[labnetwork] best practices for PZT sputtering

[Nadia Pervez]

Hi everyone,

We are looking at a sputtering system for complex oxides and one of the
materials of interest is PZT. Does anyone have any tips for best practices
to avoid process contamination, and safe maintenance procedures for the
chamber?

Thanks,
Nadia

-- 
Nadia Pervez, PhD
Cleanroom Research Scientist
Shared Equipment Authority (SEA)
Rice University
6100 Main St, MS-686
Houston, TX 77005
np65 at rice.edu
Office: SST-017, 713-348-5069
Cell: 805-284-1193
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