[labnetwork] Replacement Options for Aging 4-Stack Oxidation/Diffusion Furnaces

Jim Fraser jfraser96 at byu.edu
Wed Jan 3 13:07:04 EST 2024


Hello Lab Network,

We are looking into replacing our antique Bruce Furnace and I've been asked to find out what other labs are doing? Have RTP systems worked as replacements and if so, how do you handle dopants and other cross contamination issues? Any input is welcome and appreciated.

Thanks,

James R Fraser
IML Manager
460-L EB
Brigham Young University
801-422-4344

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