.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Fri Dec 15 13:07:25 2023 From: codreanu at udel.edu (Iulian Codreanu) Date: Fri, 15 Dec 2023 13:07:25 -0500 Subject: [labnetwork] Process engineer position with UD Nanofab Message-ID: Dear Lab Network, We are looking for a Process Engineer to mainly provide user training and support on our deposition and dry etch tools. All the tools are eight years old or newer. We are located in an area with a relatively low cost of living (e.g. no sales tax and low property taxes) and close to major cities in the Northeast as well as the beach and the mountains. In addition to competitive salaries, UD offers a generous benefit package; some highlights are listed below: -11% University contribution to the retirement plan -Tuition-free undergraduate education for employees and family members -Paid time off: 5 weeks of vacation to start with (6 weeks after 5 years and 7 weeks after 10 years), 7 holidays/year, and December holiday break -Health insurance plans with modest premiums and excellent coverage: http://www.udel.edu/faculty-staff/human-resources/benefits/ The link to the position (Job 500421) is below: https://careers.udel.edu/cw/en-us/job/500421/nano-process-engineer Could you please forward to anyone who may be interested? I would be happy to answer questions about the position. Thank you very much, Iulian -- iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https://udnf.udel.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From grallion at ncsu.edu Mon Dec 18 10:55:38 2023 From: grallion at ncsu.edu (Greg Allion) Date: Mon, 18 Dec 2023 10:55:38 -0500 Subject: [labnetwork] High temp (1700C) anneal capability In-Reply-To: References: Message-ID: Hi Robert, This is a hard one to find. There's a place in Sweden called Coherent. Used to be II-VI. Reliably, I think that's about it. Very curious to see if there's any more feedback from the network though. A word of caution... If you don't have experience with the carbon capping process, you probably want to outsource that to them also. Cheers, Greg On Fri, Dec 15, 2023 at 3:42?PM Robert Pearson wrote: > I have a senior undergraduate who is fabricating silicon carbide Schottky > Barrier Diodes. > > > > We are sending the wafers out for guard ring implants (aluminum) but do > not have a suitable high temperature anneal furnace (>1600C). > > > > I would like to hear from anyone who has this capability to see what sort > of arrangements we can make. > > > > Sincerely, > > > > Rob > > > > > > Robert E. Pearson, PhD. > > Rochester Institute of Technology > > Electrical and Microelectronic Engineering > > Kate Gleason College of Engineering > > 585 475-2923 > > Robert.pearson at rit.edu > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Greg Allion NC State University Nanofabrication Facility (NNF) Process Integration Engineering Manager Monteith Research Center 2410 Campus Shore Drive rm.243C Raleigh, NC 27606 -------------- next part -------------- An HTML attachment was scrubbed... URL: From ericdj at seas.upenn.edu Mon Dec 18 15:17:51 2023 From: ericdj at seas.upenn.edu (Eric Johnston) Date: Mon, 18 Dec 2023 15:17:51 -0500 Subject: [labnetwork] Solution for wiping down items going into the cleanroom Message-ID: Hi All At the beginning of the pandemic we switched from a 10% IPA/DI solution to 70% for wiping items down that we were bringing into the cleanroom. We're thinking of switching back to 10% IPA, but wanted to check what others are using and why. Thanks Eric Eric Johnston Director, Quattrone Nanofabrication Facility Singh Center for Nanotechnology University of Pennsylvania 3205 Walnut Street, #109A ericdj at seas.upenn.edu T. 215.573.6695 -------------- next part -------------- An HTML attachment was scrubbed... URL: From dcchrist at wisc.edu Mon Dec 18 16:49:29 2023 From: dcchrist at wisc.edu (Daniel Christensen) Date: Mon, 18 Dec 2023 21:49:29 +0000 Subject: [labnetwork] Solution for wiping down items going into the cleanroom In-Reply-To: References: Message-ID: 10-4 From: labnetwork On Behalf Of Eric Johnston Sent: Monday, December 18, 2023 2:18 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Solution for wiping down items going into the cleanroom