[labnetwork] Treating silane exhaust from PECVD

[Malhotra, Sandra Guy]

We use a Jupiter Callisto dry bed scrubber for our Oxford PECVD system and are quite happy with it.

Hope this helps!

Sandra G. Malhotra, Ph.D.  |  Technical Lab Manager

AggieFab Nanofabrication Facility
https://aggiefab.tamu.edu/
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University
3253 TAMU | College Station, TX 77843
ph: 979.845.3199  |  sandra.malhotra at tamu.edu
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TEXAS A&M UNIVERSITY | FEARLESS on Every Front

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Joseph Losby <joseph.losby at ucalgary.ca>
Sent: Thursday, January 12, 2023 3:35 PM
To: Hadi Esmaeilsabzali <hadi_esmaeilsabzali at sfu.ca>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Treating silane exhaust from PECVD

Hi Hadi and everyone, I am interested in what abatement solutions others use as well. We are currently looking at Jupiter Callisto dry bed scrubber systems for our PECVD and ICP-RIE processes. Cheers, Joe From: labnetwork <labnetwork-bounces@ mtl. mit. edu>
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Hi Hadi and everyone,  I am interested in what abatement solutions others use as well.   We are currently looking at Jupiter Callisto dry bed scrubber systems for our PECVD and ICP-RIE processes.

Cheers,
Joe
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Hadi Esmaeilsabzali <hadi_esmaeilsabzali at sfu.ca>
Sent: January 12, 2023 12:35 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Treating silane exhaust from PECVD

[△EXTERNAL]



Dear Colleagues,

For those who run PECVD at their facilities, I am wondering how you process the exhaust from your systems.

We used to treat the PECVD exhaust along with that of the SiNx tube furnace through a TPU. We have recently decommissioned our furnace and TPU as they were too costly to run and are looking at alternative exhaust options for the PECVD only. We use our PECVD tool for oxide and nitride deposition, and it's worth noting that it only uses silane (no ammonia).

Some colleagues had mentioned that they don't use a TPU/scrubber and send the process waste to the building exhaust (untreated). Given that our PECVD processes use a relatively small silane flow (~30 sccm for up to 30 mins per run each week - all max values) and it is significantly diluted, this sounded a practical option. I am trying to see if others have tried or can comment on this approach, particularly for a silane-based PECVD process. Aside from the flammability concerns, we are also aware of the potential oxide buildup in the exhaust system over time.

I appreciate it if you share other (cost-effective) suggestions you might have for us!

Thanks,
Hadi


Hadi Esmaeilsabzali, PhD

Nanofabrication Group Manager, 4D LABS

Simon Fraser University

8888 University Dr., Burnaby, B.C. V5A 1S6
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