From michael.call at maine.edu Thu Feb 1 11:05:07 2024 From: michael.call at maine.edu (Michael Call) Date: Thu, 1 Feb 2024 11:05:07 -0500 Subject: [labnetwork] Malvern Zetasizer 3000 software Message-ID: We experienced a computer malfunction on our Malvern Zetasizer 3000 and lost the PCS software to operate the machine. Just wondering if anyone has software for this vintage system. -- Mike Call CORE Facilities Manager University of Maine Coordinated Operating Research Entities Cleanroom/TASC ESRB Barrows Hall Room 294 207-581-3382 [image: image.png] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image.png Type: image/png Size: 53624 bytes Desc: not available URL: From schweig at umich.edu Sat Feb 3 16:53:49 2024 From: schweig at umich.edu (Dennis Schweiger) Date: Sat, 3 Feb 2024 16:53:49 -0500 Subject: [labnetwork] job posting for Facilities person Message-ID: Hello all, The University of Michigan Lurie Nanofabrication Facility is looking to add to our facilities group, someone interested in a long term career at a premier University and semiconductor processing facility. The link below, as well as the description, highlight some of the details that would be encompassed by this new hire position. Are you adept at dealing with facility systems, proficient in equipment installation, and skilled at problem-solving? Do you have a desire to contribute to a high-tech research facility from behind the scenes? Join the Lurie Nanofabrication Facility and our Infrastructure Group: see https://careers.umich.edu/job_detail/243339/senior-engineer-research-lnf-infrastructure for all details and to apply! Do you know anyone who might be interested? Please spread the word! *Responsibilities* You will report to the LNF Director of Infrastructure and will receive LNF-specific training to become primarily responsible for the following aspects of the LNF infrastructure: - *Toxic gas monitoring system* and safety infrastructure - *Gas delivery* (both Hazardous Production Material products and inerts) - *Liquid Nitrogen* (LN2) delivery systems - Infrastructure *interface with U-M building* support services, including ultrapure (DI) water, HVAC environmental controls, process chilled water, acid waste neutralization, scrubbed and general exhaust systems - *Power distribution* Thank you, Dennis Schweiger Facilities University of Michigan/LNF 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? -------------- next part -------------- An HTML attachment was scrubbed... URL: From romana at princeton.edu Mon Feb 5 09:07:45 2024 From: romana at princeton.edu (Roman Akhmechet) Date: Mon, 5 Feb 2024 14:07:45 +0000 Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher Message-ID: Hello, Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I'm wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you. Roman Akhmechet Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From mjohnso6 at tulane.edu Mon Feb 5 11:45:55 2024 From: mjohnso6 at tulane.edu (Johnson, Michael W) Date: Mon, 5 Feb 2024 16:45:55 +0000 Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher In-Reply-To: References: Message-ID: I don't have experience with that exact turbo. Does the current ramp when trying to start? If no, I suspect a bad controller. If yes and no rotation, no increase in reported speed, maybe a stuck or crashed rotor in the pump. -M. ________________________________ From: labnetwork on behalf of Roman Akhmechet Sent: Monday, February 5, 2024 8:07 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher External Sender. Be aware of links, attachments and requests. Hello, Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I?m wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you. Roman Akhmechet Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From mjohnso6 at tulane.edu Mon Feb 5 11:48:40 2024 From: mjohnso6 at tulane.edu (Johnson, Michael W) Date: Mon, 5 Feb 2024 16:48:40 +0000 Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher In-Reply-To: References: Message-ID: There are probably others but you can try provac.com They rebuild. ________________________________ From: Johnson, Michael W Sent: Monday, February 5, 2024 10:45 AM To: Roman Akhmechet ; labnetwork at mtl.mit.edu Subject: Re: Turbo pump PlasmaTherm 720 etcher I don't have experience with that exact turbo. Does the current ramp when trying to start? If no, I suspect a bad controller. If yes and no rotation, no increase in reported speed, maybe a stuck or crashed rotor in the pump. -M. ________________________________ From: labnetwork on behalf of Roman Akhmechet Sent: Monday, February 5, 2024 8:07 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher External Sender. Be aware of links, attachments and requests. Hello, Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I?m wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you. Roman Akhmechet Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From mweiler at andrew.cmu.edu Mon Feb 5 11:49:57 2024 From: mweiler at andrew.cmu.edu (Mark Weiler) Date: Mon, 5 Feb 2024 11:49:57 -0500 Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher In-Reply-To: References: Message-ID: <409A9F0C-6AD3-4B8F-BD20-5AD16C945511@andrew.cmu.edu> Hi Roman? You can reach out to Scott? Scott Crabtree UHV Tech Services Inc. 603-284-6306 www.UHVTS.com ? ? ? Best, Mark ;Mark Weiler Manager, Equipment & Facilities Bertucci Nanotechnology Laboratory Eden Hall Nanofabrication Cleanroom Carnegie Mellon University P: 412-268-2471 F: 412-268-3497 http://www.nanofab.ece.cmu.edu ? ...?If we have to have a choice between being dead and pitied, and being alive with a bad image, we?d rather be alive and have the bad image.? ? Golda Meir > On Feb 5, 2024, at 9:07?AM, Roman Akhmechet wrote: > > Hello, > Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I?m wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you. > > Roman Akhmechet > Princeton University > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: certified-service-provider.png Type: image/png Size: 89530 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: logo_iso_17025.jpeg Type: image/jpeg Size: 51621 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: A2LA-Accredited-Symbol_sizedfinal.jpg Type: image/jpeg Size: 3698 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Screenshot 2023-10-19 at 12.17.20 PM.png Type: image/png Size: 12482 bytes Desc: not available URL: From philipp.altpeter at lmu.de Mon Feb 5 11:52:03 2024 From: philipp.altpeter at lmu.de (Philipp Altpeter) Date: Mon, 5 Feb 2024 17:52:03 +0100 (GMT+01:00) Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher In-Reply-To: References: Message-ID: Dear Roman, If you unmount the turbopump from the chamber and rotate the body of the pump, the rotors are not suppose to follow this movement. Otherwise there is something wrong with the bearings. If the pump looks OK mechanically, then the power supply is probably broken. There is not much to repair, and the manufacturer would probably either sell a new power supply or a refurbished power supply in return of the broken one. Hope it helps. Philipp -------------- next part -------------- An HTML attachment was scrubbed... URL: From steve.lunn2 at yahoo.com Mon Feb 5 12:04:58 2024 From: steve.lunn2 at yahoo.com (Steve Lunn) Date: Mon, 5 Feb 2024 17:04:58 +0000 (UTC) Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher In-Reply-To: References: Message-ID: <1214416159.4409305.1707152698981@mail.yahoo.com> Hi Roman, The folks at Turbo Vacuum in Florida have always done good work for us.? Scott Walden is the guy I usually work with.? ?s.walden at turbovacuum.com Contact Turbo Vacuum | | | | | | | | | | | Contact Turbo Vacuum Contact Turbo Vacuum | | | Cheers, Steve Lunn +1 408 221 1465 (Cell) On Monday, February 5, 2024 at 08:39:42 AM PST, Roman Akhmechet wrote: Hello, Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I?m wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you. ? Roman Akhmechet Princeton University _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From jks7 at buffalo.edu Mon Feb 5 12:06:18 2024 From: jks7 at buffalo.edu (Jeffrey Salzmann) Date: Mon, 5 Feb 2024 17:06:18 +0000 Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher In-Reply-To: References: Message-ID: Roman, I've used Massvac a few times and I've been quite happy with their work. You might want to have them send you a shipping box. Regards, Jeff Jeff Salzmann Assistant Professor of Research Cleanroom Manager, Shared Instrumentation Laboratories School of Engineering and Applied Sciences University at Buffalo 114A Davis Hall Buffalo, NY 14260 From: labnetwork On Behalf Of Roman Akhmechet Sent: Monday, February 5, 2024 9:08 AM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher You don't often get email from romana at princeton.edu. Learn why this is important Hello, Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I'm wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you. Roman Akhmechet Princeton University -------------- next part -------------- An HTML attachment was scrubbed... URL: From kckeenan at seas.upenn.edu Mon Feb 5 13:37:42 2024 From: kckeenan at seas.upenn.edu (Kyle Keenan) Date: Mon, 5 Feb 2024 13:37:42 -0500 Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher In-Reply-To: References: Message-ID: https://www.provac.com/ On Mon, Feb 5, 2024 at 11:41?AM Roman Akhmechet wrote: > Hello, > > Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has > stopped spinning. The controller for the pump seems to be communicating, > but the load stays low when trying to start the pump for about 10 minutes > before going into failure, probably due to a time out. I?m wondering if > anyone has a recommended vendor to repair turbo pumps, or advice on what > other issue may be causing this. Thank you. > > > > Roman Akhmechet > > Princeton University > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!Su1J42XSekGt16-kXtcY4i9U0BWrJyez5doLmoTc1kcoI4utc5DSLZg_Dn1gmyWLvoWA78Q--31etBAqAd34HUEv$ > -- Kyle Keenan Senior Manager - Laboratory Operations Quattrone Nanofabrication Facility University of Pennsylvania P: 215-898-7560 F: 215-573-4925 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rrivers at berkeley.edu Mon Feb 5 21:22:49 2024 From: rrivers at berkeley.edu (Ryan Rivers) Date: Mon, 5 Feb 2024 18:22:49 -0800 Subject: [labnetwork] Turbo pump PlasmaTherm 720 etcher In-Reply-To: References: Message-ID: Hi All, I'll put in a plug for our local repair shop in the SF Bay Area. Don't be fooled by the barebones website, Alex has been resolving our turbo repairs for years. http://www.sertecturboinc.com/ -Ryan On Mon, Feb 5, 2024 at 1:49?PM Philipp Altpeter wrote: > Dear Roman, > > If you unmount the turbopump from the chamber and rotate the body of the > pump, the rotors are not suppose to follow this movement. Otherwise there > is something wrong with the bearings. If the pump looks OK mechanically, > then the power supply is probably broken. There is not much to repair, and > the manufacturer would probably either sell a new power supply or a > refurbished power supply in return of the broken one. > > Hope it helps. > > Philipp > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vsoares at inesc-mn.pt Tue Feb 6 10:00:42 2024 From: vsoares at inesc-mn.pt (=?iso-8859-1?Q?Virg=EDnia_Soares?=) Date: Tue, 6 Feb 2024 15:00:42 -0000 Subject: [labnetwork] in search of handles for quartz wafer boats Message-ID: <012601da590d$41908c50$c4b1a4f0$@inesc-mn.pt> Dear all, We have recently bought an asher that comes with a quartz boat for 8? wafers, but the handle we have is too small because it was made for 6 inch wafer boats. I have found out it is called a pistol grip handler but I don?t seem to find suppliers that would have a handler for 8? wafers. Would anybody happen to know a supplier? Thank you in advance, Melhores Cumprimentos/Best Regards Virginia Soares INESC-MN Rua Alves Redol,9 1000-029 Lisboa Portugal www.inesc-mn.pt -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 9655 bytes Desc: not available URL: From dgajula3 at gatech.edu Wed Feb 7 12:52:16 2024 From: dgajula3 at gatech.edu (GaJula, Durga R) Date: Wed, 7 Feb 2024 17:52:16 +0000 Subject: [labnetwork] Invitation to NNCI Etch Symposium 2024 @ Georgia Tech, Atlanta Message-ID: Dear all, We are pleased to extend a formal invitation to you for the prestigious 2024 NNCI Etch Symposium, an event dedicated to exploring the forefront of nanotechnology and etching. Your esteemed presence at this symposium will contribute to the richness of discussions and insights shared by leading experts in the field. 2024 NNCI Etch Symposium Date: April 24th to 26th, 2024 Location: Marcus Nanotechnology building, Georgia Tech, Atlanta, GA Title: Advances in Micro ? & Nanoscale Patterning of Strategic and Emerging Materials for Electronic, Photonic, Quantum, & MEMS Devices [cid:72376aa2-ee52-42a1-8b76-f8dc21f1de92] The symposium promises an engaging agenda, featuring invited talks, vendor presentations, panel discussions, and interactive sessions that will delve into the latest advancements and innovations in nanoscale fabrication. It is an excellent opportunity to connect with fellow professionals, researchers, and industry leaders. To view the detailed schedule and register for the event, please visit our official symposium website: NNCI Etch Symposium. Your expertise and perspectives will undoubtedly enrich the symposium discussions, making this event a valuable experience for all participants. If you have any inquiries or require further information, please do not hesitate to contact us. We sincerely hope you will honor us with your presence at the NNCI Etch Symposium 2024. Your participation will contribute to the success of this gathering, and we look forward to welcoming you. Organizing Committee Durga Gajula, Georgia Tech Ling Xie, Harvard University Lavendra Mandyam, Stanford University Vince Genova, Cornell University (retired) [cid:a0dac159-71c5-47da-85ef-bd3b525dad84] Scan to Register ------------- Best regards Durga Gajula, Ph.D. Research Engineer II The Institute for Electronics and Nanotechnology (IEN) Georgia Institute of Technology 345 Ferst Drive, Atlanta, GA, 30332 (404) 894-6556| dgajula3 at gatech.edu Google Scholar/Linkedin IEN HOME/Cleanrooms -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Outlook-4b3mgglc.png Type: image/png Size: 50177 bytes Desc: Outlook-4b3mgglc.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Outlook-xv1uj42h.png Type: image/png Size: 27886 bytes Desc: Outlook-xv1uj42h.png URL: From mjohnso6 at tulane.edu Thu Feb 8 02:30:51 2024 From: mjohnso6 at tulane.edu (Johnson, Michael W) Date: Thu, 8 Feb 2024 07:30:51 +0000 Subject: [labnetwork] TEM service contracts Message-ID: Does anyone have some statistical information on the costs of TEM annual service contracts? I ask because for us, this is the largest cost service contract of any instrument that we have by far. I assume very few universities are capable of keeping these instruments up and running to spec without a service contract. Am I wrong? Is anyone capable of keeping these costs below $100k per instrument per year? Anybody below $50k per year? If so, I would be very interested to know which instrument manufactures and what strategies are employed to achieve this. We have FEI. -Michael. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jerry.hunter at wisc.edu Thu Feb 8 10:21:48 2024 From: jerry.hunter at wisc.edu (Jerry Hunter) Date: Thu, 8 Feb 2024 15:21:48 +0000 Subject: [labnetwork] TEM service contracts In-Reply-To: References: Message-ID: Keeping a new instrument going and up to spec without a service contract is almost impossible. You don?t get enough information from the vendor to fix it (schematics, etc.) and you don?t have as much access to parts. Next to staff, service contracts are the biggest expense here. As far as keeping it below $50k, it depends on the instrument. If it?s a 15+ year old instrument, no field emission, no correction, etc then it is less than $50k. If it?s a newer instrument, corrected, with EDS/EELS, field emission, direct electron detector, etc., it will easily be over $100k ($150k+)/year. We look at usage and the effect that extended downtime will have on research to determine if we carry a service contract. If you don?t carry a service contract, then you would have to pay demand service to get a repair, which is both expensive and may require a long wait because you will be behind all service contract instruments. If the repair is very expensive and the instrument is lightly used, then we ask any PI users if they are willing to pay for the repair and if the answer is no, we shut it down and sell it. Jerry Hunter Director, Wisconsin Centers for Nanoscale Technology From: labnetwork on behalf of Johnson, Michael W Date: Thursday, February 8, 2024 at 7:56 AM To: Fab Network Subject: [labnetwork] TEM service contracts Does anyone have some statistical information on the costs of TEM annual service contracts? I ask because for us, this is the largest cost service contract of any instrument that we have by far. I assume very few universities are capable of keeping these instruments up and running to spec without a service contract. Am I wrong? Is anyone capable of keeping these costs below $100k per instrument per year? Anybody below $50k per year? If so, I would be very interested to know which instrument manufactures and what strategies are employed to achieve this. We have FEI. -Michael. -------------- next part -------------- An HTML attachment was scrubbed... URL: From bgila at ufl.edu Thu Feb 8 10:53:46 2024 From: bgila at ufl.edu (Gila,Brent P) Date: Thu, 8 Feb 2024 10:53:46 -0500 Subject: [labnetwork] TEM service contracts In-Reply-To: References: Message-ID: <87ca28a0-d63c-41ea-a581-66b75faeac1a@ufl.edu> Yup, they are expensive.? We have 3 TEMs, 2 FIBs, 4 SEMs, EPMA, ..... all on service contracts.? We see a rough rule of thumb across the spectrum of vendors (FEI, JEOL, Hitachi, Tescan, Cameca) that the service contract is about 10% of the new purchase price. We have used a 3rd party like Specialty Underwriters to "insure" a few of our instruments and if they are able to provide a contract, they will provide a 15-17% reduction in contract.? It is some savings, but not the huge savings everyone is looking for.? All it takes is one mid column replacement ($64k for the parts, not including labor) to realize how much the service contracts can save you on a big repair.? We have been stressing to our administration that the 10yr cost of ownership needs to be considered when making capital equipment purchases and an increase in annual budget to cover the service contract after the warranty must be factored into the purchase. The 3rd party insurance is currently the only alternative we know to shed some expense.? Track your instrument expenses closely and ask for a detailed breakdown of the service received.? You will find a few instruments are more robust than others and on those you can move to a 3rd party insurer or completely forgo the service contract and pay by repair. Or start playing PowerBall... and hope for the best. Best Regards, Brent -- Brent P. Gila, PhD. Associate Director, Research Service Centers University of Florida 1041 Center Drive Gainesville, Florida 32611 Tel:352-273-2245,? Fax:352-846-2877 email: bgila at ufl.edu On 2/8/2024 2:30 AM, Johnson, Michael W wrote: > *[External Email]* > > Does anyone have some statistical information on the costs of TEM > annual service contracts? > I ask because for us, this is the largest cost service contract of any > instrument that we have by far. > > I assume very few universities are capable of keeping these > instruments up and running to spec without a service contract. Am I wrong? > > Is anyone capable of keeping these costs below $100k per instrument > per year? > > Anybody below $50k per year? > > If so, I would be very interested to know which instrument > manufactures and what strategies are employed to achieve this. We have > FEI. > > -Michael. > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From codreanu at udel.edu Tue Feb 20 10:39:12 2024 From: codreanu at udel.edu (Iulian Codreanu) Date: Tue, 20 Feb 2024 10:39:12 -0500 Subject: [labnetwork] MJB-3 service Message-ID: <4a8f3f21-82b2-4e20-be26-c567ee72ac9b@udel.edu> Hello, We are looking for an entity that can service an MJB-3 at University of Delaware. Thank you for your help, Iulian -- iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https://udnf.udel.edu From nsk0248 at umd.edu Wed Feb 21 11:31:39 2024 From: nsk0248 at umd.edu (Nam Soo Kim) Date: Wed, 21 Feb 2024 11:31:39 -0500 Subject: [labnetwork] MJB-3 service In-Reply-To: <4a8f3f21-82b2-4e20-be26-c567ee72ac9b@udel.edu> References: <4a8f3f21-82b2-4e20-be26-c567ee72ac9b@udel.edu> Message-ID: Hi Iulian. We have used Align Tech, LLC to service our MJB3s here at UMD. The point of contact is Mark Anderson, markanderson150 at gmail.com I was also contacted by Classone Equipment. They said they have parts and can service MJB3 contact aligners. While we haven't used them to service our MJB3 system, we have bought a couple of equipment with them and are very satisfied. Vanessa Siamomua is the point of contact for UMD, vsiamomua at classoneequipment.com I hope this helps. Nam On Tue, Feb 20, 2024 at 3:35?PM Iulian Codreanu wrote: > Hello, > > We are looking for an entity that can service an MJB-3 at University of > Delaware. > > Thank you for your help, > > Iulian > > -- > iulian Codreanu, Ph.D. > Director, Nanofabrication Facility > University of Delaware > Harker ISE Lab, Room 163 > 221 Academy Street > Newark, DE 19716 > 302-831-2784 > https://udnf.udel.edu > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Wed Feb 21 16:59:09 2024 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Wed, 21 Feb 2024 16:59:09 -0500 Subject: [labnetwork] MJB-3 service In-Reply-To: References: <4a8f3f21-82b2-4e20-be26-c567ee72ac9b@udel.edu> Message-ID: Hi Iulian, I second Mark Anderson at Align Tech. We have not used him for the MJB3, but he has serviced our MA6 on several occasions, and we have been very happy with his work. Best Regards, Matt On Wed, Feb 21, 2024 at 4:01?PM Nam Soo Kim wrote: > Hi Iulian. > We have used Align Tech, LLC to service our MJB3s here at UMD. > The point of contact is Mark Anderson, markanderson150 at gmail.com > > I was also contacted by Classone Equipment. > They said they have parts and can service MJB3 contact aligners. > While we haven't used them to service our MJB3 system, we have bought a > couple of equipment with them and are very satisfied. > Vanessa Siamomua is the point of contact for UMD, > vsiamomua at classoneequipment.com > > I hope this helps. > Nam > > On Tue, Feb 20, 2024 at 3:35?PM Iulian Codreanu wrote: > >> Hello, >> >> We are looking for an entity that can service an MJB-3 at University of >> Delaware. >> >> Thank you for your help, >> >> Iulian >> >> -- >> iulian Codreanu, Ph.D. >> Director, Nanofabrication Facility >> University of Delaware >> Harker ISE Lab, Room 163 >> 221 Academy Street >> Newark, DE 19716 >> 302-831-2784 >> https://udnf.udel.edu >> >> >> _______________________________________________ >> labnetwork mailing list >> labnetwork at mtl.mit.edu >> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork >> > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- -- Matthew T. Moneck, Ph.D Executive Director, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From Justin_Moreau at uml.edu Thu Feb 22 08:10:20 2024 From: Justin_Moreau at uml.edu (Moreau, Justin) Date: Thu, 22 Feb 2024 13:10:20 +0000 Subject: [labnetwork] MJB-3 service In-Reply-To: References: <4a8f3f21-82b2-4e20-be26-c567ee72ac9b@udel.edu> Message-ID: HI lulian We also use Mark Anderson from Align Tech for our MA6. He has been great to work with. [University of Massachusetts Lowell] Justin Moreau Director, Nanofabrication Core CORE RESEARCH FACILITIES ETIC E: Justin_Moreau at uml.edu T: 978-934-3615 M: 978-337-8148 [cid:image002.jpg at 01DA6566.93601C70] From: labnetwork On Behalf Of Matthew Moneck Sent: Wednesday, February 21, 2024 4:59 PM To: Nam Soo Kim Cc: Fab Network Subject: Re: [labnetwork] MJB-3 service Hi Iulian, I second Mark Anderson at Align Tech. We have not used him for the MJB3, but he has serviced our MA6 on several occasions, and we have been very happy with his work. Best Regards, Matt On Wed, Feb 21, 2024 at 4:?01 PM Nam Soo Kim ZjQcmQRYFpfptBannerStart This Message Is From an External Sender This message came from outside your organization. Report Suspicious ? ZjQcmQRYFpfptBannerEnd Hi iulian, I second Mark Anderson at Align Tech. We have not used him for the MJB3, but he has serviced our MA6 on several occasions, and we have been very happy with his work. Best Regards, Matt On Wed, Feb 21, 2024 at 4:01?PM Nam Soo Kim > wrote: Hi Iulian. We have used Align Tech, LLC to service our MJB3s here at UMD. The point of contact is Mark Anderson, markanderson150 at gmail.com I was also contacted by Classone Equipment. They said they have parts and can service MJB3 contact aligners. While we haven't used them to service our MJB3 system, we have bought a couple of equipment with them and are very satisfied. Vanessa Siamomua is the point of contact for UMD, vsiamomua at classoneequipment.com I hope this helps. Nam On Tue, Feb 20, 2024 at 3:35?PM Iulian Codreanu > wrote: Hello, We are looking for an entity that can service an MJB-3 at University of Delaware. Thank you for your help, Iulian -- iulian Codreanu, Ph.D. Director, Nanofabrication Facility University of Delaware Harker ISE Lab, Room 163 221 Academy Street Newark, DE 19716 302-831-2784 https://udnf.udel.edu _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- -- Matthew T. Moneck, Ph.D Executive Director, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.png Type: image/png Size: 2650 bytes Desc: image001.png URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 3088 bytes Desc: image002.jpg URL: From R.White at tufts.edu Thu Feb 22 14:56:21 2024 From: R.White at tufts.edu (White, Robert D.) Date: Thu, 22 Feb 2024 19:56:21 +0000 Subject: [labnetwork] MUMPS? Message-ID: Labnetwork, I used PolyMUMPS "multi user MEMS process" years ago and need access to a similar multi-user process (polyMUMPS or piezoMUMPS or SOIMUMPS) for a new project ... looks like MEMSCAP no longer exists (at least not in its 2010 form) ... are there similar high-quality, easy to submit, multi-user MEMS fab opportunities out there for very low volume university work? My google searching did not go well ... Thanks! Rob -- Robert White Associate Professor Tufts Mechanical Engineering -------------- next part -------------- An HTML attachment was scrubbed... URL: From karazapp at gmail.com Thu Feb 22 16:05:07 2024 From: karazapp at gmail.com (Kara Zappitelli) Date: Thu, 22 Feb 2024 16:05:07 -0500 Subject: [labnetwork] MUMPS? In-Reply-To: References: Message-ID: Hi Rob, You're in luck! MEMSCAP's MPW processes are alive and well in North Carolina. Science Corporation acquired the facility in December of 2022 and is continuing to provide MPW services to our customer base. Sorry that this wasn't Google-able... we're working on that. Feel free to reach out to me directly, and I'll make sure you get what you need. My email is karaz at science.xyz. Best, Kara Zappitelli, Ph.D. Lead Engineer & Foundry Director Science Corporation - Durham, NC karaz at science.xyz 630-746-2929 On Thu, Feb 22, 2024 at 4:00?PM White, Robert D. wrote: > Labnetwork, > > > > I used PolyMUMPS ?multi user MEMS process? years ago and need access to a > similar multi-user process (polyMUMPS or piezoMUMPS or SOIMUMPS) for a new > project ? looks like MEMSCAP no longer exists (at least not in its 2010 > form) ? are there similar high-quality, easy to submit, multi-user MEMS fab > opportunities out there for very low volume university work? My google > searching did not go well ? > > > > Thanks! > > > > Rob > > -- > > Robert White > > Associate Professor > > Tufts Mechanical Engineering > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- Kara M. Zappitelli, Ph.D. -------------- next part -------------- An HTML attachment was scrubbed... URL: From Mathieu.Gratuze at etsmtl.ca Thu Feb 22 16:08:13 2024 From: Mathieu.Gratuze at etsmtl.ca (Gratuze, Mathieu) Date: Thu, 22 Feb 2024 21:08:13 +0000 Subject: [labnetwork] MUMPS? In-Reply-To: References: Message-ID: Hello, They changed name, now the company is called Science Inc. I've never got the chance to try SOIMUMPs but we fabricated dies using PiezoMUMPs and PolyMUMPs process last year and this year. Their MWP are still available at least through CMC. The full fab schedule is there: https://competitions.cmc.ca/ If you have any questions I would be happy to answer more directly. Best, Mathieu ________________________________ From: labnetwork on behalf of White, Robert D. Sent: Thursday, February 22, 2024 4:02:12 p.m. To: labnetwork at mtl.mit.edu Subject: [labnetwork] MUMPS? Labnetwork, I used PolyMUMPS ?multi user MEMS process? years ago and need access to a similar multi-user process (polyMUMPS or piezoMUMPS or SOIMUMPS) for a new project ? looks like MEMSCAP no longer exists (at least not in its 2010 form) ? are there similar high-quality, easy to submit, multi-user MEMS fab opportunities out there for very low volume university work? My google searching did not go well ? Thanks! Rob -- Robert White Associate Professor Tufts Mechanical Engineering -------------- next part -------------- An HTML attachment was scrubbed... URL: From ovl5064 at psu.edu Thu Feb 22 16:57:13 2024 From: ovl5064 at psu.edu (Lopez, Daniel) Date: Thu, 22 Feb 2024 21:57:13 +0000 Subject: [labnetwork] MUMPS? In-Reply-To: References: Message-ID: Dear Rob, MEMSCAP was bought by Science Corporation. They still offer the same multi user MEMS processes but are not as reliable as before. https://science.xyz/services/foundry/#services Best, Daniel ________________________________ From: labnetwork on behalf of White, Robert D. Sent: Thursday, February 22, 2024 2:56:21 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] MUMPS? You don't often get email from r.white at tufts.edu. Learn why this is important Labnetwork, I used PolyMUMPS ?multi user MEMS process? years ago and need access to a similar multi-user process (polyMUMPS or piezoMUMPS or SOIMUMPS) for a new project ? looks like MEMSCAP no longer exists (at least not in its 2010 form) ? are there similar high-quality, easy to submit, multi-user MEMS fab opportunities out there for very low volume university work? My google searching did not go well ? Thanks! Rob -- Robert White Associate Professor Tufts Mechanical Engineering -------------- next part -------------- An HTML attachment was scrubbed... URL: From ykong.mse at gmail.com Thu Feb 22 17:02:34 2024 From: ykong.mse at gmail.com (Yifan Kong) Date: Thu, 22 Feb 2024 14:02:34 -0800 Subject: [labnetwork] MUMPS? In-Reply-To: References: Message-ID: Hi Robert, Polymumps does indeed still exist, under the Science Foundry brand after the most recent acquisition. Cheers Yifan On Thu, Feb 22, 2024 at 1:00?PM White, Robert D. wrote: > Labnetwork, > > > > I used PolyMUMPS ?multi user MEMS process? years ago and need access to a > similar multi-user process (polyMUMPS or piezoMUMPS or SOIMUMPS) for a new > project ? looks like MEMSCAP no longer exists (at least not in its 2010 > form) ? are there similar high-quality, easy to submit, multi-user MEMS fab > opportunities out there for very low volume university work? My google > searching did not go well ? > > > > Thanks! > > > > Rob > > -- > > Robert White > > Associate Professor > > Tufts Mechanical Engineering > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -------------- next part -------------- An HTML attachment was scrubbed... URL: From beaudoin at physics.ubc.ca Thu Feb 22 17:25:12 2024 From: beaudoin at physics.ubc.ca (Beaudoin, Mario) Date: Thu, 22 Feb 2024 14:25:12 -0800 Subject: [labnetwork] MUMPS? In-Reply-To: References: Message-ID: You may start looking at the following: * https://www.cmc.ca/mems-nanofabrication-and-integration/ Mario On 2024-02-22 11:56 a.m., White, Robert D. wrote: > [*CAUTION:* Non-UBC Email] > > Labnetwork, > > I used PolyMUMPS ?multi user MEMS process? years ago and need access > to a similar multi-user process (polyMUMPS or piezoMUMPS or SOIMUMPS) > for a new project ? looks like MEMSCAP no longer exists (at least not > in its 2010 form) ? are there similar high-quality, easy to submit, > multi-user MEMS fab opportunities out there for very low volume > university work?? My google searching did not go well ? > > Thanks! > > Rob > > -- > > Robert White > > Associate Professor > > Tufts Mechanical Engineering > > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -- -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Mario Beaudoin SBQMI sig 3.jpg Type: image/jpeg Size: 22413 bytes Desc: not available URL: From schweig at umich.edu Fri Feb 23 07:18:55 2024 From: schweig at umich.edu (Dennis Schweiger) Date: Fri, 23 Feb 2024 07:18:55 -0500 Subject: [labnetwork] gas cylinder tracking Message-ID: Good morning all, As I finish up our yearly gas cylinder audit, I'm thinking there has to be a better way to track all of the cylinders we have in the fab so that we can easily verify what is on site, and cross reference tha number against our demurrage charges. I would be interested in your input on the following issues from your facility's operation; 1. What is the oldest gas cylinder you have installed in your facility? 2. How do you track the cylinders being used by your facility? 3. How do you handle gases with potential expiration dates, and what is the typical duration these gases are kept in use in your facility? I'm particularly interested in the reactive HPM materials that have a tendency to volatilize with moisture. 4. How many different suppliers are you getting your gas cylinders from? 5. How many individuals in your facility change out gas cylinders? Is that number the same for both inert and HPM materials? 6. Are you using CGA or DISS cylinder connections on your HPM gases? 7. How do you address the extremely low use gases that you have to have, but usage is borderline "maybe we should remove this gas capability". Here are the answers for our facility; 1. We have some inert cylinders (Nitrogen, Argon) that are over 4,200 days on site. 2. A couple of our former employees set us up with a scanning program that allows us to use our cell phone to scan the cylinder bar code (or manually enter the cylinder serial number) of each and every cylinder that comes into our facility. We have also assigned every cylinder position in our facility a unique and identifiable location number that is scanned as part of that tracking system. When a cylinder moves within the facility, its location is updated, as well as its status (received, full, returned). There are still some issues with tracking (hence the yearly audit), and I'm trying to get our cylinder vendors to provide more information on both their packing lists, and their invoices for both the gas charges, and cylinder rentals. 3. Our current goal is to "right size" the cylinder fills so that we change out the HPM gas cylinders every 18 months. This right sizing also helps to reduce our exposure risk in the event we would have a catastrophic failure. We have not had one yet, but just in case. 4. We currently have three different vendors that provide gas cylinders for our facility. I'm trying to reduce that to two to keep the demurrage invoicing easier to manage. 5. All of our staff have been trained to change out inert cylinders, however of the 12-14 people, only about four do it more frequently than once a year. There are only two of us that change out the HPM gases. 6. All of our inert gases are CGA, and all of our HPM products (except for H2, CH4, and C2H2) are using DISS cylinder connections. 7. Currently, we revisit all of these at least once a year, and evaluate the capability/profitability of having that gas available. Thank you for taking the time to respond, and sharing your practices. Dennis Schweiger Facilities Manager University of Michigan/LNF 734.647.2055 Ofc "People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong? -------------- next part -------------- An HTML attachment was scrubbed... URL: From cveith at seas.upenn.edu Tue Feb 27 04:06:00 2024 From: cveith at seas.upenn.edu (Charles Veith) Date: Tue, 27 Feb 2024 04:06:00 -0500 Subject: [labnetwork] gas cylinder tracking In-Reply-To: References: Message-ID: Good Morning Dennis: Over the next three days, I will be having concrete conversations with Matheson, Air Products and Linde. The purpose of the conversation will be your not so unique situation at Michigan. Having worked at two very big semi houses, the idea of having a centralized a management system for bulk chems and gases was the norm. If it is occurring at large firms, why can it not be configured to meet our needs? Having little data, I will make this broad statement. If you are working with just one firm primarily for all your gases, I would assume that there will be significant discounts for this loyalty. It is also assumed that even though you have a special relationship with this firm, you would be allowed to seek support from other vendors During periods of constraint Regards, Charles Veith PS At another university, a very tech savvy staff member is working on a gas bottle system that uses a low cost remote monitoring system to track each bottle's status. If this system does come online, I will request that this person send an update on how the system works to this group On Fri, Feb 23, 2024 at 8:02?AM Dennis Schweiger wrote: > Good morning all, > > As I finish up our yearly gas cylinder audit, I'm thinking there has to be > a better way to track all of the cylinders we have in the fab so that we > can easily verify what is on site, and cross reference tha number against > our demurrage charges. I would be interested in your input on the > following issues from your facility's operation; > > 1. What is the oldest gas cylinder you have installed in your facility? > 2. How do you track the cylinders being used by your facility? > 3. How do you handle gases with potential expiration dates, and what > is the typical duration these gases are kept in use in your facility? I'm > particularly interested in the reactive HPM materials that have a > tendency to volatilize with moisture. > 4. How many different suppliers are you getting your gas cylinders > from? > 5. How many individuals in your facility change out gas cylinders? Is > that number the same for both inert and HPM materials? > 6. Are you using CGA or DISS cylinder connections on your HPM gases? > 7. How do you address the extremely low use gases that you have to > have, but usage is borderline "maybe we should remove this gas capability". > > Here are the answers for our facility; > > 1. We have some inert cylinders (Nitrogen, Argon) that are over 4,200 > days on site. > 2. A couple of our former employees set us up with a scanning program > that allows us to use our cell phone to scan the cylinder bar code (or > manually enter the cylinder serial number) of each and every cylinder that > comes into our facility. We have also assigned every cylinder position in > our facility a unique and identifiable location number that is scanned as > part of that tracking system. When a cylinder moves within the facility, > its location