Hi All At the beginning of the pandemic we switched from a 10% IPA/DI solution to 70% for wiping items down that we were bringing into the cleanroom. We're thinking of switching back to 10% IPA, but wanted to check what others are using and why. Thanks Eric Eric Johnston Director, Quattrone Nanofabrication Facility Singh Center for Nanotechnology University of Pennsylvania 3205 Walnut Street, #109A ericdj at seas.upenn.edu T. 215.573.6695 -------------- next part -------------- An HTML attachment was scrubbed... URL: From grallion at ncsu.edu Tue Dec 19 09:14:29 2023 From: grallion at ncsu.edu (Greg Allion) Date: Tue, 19 Dec 2023 09:14:29 -0500 Subject: [labnetwork] Solution for wiping down items going into the cleanroom In-Reply-To: References: Message-ID: We just have users spit shine their stuff now. Obviously kidding. We're back to 10 or 20% IPA as cleanliness is the primary concern now. We will continue to double glove and beard covers won't be coming back as an option, just face masks. We're also back to sharing PPE at hoods unless a user requests their own. Cheers, Greg On Mon, Dec 18, 2023 at 3:41?PM Eric Johnston wrote: > Hi All > > At the beginning of the pandemic we switched from a 10% IPA/DI solution to > 70% for wiping items down that we were bringing into the cleanroom. We're > thinking of switching back to 10% IPA, but wanted to check what others are > using and why. > > Thanks > > Eric > > Eric Johnston > Director, Quattrone Nanofabrication Facility > Singh Center for Nanotechnology > University of Pennsylvania > 3205 Walnut Street, #109A > ericdj at seas.upenn.edu > T. 215.573.6695 > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Greg Allion NC State University Nanofabrication Facility (NNF) Process Integration Engineering Manager Monteith Research Center 2410 Campus Shore Drive rm.243C Raleigh, NC 27606 -------------- next part -------------- An HTML attachment was scrubbed... URL: From schweig at umich.edu Wed Dec 20 14:12:30 2023 From: schweig at umich.edu (Dennis Schweiger) Date: Wed, 20 Dec 2023 14:12:30 -0500 Subject: [labnetwork] job posting at University of Michigan/LNF Message-ID: Good afternoon all, The Lurie Nanofabrication Facility at the University of Michigan In Ann Arbor (go Wolverines) is looking to fill a new position for a facilities engineer, If you're interested, the details are in the link below, along with instructions on how to apply for the position. Also, if you have particular questions about the position, please feel free to contact me directly. https://careers.umich.edu/job_detail/243339/senior-engineer-research-lnf-infrastructure Thank you, Dennis Schweiger Facilities Manager University of Michigan/LNF 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened. Within which group do you belong?" Choose wisely. -------------- next part -------------- An HTML attachment was scrubbed... URL: From bernhard.reineke at uni-paderborn.de Wed Dec 20 16:21:13 2023 From: bernhard.reineke at uni-paderborn.de (Bernhard Reineke) Date: Wed, 20 Dec 2023 21:21:13 +0000 Subject: [labnetwork] New Cleanroom New Equipment Message-ID: <8ba66eb8ee244dd883dcabd7666bd007@uni-paderborn.de> Dear all, I really enjoy the conversations in this group and I'm glad to have found a place to discuss all the intricacies of cleanroom work. At the moment we are building a new cleanroom in Paderborn and I have been asked what equipment we will need in the new cleanroom. Small machines Likes sputter coaters (up to 45000?), glassware, tools etc. At the moment we have a small list of equipment we would like to have. But I wanted to ask you what you think we might need? Our list includes tools, glassware, hotplates, spin coaters, ultrasonic baths, a large tool container, calibration targets for AFM, SEM and EDX, and more. But are there any less obvious things we should include? Best wishes, Bernhard University of Paderborn PHOQS Warburger Stra?e 100 33098 Paderborn Paderborn, Germany -------------- next part -------------- An HTML attachment was scrubbed... URL: From savithap at iisc.ac.in Fri Dec 22 03:57:54 2023 From: savithap at iisc.ac.in (Savitha P) Date: Fri, 22 Dec 2023 08:57:54 +0000 Subject: [labnetwork] High footfall in the cleanroom Message-ID: