[labnetwork] third party companies for servicing PlasmaTherm DRIE systems

[Football]

Dear all,


We are having trouble getting PlasmaTherm to respond to our questions and
service quote. Wanted to ask if you know of any third party companies that
work on PlasmaTherm systems, specifically their DRIE tool?


Thanks for any suggestions!


*Fubo Rao, Ph.D.,*

*Nanofabrication Cleanroom Manager,*

*Center for Nanoscale Materials,*

*Argonne National Laboratory*

*9700 S. Cass Ave, Lemont, IL 60439*

*Phone: 630-252-5708*
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