is updated, as well as its status (received, full, returned). > There are still some issues with tracking (hence the yearly audit), and I'm > trying to get our cylinder vendors to provide more information on both > their packing lists, and their invoices for both the gas charges, and > cylinder rentals. > 3. Our current goal is to "right size" the cylinder fills so that we > change out the HPM gas cylinders every 18 months. This right sizing also > helps to reduce our exposure risk in the event we would have a > catastrophic failure. We have not had one yet, but just in case. > 4. We currently have three different vendors that provide gas > cylinders for our facility. I'm trying to reduce that to two to keep the > demurrage invoicing easier to manage. > 5. All of our staff have been trained to change out inert cylinders, > however of the 12-14 people, only about four do it more frequently than > once a year. There are only two of us that change out the HPM gases. > 6. All of our inert gases are CGA, and all of our HPM products (except > for H2, CH4, and C2H2) are using DISS cylinder connections. > 7. Currently, we revisit all of these at least once a year, and > evaluate the capability/profitability of having that gas available. > > Thank you for taking the time to respond, and sharing your practices. > > Dennis Schweiger > Facilities Manager > University of Michigan/LNF > > 734.647.2055 Ofc > > "People can be divided into 3 groups - those that make things happen, > those that watch things happen, and those that wonder what happened." > Within which group do you belong? > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > > https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!XGQxv9-EtDj2Xedpb-EBgZGx2INH_WoEfZh27LeROyvIx7v7dEiIgvdEjQxdClqIF9O4C7MW444oEg34fKb1Pw$ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jerry.hunter at wisc.edu Tue Feb 27 11:47:01 2024 From: jerry.hunter at wisc.edu (Jerry Hunter) Date: Tue, 27 Feb 2024 16:47:01 +0000 Subject: [labnetwork] Process engineering position at University of Wisconsin-Madison In-Reply-To: References: Message-ID: We have reopened this position listing to a worldwide search. The University of Wisconsin Madison, Wisconsin Centers for Nanoscale Technology-Nanoscale Fabrication Facility https://wcnt.wisc.edu/ has an immediate opening for a process engineer. The center is a 10,000 square foot cleanroom facility for nanoscale fabrication that supports a broad range of research by students, staff, faculty, and industrial clients with interest in micro and nano fabrication and device development. The position will primarily support optical and electron beam lithography process development and monitoring for our userbase, but may also be required to support other process technologies (deposition, etch, etc.) Well qualified candidates should apply at https://jobs.wisc.edu/jobs/process-engineer-madison-wisconsin-united-states. Deadline to apply is March 11, 2024, at 11:55pm CST. -------------- next part -------------- An HTML attachment was scrubbed... URL: From whyland at uchicago.edu Tue Feb 27 12:43:30 2024 From: whyland at uchicago.edu (William Hyland) Date: Tue, 27 Feb 2024 17:43:30 +0000 Subject: [labnetwork] FSM 500TC Documentation Message-ID: Labnetwork, Our facility has a Frontier Semiconductor FSM 500 TC that we recently got working again. We would like to run some calibrations, but we lack any of the manuals or documentation for this tool. Does anybody happen to have a copy of the manual and/or service manual for this tool? Thank you in advance for your support. Best Regards, Will Will Hyland Associate Process & Equipment Engineer Pritzker Nanofabrication Facility The University of Chicago Eckhardt Research Center 5640 S. Ellis Ave., Room LL180 Chicago, IL 60637 773.834.4978 office whyland at uchicago.edu | pme.uchicago.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From beaudoin at physics.ubc.ca Tue Feb 27 15:27:26 2024 From: beaudoin at physics.ubc.ca (Beaudoin, Mario) Date: Tue, 27 Feb 2024 12:27:26 -0800 Subject: [labnetwork] Forming gas: 5% or 10% hydrogen Message-ID: Dear Network, We're setting up a new RTA and will run it with Ar, N2 and forming gas.? We're uncertain about the % level of hydrogen we want in our forming gas.? Can someone recomment the best hydrogen % to use for MOS capacitor annealing? Regards, Mario -- -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Mario Beaudoin SBQMI sig 3.jpg Type: image/jpeg Size: 22413 bytes Desc: not available URL: From mjohnso6 at tulane.edu Tue Feb 27 23:13:04 2024 From: mjohnso6 at tulane.edu (Johnson, Michael W) Date: Wed, 28 Feb 2024 04:13:04 +0000 Subject: [labnetwork] Thermo/FEI TEM Message-ID: Has anybody else had a really bad problem with their service contract on a Thermo/FEI TEM in the last year? Just curious. -Michael. -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmoneck at andrew.cmu.edu Wed Feb 28 13:11:17 2024 From: mmoneck at andrew.cmu.edu (Matthew Moneck) Date: Wed, 28 Feb 2024 13:11:17 -0500 Subject: [labnetwork] gas cylinder tracking In-Reply-To: References: Message-ID: Hi Dennis, Thanks for bringing up this topic. We have struggled with this over the years in part due to the way cylinders are managed through central university systems and by our gas vendor. The current system creates a lot of inaccuracy, so we too would like to find a better solution. Here are our answers to your questions: 1. What is the oldest gas cylinder you have installed in your facility? 2. How do you track the cylinders being used by your facility? 3. How do you handle gases with potential expiration dates, and what is the typical duration these gases are kept in use in your facility? I'm particularly interested in the reactive HPM materials that have a tendency to volatilize with moisture. 4. How many different suppliers are you getting your gas cylinders from? 5. How many individuals in your facility change out gas cylinders? Is that number the same for both inert and HPM materials? 6. Are you using CGA or DISS cylinder connections on your HPM gases? 7. How do you address the extremely low use gases that you have to have, but usage is borderline "maybe we should remove this gas capability". Our Answers: 1. Currently, the oldest cylinders are ~8yrs. These cylinders are inert gas cylinders installed in low use applications. I should also note that we do monitor hydrostatic testing dates. As cylinders must be hydrostatically tested every 10yrs, those cylinders approaching the cutoff date will be swapped (the ones at ~8yrs old will be removed in the coming months for example). 2. In the past, we have used basic logs, where inventory is kept in a master database and updated as cylinders are swapped in and out. However, records are not always accurate and audits are required. 3. In many cases, we run our cylinders past the listed expiration date. The date listed is typically a guarantee of quality and not safety related. We have also consulted with our EHS group on this, as well as gas manufacturers, and in most cases, we do not see any degradation in processes that would warrant more frequent changes. That said, we are more strict with HPMs, especially corrosives where attack or degradation of the cylinder may occur. We swap those out every 3 years on average (assuming they have not been used up sooner). 4. Our campus maintains a master agreement with one gas supplier, so the vast majority of cylinders come from one vendor. However, we are allowed to order specialty gases from other suppliers, and at the moment, we utilize that approach for only 2 cylinders. 5. Up to 5 individuals change out gas cylinders right now, but only 3 people are involved in changing HPMs (in 2 person teams). We also have a member of EHS on standby when changing silane. 