Hi! We are experiencing a high number of people in our cleanroom, with 50-70 users at a time against a maximum capacity of 50. I would appreciate it if you could share strategies used in your facilities to reduce the number of people in the cleanroom. Do you have any restrictions on students during the day or any incentives for working after office hours, for both startups and industry? Thanks, Savitha Dr. Savitha P Chief Operating Officer National Nanofabrication Centre Centre for Nanoscience and Engineering Indian Institute of Science Bangalore - 560012 India. Ph. +91 80 2293 3319 www.cense.iisc.ac.in -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Fri Dec 22 09:04:46 2023 From: codreanu at udel.edu (Iulian Codreanu) Date: Fri, 22 Dec 2023 09:04:46 -0500 Subject: [labnetwork] High footfall in the cleanroom In-Reply-To: References: Message-ID: <3f4f770d-8d53-468f-9592-4e04b43c26f7@udel.edu> Hi Savitha, I would start by recalling where the maximum capacity of 50 came from. If it was determined based on a code (fire, building) you have to stick to it and look into strategies to spread out the work in the cleanroom. If it was not based on a code, I think you have flexibility in allowing 70 users in at a given time if they do not "bump into each other". Cheers, Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https://udnf.udel.edu On 12/22/2023 3:57 AM, Savitha P wrote: > > Hi! > > We are experiencing a high number of people in our cleanroom, with > 50-70 users at a time against a maximum capacity of 50. I would > appreciate it if you could share strategies used in your facilities to > reduce the number of people in the cleanroom. Do you have any > restrictions on students during the day or any incentives for working > after office hours, for both startups and industry? > > Thanks, > Savitha > > Dr. Savitha P > Chief Operating Officer > National Nanofabrication Centre > Centre for Nanoscience and Engineering > Indian Institute of Science > Bangalore - 560012 > India. > Ph. +91 80 2293 3319 > www.cense.iisc.ac.in > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From jerry.hunter at wisc.edu Fri Dec 22 10:34:44 2023 From: jerry.hunter at wisc.edu (Jerry Hunter) Date: Fri, 22 Dec 2023 15:34:44 +0000 Subject: [labnetwork] Processing engineering position at University of Wisconsin-Madison Message-ID: The University of Wisconsin Madison, Wisconsin Centers for Nanoscale Technology-Nanoscale Fabrication Facility https://wcnt.wisc.edu/ has an immediate opening for a process engineer. The center is a 10,000 square foot cleanroom facility for nanoscale fabrication that supports a broad range of research by students, staff, faculty, and industrial clients with interest in micro and nano fabrication and device development. The position will primarily support optical and electron beam lithography process development and monitoring for our userbase, but may also be required to support other process technologies (deposition, etch, etc.) To apply go to https://jobs.wisc.edu/jobs/process-engineer-madison-wisconsin-united-states -------------- next part -------------- An HTML attachment was scrubbed... URL: From jdeng at cns.fas.harvard.edu Fri Dec 22 14:57:28 2023 From: jdeng at cns.fas.harvard.edu (Deng, Jiangdong) Date: Fri, 22 Dec 2023 19:57:28 +0000 Subject: [labnetwork] High footfall in the cleanroom In-Reply-To: <3f4f770d-8d53-468f-9592-4e04b43c26f7@udel.edu> References: <3f4f770d-8d53-468f-9592-4e04b43c26f7@udel.edu> Message-ID: Hi, Savitha, I have the same question as Iulian, ?where did the maximum capacity of 50 come from?? How big is your cleanroom and the actual working area for users? It is a good topic, though, since we in CNS-Harvard are facing the similar situation. Our cleanroom (CNS -Harvard) size is ~ 10.5 k sq ft, but it includes the chases, gowning room, and tool holdings. So, the real open work area is tight (<2-3k sq ft) based on our user size. We usually see 25-35 users working in the CR at a time. If the user number goes over 40, the traffic becomes heavy and worrisome. During the pandemic, we had some approaches to limit the CR occupancy, for example, putting the limit on the door entry and tool scheduling. However, with more users coming