[labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

[Kyle Keenan]

Hi Aju,

We have them in the following areas:


   - ambient bay
   - ambient chase
   - gas cabinets
   - exhaust ducts for gas boxes/pods


Best,
Kyle

On Fri, Jan 13, 2023 at 4:06 PM Aju Jugessur <Aju.Jugessur at colorado.edu>
wrote:

> Hi all,
>
>
>
> We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and
> Silane. The exhausts from the pumps are connected to a scrubber and ph
> neutralization/acid waste system.
>
>
>
> I am reaching out to get some advice on the specific locations of the
> Honeywell Midas sensors that we use, to detect any gas leak at the etchers
> and toxic gas monitoring system. We have sensors at the gas cabinets and
> ambient sensors at the tools.
>
> However, there seems to be a disagreement between our design team and our
> EHS unit. The design team recommends having the sensors in the gas pods,
> where the leaks are most likely to occur. EHS would like to have the
> ambient sensors at the tools, in the breathing zone areas. As per local
> code requirements, sensors in the gas pods satisfies the safety
> requirements.
>
>
>
> I would like to know what your set-up of the sensor locations for similar
> instruments is that you may have in your facility.
>
> Any insights based on experience will be super helpful.
>
>
>
> Thanks so much,
>
> Aju
>
>
>
>
>
> Aju Jugessur Ph.D. IEEE Sr. Member
>
> Director, Colorado Shared Instrumentation
>
> in Nanofabrication and Characterization (COSINC) Facility
>
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>
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> Science*
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>
> E-mail: aju.jugessur at colorado.edu
>
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>
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-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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