[labnetwork] Basic shelf-type plasma etchers?

[Russ Renzas]

Does anyone have experience with shelf-type etchers?  Specifically like Anatech SCE-1414RF? Rectangular Al chamber, can power a shelf for some light anisotropy.

Looking for a basic etch/ash solution to complement my fancy ICP RIE ALE. Anatech is one of the few local equipment manufacturers in Nevada. At minimum I'd get their quartz barrel asher but be nice to get just a little more capability.

Russ

Russ Renzas
University of Nevada, Reno
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