[labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

[Richelson, Tucson]

Hello everyone,

I want to follow up on this. Lesker reached out to me. It turns out that I was confused about the terminology.

  *   A backing plate is for brittle materials.
  *   A "keeper" is for targets to be magnetically secured to the gun.
Lesker sells them separately and we have a fabrication shop on campus that could easily drill and tap it to the target.

I want to thank everyone who reached out to me. Thank you! I feel very welcomed by this community.



[cid:image002.png at 01D9E177.ADE564B0][cid:image003.png at 01D9E177.ADE564B0]


Best,
Tucson Richelson
-------------------------------------------------------------------------
Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)
University of Illinois
Rm 2118, MC-249
208 North Wright St. Urbana, IL 61801
Office: +1 (217) 244-5138
Web: http://mntl.illinois.edu/
Schedule training: https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com
Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Richelson, Tucson
Sent: Tuesday, August 15, 2023 11:16 AM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

Hello all,

I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn't have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).

I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.

Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?


[cid:image004.png at 01D9E177.ADE564B0]



Best,

Tucson Richelson

-------------------------------------------------------------------------

Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)

University of Illinois
Rm 2118, MC-249

208 North Wright St. Urbana, IL 61801

Office: +1 (217) 244-5138

Web: http://mntl.illinois.edu/

Schedule training: https://book.ms/b/Training2@uillinoisedu.onmicrosoft.com<https://urldefense.com/v3/__https:/book.ms/b/Training2@uillinoisedu.onmicrosoft.com__;!!DZ3fjg!_LLqVJ2GQX_xjtaAQ76q62PiVPrPzRozUUESYFHQgBfuYP908Gw1F2gmRO2r9L4MiY8_V_UcMhR-VUdS8p7Zgg$>

Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
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