[labnetwork] Budgeting a cleanroom build

[Aebersold, Julia]

Kevin, Dennis Grimard at MITnano would be a great resource to ask this question.

Essentially, its going to cost more than you expect.  Also, make sure you lock in rock solid commitment of long term support for infrastructure and equipment.

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572
 
http://louisville.edu/micronano/

-----Original Message-----
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Kevin M McPeak
Sent: Tuesday, February 7, 2023 6:01 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Budgeting a cleanroom build

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Dear Colleagues,

At LSU, we are putting together a proposal to build a cleanroom on campus (our current one is 15 min away). Our VP of research has asked me to determine a rough budget for constructing a microelectronics cleanroom. Below are the itemized details:

- Size: 2000 sqft of class 100 space and 2000 sqft of grey room space. Our current off-campus cleanroom is 2000 sqft.
- Location: 5th floor (top floor) of chemistry building (total space of 5th floor is 12,000 sqft)
- Current condition of space:  5th floor is unfinished, i.e., concrete floors with pipes coming from the ground and 10ft ceilings.

I want to factor in the following costs: air handlers, toxic gas handling for PECVD, LPCVD, and ICP-RIE machines, and getting utilities to each tool, i.e., power, water, and N2.

$8 million is the current number that people are tossing around. I would greatly appreciate the feedback on that value. I certainly don't want to underfund the project. Thanks!

Regards,
Kevin
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