[labnetwork] HSQ Availability

[Michael Rooks]

We are now buying HSQ from Dischem <https://discheminc.com/>, in
Pennsylvania. Dischem and EMresist buy HSQ powder from AQM in Canada, and
then mix it in MIBK.
The resolution and sensitivity are similar to that of HSQ from Dow, but we
found that the Dischem HSQ sticks better if we bake it at 120C after
spinning.
Prices for thin HSQ are high, but manageable. Prices for thick HSQ (like
Dow's Fox-16) are prohibitively expensive. We will have to rework our
processes when we run out. We store HSQ in liquid nitrogen, so shelf life
is not an issue. You can also buy HSQ powder directly from AQM.

--------------------------------
Michael Rooks
nano.yale.edu


On Wed, Feb 15, 2023 at 3:59 PM Matt Moneck <mmoneck at andrew.cmu.edu> wrote:

> Hi All,
>
>
>
> I would like to solicit your feedback on HSQ options for ebeam litho.  Our
> group has traditionally worked with Dow Corning’s XR-1541-002 HSQ, and it
> has fit our needs for many years.  However, as our stock is now reaching a
> reorder point, we have reached out to vendors for quotes only to find that
> pricing has increased to a level we could have never imagined (not to
> mention lead times on the order of 80 business days).  With that in mind,
> we have been looking at alternative suppliers, including EM Resist
> (distributed through Integrated Micro Materials) and Allresist (Medusa
> 82).
>
>
>
> If anyone has experience working with the EM Resist and Allresist
> products, we would appreciate any feedback you might you might have on how
> they compare to the XR-1541.  For example, do you see any major differences
> in resolution, adhesion, dosing, etch resistance, etc.?
>
>
>
> If you have other alternatives, we would love to hear about them as well,
> although, we do prefer to buy pre-mixed solutions as opposed to mixing dry
> HSQ with MIBK ourselves.
>
>
>
> Best Regards,
>
>
> Matt
>
>
>
> --
> Matthew T. Moneck, Ph.D
> Executive Director, Claire & John Bertucci Nanotechnology Laboratory
> Electrical & Computer Engineering | Carnegie Mellon University
> 5000 Forbes Avenue, Pittsburgh, PA 15213-3890
> Phone: 412-268-5430
> ece.cmu.edu
> nanofab.ece.cmu.edu
>
>
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