[labnetwork] [EXTERNAL] companies that refill ALD precursor cylinders

[Bruce Tolleson]

I have an Ultratech (VEECO) Savannah 200 and I get my cylinders cleaned and refilled at STREM CHEMICAL. Contact Info:
Janet Scalese | Customer Service Supervisor
P: +19784991634 | ascensusspecialties.com<https://www.ascensusspecialties.com/company> | strem.com<https://www.strem.com/>


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of SOULET, Axel
Sent: Thursday, October 19, 2023 4:38 AM
To: Nabeel Aslam <nabeel.aslam at kaust.edu.sa>
Cc: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] [EXTERNAL] companies that refill ALD precursor cylinders

Hello
Have you tried Air Liquide ? What kind of precursor would you need ?
Perhaps I can help youas I used to develop the ALD business & portfoliio of Air Liquide in this field years ago.
I do not think you will find anybody refilling a cylinder which is not his, as it involves purity guarantee which cannot be assessed without cleaning again your cylinder and analyzing it which can be pricey as the organization is not set this way.
Let me know if we can help.
Regards
Axel

On Thu, Oct 19, 2023 at 2:05 AM Nabeel Aslam <nabeel.aslam at kaust.edu.sa<mailto:nabeel.aslam at kaust.edu.sa>> wrote:
Hi Kyle,

We had same issue but then we came to know that JACs( Japan advance chemicals) provide the service to refill the used ALD bubblers.
They will charge for cleaning, Maintenace and refilling of precursor of used bubbler.
Regards,
Nabeel

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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of Kyle Keenan <kckeenan at seas.upenn.edu<mailto:kckeenan at seas.upenn.edu>>
Sent: Wednesday, October 18, 2023 7:56:22 PM
To: Lab Network (labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>) <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [EXTERNAL] [labnetwork] companies that refill ALD precursor cylinders

Hi Folks,

Can anyone recommend a company that will refill used ALD precursor bottles with the original chemical? We normally use Strem for this purpose, but I was just informed that they have put a stop of indeterminate length to accepting used cylinders from customers, while they review their procedures. It was suggested that I check back in a month to see where things stand, but we cannot afford to wait that long, and I would really like to avoid that extra thousands of dollars it would cost to have to buy replacement precursors in new bottles (which have a nearly one month lead-time through Strem).

I look forward to your replies.

Thank you,
--
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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--

Axel Soulet, PhD / +33 (0)6 08 85 83 86 / Air Liquide / France
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