[labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring
Nava Ariel-Sternberg
na2661 at columbia.edu
Tue Jan 17 08:48:36 EST 2023
Hi Aju, all,
Our configuration is similar to Cornell's. We have sensors at exhausted
enclosures and we have ambient sensors, located by the tools, where the
users are breathing. The ambient sensors are connected to the fire alarm and
building evacuation is happening when these are triggered. Exhausted
enclosure alarms evacuate the lab only.
Hope this helps,
Nava
Dr. Nava Ariel-Sternberg
Senior Director of CNI Labs
Columbia University
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Aju Jugessur
Sent: Friday, January 13, 2023 12:48 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring
Hi all,
We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and
Silane. The exhausts from the pumps are connected to a scrubber and ph
neutralization/acid waste system.
I am reaching out to get some advice on the specific locations of the
Honeywell Midas sensors that we use, to detect any gas leak at the etchers
and toxic gas monitoring system. We have sensors at the gas cabinets and
ambient sensors at the tools.
However, there seems to be a disagreement between our design team and our
EHS unit. The design team recommends having the sensors in the gas pods,
where the leaks are most likely to occur. EHS would like to have the ambient
sensors at the tools, in the breathing zone areas. As per local code
requirements, sensors in the gas pods satisfies the safety requirements.
I would like to know what your set-up of the sensor locations for similar
instruments is that you may have in your facility.
Any insights based on experience will be super helpful.
Thanks so much,
Aju
Aju Jugessur Ph.D. IEEE Sr. Member
Director, Colorado Shared Instrumentation
in Nanofabrication and Characterization (COSINC) Facility
Member of Inclusive Culture Council (ICC)
University of Colorado Boulder | College of Engineering & Applied Science
4001 Discovery Drive, N360G SEEC | Boulder, CO 80303| P: 303.735.5019
E-mail: <mailto:aju.jugessur at colorado.edu> aju.jugessur at colorado.edu
Personal Zoom link: https://cuboulder.zoom.us/my/
<https://cuboulder.zoom.us/my/ajugessur> ajugessur
www.colorado.edu/facility/cosinc <http://www.colorado.edu/facility/cosinc>
(MBA candidate, CU, Class of 2023)
Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever
(CliftonStrengths)
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20230117/b9a5d21e/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.png
Type: image/png
Size: 6301 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20230117/b9a5d21e/attachment.png>
More information about the labnetwork
mailing list