[labnetwork] Mask plate vendors?

[Price, Aimee]

Hi Nava,
When we used to fab our own masks I purchased directly from Hoya.  Information Technology - HOYA Corporation<https://www.hoya.com/en/business/informationtechnology/>  I’m not sure if he is still there but Mark Jee was terrific to work with, JEE Mark mark.jee at hoya.com<mailto:mark.jee at hoya.com>.

I have a stock of EBL resist coated 4” and 5” mask blanks that are just sitting on the shelf. The 5” blanks are quartz with Cr and the AR coating, plus ZEP EBL resist.  We have successfully removed the resist and re-coated for MLA 150 exposure.  The 4” are similar but the resist is the old EBR9.  I’m not sure we have experience re-using these, but we do have them on hand.  If you are stuck and either of these sizes are useful to you, contact me directly.  We’d be happy to work something out.

Best,
Aimee

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nava Ariel-Sternberg
Sent: Friday, March 3, 2023 11:20 AM
To: 'Fab Network' <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Mask plate vendors?

Happy Friday everyone! Our litho mask plates’ order from Tellic is seriously delayed and we are running low on masks. We are searching for alternative vendors, any recommendations would be greatly appreciated. Thanks,Nava Dr. Nava Ariel-SternbergSenior

Happy Friday everyone!
Our litho mask plates’ order from Tellic is seriously delayed and we are running low on masks.
We are searching for alternative vendors, any recommendations would be greatly appreciated.
Thanks,
Nava

Dr. Nava Ariel-Sternberg
Senior Director of CNI Labs
Columbia University
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600


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