[labnetwork] SPTS Rapier Module - Laser/White Light Interferometry

[Owain Clark]

Hi James, we don't have a rapier but we have an intellemetrics system on an OIPT chamber here. If there is a suitable optical KF/NW standard 40mm+ port located normally above the wafer then I expect it would work fine. We use IR wavelength for better compatibility with Si+Si dielectrics. I integrated the system without an assistance from OIPT, it does not interact with the tool control s/w so you need to manually observe one and hit stop on the other.

Downsides of our system are tricky to manually focus and get the back reflection in the detector plus you have to create your masks with an opening in the correct spot, with limited XY translation possible. Can't tell you anything about etch uniformity either.

I agree with SPTS in general, OES is a better and more versatile method of etch detection. Particularly if you have a full spectrum based system, also can be useful for plasma diagnostics and chamber cleaning information so it is more than just etch process. An inferometer gives you none of that additional info.

Make us an offer if you like, I can't remember the last time our system got used. It's easier/quicker to take wafers out part etch and use the ellipsometer to characterise... Very easy to detach from tool and reinstall elsewhere.

BR, Owain

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of James Grant
Sent: 06 February 2023 14:38
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] SPTS Rapier Module - Laser/White Light Interferometry

CAUTION: This e-mail originated outside the University of Southampton.
Hello,

Hoping the community can feedback on their experiences.

In 2019 we purchased an SPTS Rapier DSiE tool. As well as doing Bosch processing we also require the tool to do mixed process etching. Quite a few of our users, on our other Si etch tools (OIPT Estrelas and STS Multiplex), use mixed process to etch SOI materials or a-Si on fused silica substrates. These systems have Intellemetrics LEP 410/500 red laser interferometer units for the purpose of end-point detection.

When we purchased the Rapier, SPTS did tell us that a laser end-point system could not be used. They encouraged us instead to use the Claritas OES system on the tool, however when we pointed out our typical use scenario (small substrate size, low % open area) they admitted that the Claritas would struggle to differentiate when to end-point. Our preferred laser interferometer vendor, Intellemetrics, say they have sold LEP 500 red laser interferometer units to SPTS but cannot say on what systems they have been used.

We have found that EPFL use white light interferometry<https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.epfl.ch%2Fresearch%2Ffacilities%2Fcmi%2Fequipment%2Fetching%2Fspts-rapier%2F&data=05%7C01%7Codc1n08%40soton.ac.uk%7C004af8b4b7bf4f0a863708db0883f48d%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C638113135056428938%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C2000%7C%7C%7C&sdata=VIOSQ%2BUUKBvJCc3U0dKErvhSez4nRB3Llf3VhbVJm9s%3D&reserved=0> end-point detection on their Rapier module - have contacted Phillipe Fluckiger separately.

My question to the community is has anyone used a laser interferometry system on an SPTS Rapier? If so, could they feedback with their experiences. Apologies I'm asking such an open question!

Cheers,

James

Dr. James Paul Grant
Research Engineer in Plasma Processing

Plasma Processing Group
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>

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