[labnetwork] Questions about MgO and MgF2 Processing

[Lowell, Peter J. (Fed)]

Hi Labnetwork,

We have a user that is interested in processing MgO and MgF2 substrates and we have no experience processing these materials.  The user is specifically interested in performing fluorine and oxygen plasma etches, e-beam evaporating, and sputter depositing on these substrates.  We are concerned if these processes will contaminate a chamber that is used for general processing.  Is there anyone out there that has any experience that would be willing to discuss with me?

Thanks a bunch!

Peter

--------------------------------------------------------------
Peter Lowell, Ph.D.
Senior Process Engineer
Boulder Micro-Fabrication Facility
National Institute of Standards and Technology
325 Broadway MS 680.09
Boulder, CO 80305
Phone: (303) 497-6934

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