[labnetwork] [EXTERNAL] March Plasma Etcher CS 1701

[Alex Dixon]

Hi Mark, I believe Glow Research (https://www.glowresearch.org/plasma-systems-parts-and-service/) will do work on March Plasma systems

-Alex

[https://www.glowresearch.org/media/IMG_7920-150x150.jpg]<https://www.glowresearch.org/plasma-systems-parts-and-service/>
Plasma Systems Parts and Service - Glow Research<https://www.glowresearch.org/plasma-systems-parts-and-service/>
Plasma systems parts and service.  Glow Research provides the parts and equipment necessary to maintain our plasma systems, and other systems.
www.glowresearch.org


__________________________________________________________


Alex Dixon, Ph.D. (He/Him)
Lab Manager
Nanofabrication and Thin Film Deposition
Shared Instrument Facility
Colorado School of Mines

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Mark Hofheins <mhofheins at unm.edu>
Sent: Wednesday, October 25, 2023 8:54 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [EXTERNAL] [labnetwork] March Plasma Etcher CS 1701

CAUTION: This email originated from outside of the Colorado School of Mines organization. Do not click on links or open attachments unless you recognize the sender and know the content is safe.

Good morning All,
We have a March etcher CS 1701 that has stopped working.
The system will go through the program and start gas flowing and then the RF signal shows that the RF generator is commanded but does not generate RF.
 After a 45 second times out, the RF indicator shuts off. The RF generator RF light does not come on. After some research, we found that a 5 - 15v signal is not being transmitted to the RF generator.  We have not been able to locate anyone who repairs these. We are reaching out to see if anyone has information or possibly a used system that is available.
Nordstrom March was contacted and does not support repairing these systems. {Norstrom also acquired Sitik}
We would greatly appreciate any inputs.

Best regards,

Mark Hofheins

Knowledge comes from experience.

Experience comes from mistakes.

 Mistakes happen because you are trying something new.

MH


mhofheins at unm.edu<mailto:mhofheins at unm.edu>

Cell  505-259-9278

Office 505-272-7506



Micro Electronics Technician

Manufacturing Engineering/

School of Engineering

University of New Mexico MTTC

800 Bradbury S.E.  Suit 169

Albuquerque, New Mexico

87106-4346

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20231025/9fe4ce80/attachment.html>