[labnetwork] companies that refill ALD precursor cylinders

[Martin, Michael]

Hi Kyle,
   One thing you might consider is DIY.  We reached out to our chemistry department and found someone with a positive pressure N2 glove box and ended up filling our TDMAS (Tris(dimethylamino)silane) ourselves.  It was a little bit nerve-wracking but saved soooo much money.
  P.s. should anyone need ALD as a service, our tool is definitely underutilized.  It is remote PEALD with SiO2, Al2O3, ZnO, and TiO2

Regards,
  Michael
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Kyle Keenan <kckeenan at seas.upenn.edu>
Sent: Monday, October 23, 2023 1:30 PM
To: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] companies that refill ALD precursor cylinders


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Hello All,

A number of you have responded to my email, which is greatly appreciated. however, many of you have suggested Strem, the very company with which I am having an issue, as you will see if you reread the original message. If you have any suggestions other than Strem, I would certainly like that information.

Thank you, once again.
Kyle

On Wed, Oct 18, 2023 at 12:56 PM Kyle Keenan <kckeenan at seas.upenn.edu<mailto:kckeenan at seas.upenn.edu>> wrote:
Hi Folks,

Can anyone recommend a company that will refill used ALD precursor bottles with the original chemical? We normally use Strem for this purpose, but I was just informed that they have put a stop of indeterminate length to accepting used cylinders from customers, while they review their procedures. It was suggested that I check back in a month to see where things stand, but we cannot afford to wait that long, and I would really like to avoid that extra thousands of dollars it would cost to have to buy replacement precursors in new bottles (which have a nearly one month lead-time through Strem).

I look forward to your replies.

Thank you,
--
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925


--
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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