[labnetwork] TMAH alternatives

[Hathaway, Malcolm R]

Hello Labnetworkers,

Has anyone tried one of the TMAH substitutes that have become available?

How do they work?  Are your users satisfied with their results?

For background, TMAH (tetramethylammonium hydroxide) is widely used in commercial resist developers (3%) and for HSQ developing (25%).  In its 25% concentration, TMAH is a potent contact neurotoxin, which is fatal roughly 75% of the time, for exposures greater than 7.5% of body area.  Nasty stuff.

Several companies now have safer alternatives available, which we'd like to try out, such as:

 Envure 3330 (Sachem Chemical),

E-Grade THEMAH SLM ((hydroxyethyl) methylammonium hydroxide, from Huntsman Chemical), and

Novo-safe SE-33 (ethyl tri-methy ammonium hydroxide from Transene).

We are particularly interested in using one of these as an HSQ developer, so we can do away with 25% TMAH.

Any experiences, good or bad, will be most welcome.

Thanks,


Mac Hathaway
Senior Process and Systems Engineer
Harvard Center for Nanoscale Systems
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