6. The vast majority of our panels are designed for DISS. However, we do use CGA in some applications. All HPMs are DISS. Most electronic gases are DISS as well. In other cases, we have used CGA to DISS adapters to get around long lead time issues for DISS cylinders on gases that are more frequently used (Ar or N2 for instance). 7. Depending on the definition of "low use," we are fortunate enough to have only 1 or 2 of such gases if any. In one case, we were able to find a lecture bottle solution. In other cases, we will support the use of that gas assuming we can establish a chargeback rate sufficient enough to cover any waste gas (i.e. gas not used before bottle swap is required) and infrastructure needed to support that gas. That said, we must also look at the tool in that application to ensure it is worth having in the fab from a budgetary standpoint. Hope that helps. I would also be interested in knowing what others are doing, as we have long discussed improvements to tracking cylinders. Best Regards, Matt On Fri, Feb 23, 2024 at 8:01?AM Dennis Schweiger wrote: > Good morning all, > > As I finish up our yearly gas cylinder audit, I'm thinking there has to be > a better way to track all of the cylinders we have in the fab so that we > can easily verify what is on site, and cross reference tha number against > our demurrage charges. I would be interested in your input on the > following issues from your facility's operation; > > 1. What is the oldest gas cylinder you have installed in your facility? > 2. How do you track the cylinders being used by your facility? > 3. How do you handle gases with potential expiration dates, and what > is the typical duration these gases are kept in use in your facility? I'm > particularly interested in the reactive HPM materials that have a > tendency to volatilize with moisture. > 4. How many different suppliers are you getting your gas cylinders > from? > 5. How many individuals in your facility change out gas cylinders? Is > that number the same for both inert and HPM materials? > 6. Are you using CGA or DISS cylinder connections on your HPM gases? > 7. How do you address the extremely low use gases that you have to > have, but usage is borderline "maybe we should remove this gas capability". > > Here are the answers for our facility; > > 1. We have some inert cylinders (Nitrogen, Argon) that are over 4,200 > days on site. > 2. A couple of our former employees set us up with a scanning program > that allows us to use our cell phone to scan the cylinder bar code (or > manually enter the cylinder serial number) of each and every cylinder that > comes into our facility. We have also assigned every cylinder position in > our facility a unique and identifiable location number that is scanned as > part of that tracking system. When a cylinder moves within the facility, > its location is updated, as well as its status (received, full, returned). > There are still some issues with tracking (hence the yearly audit), and I'm > trying to get our cylinder vendors to provide more information on both > their packing lists, and their invoices for both the gas charges, and > cylinder rentals. > 3. Our current goal is to "right size" the cylinder fills so that we > change out the HPM gas cylinders every 18 months. This right sizing also > helps to reduce our exposure risk in the event we would have a > catastrophic failure. We have not had one yet, but just in case. > 4. We currently have three different vendors that provide gas > cylinders for our facility. I'm trying to reduce that to two to keep the > demurrage invoicing easier to manage. > 5. All of our staff have been trained to change out inert cylinders, > however of the 12-14 people, only about four do it more frequently than > once a year. There are only two of us that change out the HPM gases. > 6. All of our inert gases are CGA, and all of our HPM products (except > for H2, CH4, and C2H2) are using DISS cylinder connections. > 7. Currently, we revisit all of these at least once a year, and > evaluate the capability/profitability of having that gas available. > > Thank you for taking the time to respond, and sharing your practices. > > Dennis Schweiger > Facilities Manager > University of Michigan/LNF > > 734.647.2055 Ofc > > "People can be divided into 3 groups - those that make things happen, > those that watch things happen, and those that wonder what happened." > Within which group do you belong? > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork > -- -- Matthew T. Moneck, Ph.D Executive Director, Claire & John Bertucci Nanotechnology Laboratory Electrical & Computer Engineering | Carnegie Mellon University 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 Phone: 412-268-5430 ece.cmu.edu nanofab.ece.cmu.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From golant at savion.huji.ac.il Thu Feb 29 07:35:54 2024 From: golant at savion.huji.ac.il (Golan Tanami) Date: Thu, 29 Feb 2024 12:35:54 +0000 Subject: [labnetwork] Forming gas: 5% or 10% hydrogen In-Reply-To: References: Message-ID: Hi Mario, I don?t know about ?the best?, but in our RTA, we use 5% H2 and 95% N2. I think it?s pretty standard. Anyway, nobody complained yet ? Best regards, Golan. [cid:image001.jpg at 01DA6B1C.4FF280C0] Golan A. Tanami, PhD | Head of the Unit for Nanofabrication (UNF) Center for Nanoscience and Nanotechnology Edmond J. Safra Campus The Hebrew University of Jerusalem T +972.2.6584179 | M +972.50.9891111 golant at savion.huji.ac.il follow us on Facebook @hujinanocenter From: labnetwork On Behalf Of Beaudoin, Mario Sent: Tuesday, February 27, 2024 10:27 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Forming gas: 5% or 10% hydrogen Dear Network, We're setting up a new RTA and will run it with Ar, N2 and forming gas. We're uncertain about the % level of hydrogen we want in our forming gas. Can someone recomment the best hydrogen % to use for MOS capacitor annealing? Regards, Mario -- [cid:image002.jpg at 01DA6B1C.4FF280C0] -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image001.jpg Type: image/jpeg Size: 1631 bytes Desc: image001.jpg URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: image002.jpg Type: image/jpeg Size: 22413 bytes Desc: image002.jpg URL: From jeanne.guo at rice.edu Thu Feb 29 15:16:44 2024 From: jeanne.guo at rice.edu (Jing Guo) Date: Thu, 29 Feb 2024 14:16:44 -0600 Subject: [labnetwork] Forming gas: 5% or 10% hydrogen In-Reply-To: References: Message-ID: <76B7DB02-3EC5-4E0A-BC0B-09B9DB00CA41@rice.edu> Hi Mario, We also use 5% H2 in N2 as our forming gas on RTP system. Jing --------------------------------------- Jing Guo Ph.D. Research Scientist SEA Cleanroom (SST 017) Rice University Houston, TX jeanne.guo at rice.edu 713-348-8227 > On Feb 29, 2024, at 6:35 AM, Golan Tanami wrote: > > Hi Mario, > > I don?t know about ?the best?, but in our RTA, we use 5% H2 and 95% N2. I think it?s pretty standard. > > Anyway, nobody complained yet ? > > Best regards, > > Golan. > > > Golan A. Tanami, PhD | Head of the Unit for Nanofabrication (UNF) > > Center for Nanoscience and Nanotechnology > Edmond J. Safra Campus > The Hebrew University of Jerusalem > T +972.2.6584179 | M +972.50.9891111 > golant at savion.huji.ac.il > follow us on Facebook @hujinanocenter > > > From: labnetwork > On Behalf Of Beaudoin, Mario > Sent: Tuesday, February 27, 2024 10:27 PM > To: labnetwork at mtl.mit.edu > Subject: [labnetwork] Forming gas: 5% or 10% hydrogen > > Dear Network, > > We're setting up a new RTA and will run it with Ar, N2 and forming gas. We're uncertain about the % level of hydrogen we want in our forming gas. Can someone recomment the best hydrogen % to use for MOS capacitor annealing? > > Regards, > > Mario > > -- > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From daniel.woodie at princeton.edu Thu Feb 29 16:35:11 2024 From: daniel.woodie at princeton.edu (Dan P. Woodie) Date: Thu, 29 Feb 2024 21:35:11 +0000 Subject: [labnetwork] Forming gas: 5% or 10% hydrogen In-Reply-To: <76B7DB02-3EC5-4E0A-BC0B-09B9DB00CA41@rice.edu> References: <76B7DB02-3EC5-4E0A-BC0B-09B9DB00CA41@rice.edu> Message-ID: I can?t offer anything with regards to the efficacy of a given percentage of hydrogen for the semiconductor annealing benefits, but one other item to consider is that hydrogen greater than 2.9% in nitrogen is rated as flammable, while you can go up to 5.9% in argon and still remain nonflammable. Depending on your local fire codes and regulations, that may make a difference. Additionally, some researchers prefer argon over nitrogen to avoid any risk of a nitrogen reaction with their substrate. Dan Daniel Woodie Director, Micro/Nano Fabrication Center, Princeton Materials Institute From: labnetwork On Behalf Of Jing Guo Sent: Thursday, February 29, 2024 3:17 PM To: Golan Tanami Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Forming gas: 5% or 10% hydrogen Hi Mario, We also use 5% H2 in N2 as our forming gas on RTP system. Jing --------------------------------------- Jing Guo Ph.D. Research Scientist SEA Cleanroom (SST 017) Rice University Houston, TX jeanne.guo at rice.edu 713-348-8227 On Feb 29, 2024, at 6:35 AM, Golan Tanami > wrote: Hi Mario, I don?t know about ?the best?, but in our RTA, we use 5% H2 and 95% N2. I think it?s pretty standard. Anyway, nobody complained yet ? Best regards, Golan. Golan A. Tanami, PhD | Head of the Unit for Nanofabrication (UNF) Center for Nanoscience and Nanotechnology Edmond J. Safra Campus The Hebrew University of Jerusalem T +972.2.6584179 | M +972.50.9891111 golant at savion.huji.ac.il follow us on Facebook @hujinanocenter From: labnetwork > On Behalf Of Beaudoin, Mario Sent: Tuesday, February 27, 2024 10:27 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Forming gas: 5% or 10% hydrogen Dear Network, We're setting up a new RTA and will run it with Ar, N2 and forming gas. We're uncertain about the % level of hydrogen we want in our forming gas. Can someone recomment the best hydrogen % to use for MOS capacitor annealing? Regards, Mario -- _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: From julia.aebersold at louisville.edu Thu Feb 29 18:15:40 2024 From: julia.aebersold at louisville.edu (Aebersold, Julia) Date: Thu, 29 Feb 2024 23:15:40 +0000 Subject: [labnetwork] Anyone using the Stratobox with Stratocore? Message-ID: Hello everyone. Is anyone currently using the Stratobox with Stratocore in their cleanrooms for tool interlocks? Cheers! Julia Aebersold, Ph.D. Director of Operations Micro/Nano Technology Center University of Louisville 2210 South Brook Street Shumaker Research Building, Room 233 Louisville, KY 40292 (502) 852-1572 http://louisville.edu/micronano/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From aandreib at gmail.com Thu Feb 29 18:44:37 2024 From: aandreib at gmail.com (Andrei Alamariu) Date: Thu, 29 Feb 2024 18:44:37 -0500 Subject: [labnetwork] Forming gas: 5% or 10% hydrogen In-Reply-To: References: Message-ID: <09F139E0-6F31-4BDD-9BC6-EC7C6C5A1140@gmail.com> Hello, Safety first: You can purchase tanks with up 5.5%H2 in Nitrogen electronic grade mixture; and use it with some simple recipe interlocks ( 5 minute N2 flush before & after Forming Gas run), and check the gas exhaust scrubber. Please note that while this is an homogeneous mixture under high pressure, inside the tank, its concentration ratio could be different outside: accumulation of more than 6% Hydrogen in air is a hazard. Low probability but theoretically possible. 5%Hydrogen Forming Gas is historical standard for MOS capacitor final annealing. For higher H2 concentrations, strict additional hardware interlocks are required. The final Annealing aka Sintering process has 3 main functions: 1. Interface states density reduction by H2 saturation 2. Metal adherence to the substrate 3. Annealing of the crystalline damage by the plasma assisted previous processes. H2 diffuses very fast in Si above 400C. The second one limits the Temeprature/Time process budget, depending of the metal-substrate combination. Historically the Al - Si combination is limited to 550C, and it?s alloy process is called Sinter. Time dependent to avoid Al spiking. The process runs usually at 400-425C for 10 minutes, which might be too long for a RTA machine. Anyway any Sinter is better than none. Thanks, Andrei Sent from my iPad > On Feb 27, 2024, at 3:56 PM, Beaudoin, Mario wrote: > > ? > Dear Network, > > We're setting up a new RTA and will run it with Ar, N2 and forming gas. We're uncertain about the % level of hydrogen we want in our forming gas. Can someone recomment the best hydrogen % to use for MOS capacitor annealing? > > Regards, > > Mario > > -- > > _______________________________________________ > labnetwork mailing list > labnetwork at mtl.mit.edu > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Mario Beaudoin SBQMI sig 3.jpg Type: image/jpeg Size: 22413 bytes Desc: not available URL: From daniel.woodie at princeton.edu Thu Feb 29 21:36:38 2024 From: daniel.woodie at princeton.edu (Dan P. Woodie) Date: Fri, 1 Mar 2024 02:36:38 +0000 Subject: [labnetwork] Forming gas: 5% or 10% hydrogen In-Reply-To: References: <76B7DB02-3EC5-4E0A-BC0B-09B9DB00CA41@rice.edu> Message-ID: Everyone, Apologies for sending this email without letting my brain finish recovering from my recent cold, and kudos to Tom Eken for pointing out my error. I have the concentrations in nitrogen and argon reversed. Above 5.5% in nitrogen is flammable and 2.9% in argon. Dan Daniel Woodie Director, Micro/Nano Fabrication Center, Princeton Materials Institute ________________________________ From: labnetwork on behalf of Dan P. Woodie Sent: Thursday, February 29, 2024 4:35:11 PM To: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Forming gas: 5% or 10% hydrogen I can?t offer anything with regards to the efficacy of a given percentage of hydrogen for the semiconductor annealing benefits, but one other item to consider is that hydrogen greater than 2.9% in nitrogen is rated as flammable, while you can go up to 5.9% in argon and still remain nonflammable. Depending on your local fire codes and regulations, that may make a difference. Additionally, some researchers prefer argon over nitrogen to avoid any risk of a nitrogen reaction with their substrate. Dan Daniel Woodie Director, Micro/Nano Fabrication Center, Princeton Materials Institute From: labnetwork On Behalf Of Jing Guo Sent: Thursday, February 29, 2024 3:17 PM To: Golan Tanami Cc: labnetwork at mtl.mit.edu Subject: Re: [labnetwork] Forming gas: 5% or 10% hydrogen Hi Mario, We also use 5% H2 in N2 as our forming gas on RTP system. Jing --------------------------------------- Jing Guo Ph.D. Research Scientist SEA Cleanroom (SST 017) Rice University Houston, TX jeanne.guo at rice.edu 713-348-8227 On Feb 29, 2024, at 6:35 AM, Golan Tanami > wrote: Hi Mario, I don?t know about ?the best?, but in our RTA, we use 5% H2 and 95% N2. I think it?s pretty standard. Anyway, nobody complained yet ?? Best regards, Golan. Golan A. Tanami, PhD | Head of the Unit for Nanofabrication (UNF) Center for Nanoscience and Nanotechnology Edmond J. Safra Campus The Hebrew University of Jerusalem T +972.2.6584179 | M +972.50.9891111 golant at savion.huji.ac.il follow us on Facebook @hujinanocenter From: labnetwork > On Behalf Of Beaudoin, Mario Sent: Tuesday, February 27, 2024 10:27 PM To: labnetwork at mtl.mit.edu Subject: [labnetwork] Forming gas: 5% or 10% hydrogen Dear Network, We're setting up a new RTA and will run it with Ar, N2 and forming gas. We're uncertain about the % level of hydrogen we want in our forming gas. Can someone recomment the best hydrogen % to use for MOS capacitor annealing? Regards, Mario -- _______________________________________________ labnetwork mailing list labnetwork at mtl.mit.edu https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork -------------- next part -------------- An HTML attachment was scrubbed... URL: