[labnetwork] High temperature oxidation/anneal furnaces
Jorg Scholvin
scholvin at mit.edu
Fri May 5 16:24:31 EDT 2023
Hi Labnetwork:
MIT.nano is looking to explore oxidation/anneal capabilities at 1500C (possibly even up to 2000C) for 6 and 8" wafers - to go beyond our regular 1100C furnaces range.
Does anyone have similar systems in their lab that they can recommend? Both small batch or single wafer would be fine.
Thanks!
-Jorg
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