back and the research getting busier, we can?t just simply keep the restriction on without a solid legislation base. We (with the school EHS) are studying and working on this topic, but so far haven?t found any clear code from OSHA or other resources for the CR occupancy limit. It would be greatly appreciated if anyone happens to know and can share the related regulations. Best regards and Happy holidays to everyone! -JD -- Jiangdong Deng (JD), Ph. D Associate Director, Center for Nanoscale Systems Head of Nanofabrication Facility, Harvard University, 11 Oxford St., LISE-G54, Cambridge, MA 02138 Tel: 617-495-3396 From: labnetwork on behalf of Iulian Codreanu Date: Friday, December 22, 2023 at 11:46 AM To: Savitha P , labnetwork at mtl.mit.edu Subject: Re: [labnetwork] High footfall in the cleanroom Hi Savitha, I would start by recalling where the maximum capacity of 50 came from. If it was determined based on a code (fire, building) you have to stick to it and look into strategies to spread out the work in the cleanroom. If it was not based on a code, I think you have flexibility in allowing 70 users in at a given time if they do not "bump into each other". Cheers, Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https://udnf.udel.edu On 12/22/2023 3:57 AM, Savitha P wrote: Hi! We are experiencing a high number of people in our cleanroom, with 50-70 users at a time against a maximum capacity of 50. I would appreciate it if you could share strategies used in your facilities to reduce the number of people in the cleanroom. Do you have any restrictions on students during the day or any incentives for working after office hours, for both startups and industry? Thanks, Savitha Dr. Savitha P Chief Operating Officer National Nanofabrication Centre Centre for Nanoscience and Engineering Indian Institute of Science Bangalore - 560012 India. Ph. +91 80 2293 3319 www.cense.iisc.ac.in _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From patricns at uw.edu Fri Dec 22 15:48:48 2023 From: patricns at uw.edu (N Shane Patrick) Date: Fri, 22 Dec 2023 12:48:48 -0800 Subject: [labnetwork] High footfall in the cleanroom In-Reply-To: References: Message-ID: <192A729A-ED72-423E-96D6-0B54F06E95CB@uw.edu> An HTML attachment was scrubbed... URL: From mondol at mit.edu Fri Dec 22 15:55:42 2023 From: mondol at mit.edu (Mark K Mondol) Date: Fri, 22 Dec 2023 20:55:42 +0000 Subject: [labnetwork] High footfall in the cleanroom In-Reply-To: <3f4f770d-8d53-468f-9592-4e04b43c26f7@udel.edu> References: <3f4f770d-8d53-468f-9592-4e04b43c26f7@udel.edu> Message-ID: Savitha: Having visited your facility in Bengalaru I kind of doubt OSHA regulations apply to you, but they may help others on this email. I agree that if it is possible to increase the nominal maximum capacity and still be confident that users are safe that would be a good option. When I ran the NanoStructures Lab we had 200 sq meters of lab space that would get very crowded starting in mid-afternoon through early evening. Part of our issue was that most students were not qualified to work during non-staff hours. One of our solutions was for our staff to start later in the day, more in line with the hours students worked. We also considered qualifying post-docs to supervise the lab. We also considered reducing the rate for early morning use. The most useful idea was having the supervising Prof. tell their students to get up earlier. I believe your facility is open 24 hours a day and sees quite a bit of use even late night so none of my advice may be useful. Thanks so much for hosting me in 2019, great memories. Regards, Mark K Mondol Mark K Mondol Assistant Director NanoStructures Laboratory And Facility Manager Scanning Electron Beam Lithography Facility LAB Bldg 24 Room 041 Mailing Bldg 36 Room 213 mondol at mit.edu cell - 617-224-8756 ________________________________ From: labnetwork on behalf of Iulian Codreanu Sent: Friday, December 22, 2023 9:04 AM To: Savitha P ; labnetwork at mtl.mit.edu Subject: Re: [labnetwork] High footfall in the cleanroom Hi Savitha, I would start by recalling where the maximum capacity of 50 came from. If it was determined based on a code (fire, building) you have to stick to it and look into strategies to spread out the work in the cleanroom. If it was not based on a code, I think you have flexibility in allowing 70 users in at a given time if they do not "bump into each other". Cheers, Iulian iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https://udnf.udel.edu On 12/22/2023 3:57 AM, Savitha P wrote: Hi! We are experiencing a high number of people in our cleanroom, with 50-70 users at a time against a maximum capacity of 50. I would appreciate it if you could share strategies used in your facilities to reduce the number of people in the cleanroom. Do you have any restrictions on students during the day or any incentives for working after office hours, for both startups and industry? Thanks, Savitha Dr. Savitha P Chief Operating Officer National Nanofabrication Centre Centre for Nanoscience and Engineering Indian Institute of Science Bangalore - 560012 India. Ph. +91 80 2293 3319 www.cense.iisc.ac.in _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From prashant at ucsb.edu Fri Dec 22 18:12:48 2023 From: prashant at ucsb.edu (Prashant Srinivasan) Date: Fri, 22 Dec 2023 15:12:48 -0800 Subject: [labnetwork] High footfall in the cleanroom In-Reply-To: References: Message-ID: <53c083a5-64b8-4fd7-bacd-5c4af67b6097@ucsb.edu> Savitha, While I don't deal with research/industry users (we have a dedicated research Nanofab for that), here are a few strategies we use (primarily instituted by my excellent predecessor) in the teaching cleanroom (~50 students per quarter): 1. Users who have not gone through the training process are not allowed access. This cuts down on the footfall due to casual observers. 2. Each piece of equipment needs to be reserved prior to use, for a specific duration (1-2 hr windows).? This would limit folks from showing up and waiting in the cleanroom. In the research Nanofab, users have 24x7 access and it is heavily leveraged. Once you realize the process node you want is reserved during the day, you don't have a choice but to choose evening hours! Hope this helps, Prashant On 12/22/2023 12:57 AM, Savitha P wrote: > > Hi! > > We are experiencing a high number of people in our cleanroom, with > 50-70 users at a time against a maximum capacity of 50. I would > appreciate it if you could share strategies used in your facilities to > reduce the number of people in the cleanroom. Do you have any > restrictions on students during the day or any incentives for working > after office hours, for both startups and industry? > > Thanks, > Savitha > > Dr. Savitha P > Chief Operating Officer > National Nanofabrication Centre > Centre for Nanoscience and Engineering > Indian Institute of Science > Bangalore - 560012 > India. > Ph. +91 80 2293 3319 > www.cense.iisc.ac.in > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- Prashant Srinivasan, Teaching Cleanroom Manager, Department of ECE Project Scientist, Experimental Cosmology, Deptartment of Physics University of California Santa Barbara, Santa Barbara, CA 93106 -------------- next part -------------- An HTML attachment was scrubbed... URL: From scholvin at mit.edu Sat Dec 23 08:40:28 2023 From: scholvin at mit.edu (Jorg Scholvin) Date: Sat, 23 Dec 2023 13:40:28 +0000 Subject: [labnetwork] UGIM 2024 - Call for Papers Message-ID: Dear Labnetwork: We are excited to host the 2024 UGIM Symposium at MIT.nano: Sunday June 23, through noon Wednesday, June 26, 2024. The Call for Papers (presentations) is now open. You can submit your abstract at https://mitnano.mit.edu/ugim-abstract We will stagger the review of abstracts into early & late submissions. The submission deadline for "early" review is Feb 15, while the "late" reviews start Apr 15. General information about UGIM for attendees as well as vendors/sponsors is posted at http://ugim.mit.edu along with relevant timepoints & deadlines. We anticipate registration to open in mid-January (after some final edits to the registration system). Looking forward to seeing everyone in Boston next summer! Jorg & Anna -------------- next part -------------- An HTML attachment was scrubbed... URL: From philipp.altpeter at lmu.de Sat Dec 23 09:29:41 2023 From: philipp.altpeter at lmu.de (Philipp Altpeter) Date: Sat, 23 Dec 2023 15:29:41 +0100 Subject: [labnetwork] High footfall in the cleanroom In-Reply-To: References: Message-ID: <97ed3a4e-9369-4f1f-aedb-cb590f7b4e59@lmu.de> Dear Savitha, During covid we restricted the number of people working in the cleanroom simultaneously by implementing a booking calendar (in form of a doodle poll or something similar) along with the calendars for the equipment. As a user, you had to book a cleanroom slot first, then the required equipment. If you include a buffer of 10%, it can work efficiently. Hope it helps... Philipp Am 22.12.2023 um 09:57 schrieb Savitha P: > > Hi! > > We are experiencing a high number of people in our cleanroom, with > 50-70 users at a time against a maximum capacity of 50. I would > appreciate it if you could share strategies used in your facilities to > reduce the number of people in the cleanroom. Do you have any > restrictions on students during the day or any incentives for working > after office hours, for both startups and industry? > > Thanks, > Savitha > > Dr. Savitha P > Chief Operating Officer > National Nanofabrication Centre > Centre for Nanoscience and Engineering > Indian Institute of Science > Bangalore - 560012 > India. > Ph. +91 80 2293 3319 > www.cense.iisc.ac.in > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From venkatachala at iisc.ac.in Wed Dec 27 12:16:32 2023 From: venkatachala at iisc.ac.in (Venkatachalam P) Date: Wed, 27 Dec 2023 17:16:32 +0000 Subject: [labnetwork] High footfall in the cleanroom In-Reply-To: <97ed3a4e-9369-4f1f-aedb-cb590f7b4e59@lmu.de> References: <97ed3a4e-9369-4f1f-aedb-cb590f7b4e59@lmu.de> Message-ID: Hi, In trying to find if any standards regrading maximum personal allowed in a cleanroom space, ISO 14644 does not restrict num of personal in the cleanroom. But, does mention "Care should be taken to identify and control all factors that have an influence on the required cleanroom cleanliness classification - personnel activity". I could not find anything recent on Semiconductor cleanrooms (... Yield = Profits), but further looking into Pharma cleanrooms, FDA doesn't restrict no of people, but certain companies do \ref [1]. I also stumbled upon these answers on limiting people in cleanroom based on amount of contamination caused by the personal and how it is calculated \ref [2] [3]. [1] Pharmaceutical Cleanroom Classification using ISO 14644-1 and the EU GGMP Annex 1 Part 2: Practical (ejpps.online) [2] Predicted Contamination Levels in Cleanrooms When Cleanroom-Dressed People Are the Contamination Source (pharmtech.com) [3]Rationale Number of Personnel in Clean Rooms CM 20131023 | PDF | Chemistry | Nature (scribd.com) Best regards, Venkatachalam P Project assistant - PRL CeNSE, NNFC Indian Institute of science Bangalore, India. +91 8951270047 ________________________________ From: labnetwork on behalf of Philipp Altpeter Sent: Saturday, December 23, 2023 7:59 PM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] High footfall in the cleanroom External Email Dear Savitha, During covid we restricted the number of people working in the cleanroom simultaneously by implementing a booking calendar (in form of a doodle poll or something similar) along with the calendars for the equipment. As a user, you had to book a cleanroom slot first, then the required equipment. If you include a buffer of 10%, it can work efficiently. Hope it helps... Philipp Am 22.12.2023 um 09:57 schrieb Savitha P: Hi! We are experiencing a high number of people in our cleanroom, with 50-70 users at a time against a maximum capacity of 50. I would appreciate it if you could share strategies used in your facilities to reduce the number of people in the cleanroom. Do you have any restrictions on students during the day or any incentives for working after office hours, for both startups and industry? Thanks, Savitha Dr. Savitha P Chief Operating Officer National Nanofabrication Centre Centre for Nanoscience and Engineering Indian Institute of Science Bangalore - 560012 India. Ph. +91 80 2293 3319 www.cense.iisc.ac.in _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From alex.norman at princeton.edu Wed Dec 27 15:28:01 2023 From: alex.norman at princeton.edu (Alex I. Norman) Date: Wed, 27 Dec 2023 20:28:01 +0000 Subject: [labnetwork] CHIPS R&D Symposium and Workforce Development Programs at TechConnect, June 17-19, 2024 Message-ID: Dear All, Join us at TechConnect World 2024 June 17-19, 2024 in Washington DC for this CHIPS R&D - Challenges and Opportunities (techconnectworld.com) symposium gathering experts to discuss research challenges and opportunities associated with the CHIPS act. Topics of focus will include metrology, characterization, advanced packaging, visualization, and automation. Abstracts are due January 26th! In addition to the R&D symposium, additional events that will be held: 1. Career panel for community college /technical college educators and students 2. Career panel for 4-year institution and graduate students 3. Tutorial on the semiconductor industry 4. Career opportunities/training/internship programs on the expo floor 5. Poster session on the expo floor For further details : CHIPS Act Workforce Development (techconnectworld.com) Please share across your respective networks. Hope to see many of you there! Alex Alexander Norman, Ph.D Executive Director, Princeton Materials Institute Princeton University Bowen Hall, Room 324 70 Prospect Street Princeton, NJ 08544 (609) 258-6855 (Office) (202) 427-2792 (Cell) alex.norman at princeton.edu https://www.linkedin.com/company/princetonmaterials [cid:image001.png at 01DA38D8.F3CED200] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 25502 bytes Desc: image001.png URL: From savithap at iisc.ac.in Fri Dec 29 05:07:30 2023 From: savithap at iisc.ac.in (Savitha P) Date: Fri, 29 Dec 2023 10:07:30 +0000 Subject: [labnetwork] High footfall in the cleanroom In-Reply-To: <97ed3a4e-9369-4f1f-aedb-cb590f7b4e59@lmu.de> References: <97ed3a4e-9369-4f1f-aedb-cb590f7b4e59@lmu.de> Message-ID: Dear All: Thank you for your suggestions. We had a detailed discussion with our facility engineers regarding the maximum number of occupants allowed at a time. This number is determined by design considerations, including humidity, heat load, and air change requirements (total HVAC design). To ensure safety, we have a booking system for tools, and biometric entry is only allowed for individuals who pass the safety test. We also offer a lower cost for tool usage during the night and early morning hours. However, we are experiencing an issue as the number of tools is higher than previously anticipated, with training slots bringing in more people. To address this, we are considering staggering staff hours to distribute dependent users throughout the day. Additionally, we are looking into making the biometric entry points restrict the number of users allowed inside. We will also consider a teaching fab that separates research and industrial users. Thank you, Mark, for sharing your fond memories of your previous visit to IISc. We have undergone significant changes since then, and a new visit will provide a completely different experience. Regards, Savitha ________________________________ From: labnetwork on behalf of Philipp Altpeter Sent: 23 December 2023 19:59 To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] High footfall in the cleanroom External Email Dear Savitha, During covid we restricted the number of people working in the cleanroom simultaneously by implementing a booking calendar (in form of a doodle poll or something similar) along with the calendars for the equipment. As a user, you had to book a cleanroom slot first, then the required equipment. If you include a buffer of 10%, it can work efficiently. Hope it helps... Philipp Am 22.12.2023 um 09:57 schrieb Savitha P: Hi! We are experiencing a high number of people in our cleanroom, with 50-70 users at a time against a maximum capacity of 50. I would appreciate it if you could share strategies used in your facilities to reduce the number of people in the cleanroom. Do you have any restrictions on students during the day or any incentives for working after office hours, for both startups and industry? Thanks, Savitha Dr. Savitha P Chief Operating Officer National Nanofabrication Centre Centre for Nanoscience and Engineering Indian Institute of Science Bangalore - 560012 India. Ph. +91 80 2293 3319 www.cense.iisc.ac.in _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: