[labnetwork] Tool to measure front to back overlay

[Dan Woodie]

University Labs,

For an experiment I am planning I am looking to measure the front to back
overlay on many different wafers. I know that EVG and Karl Suss each make
tools to perform this measurement. Is anyone aware of any of these tools
based at labs that may be willing to make some measurements for me? Many
thanks for your assistance with this matter.

Dan

Daniel Woodie 
Lab Use Manager 
Cornell NanoScale Facility 
250 Duffield Hall, Cornell University 
Ithaca, NY 14853-2700 
(607)254-4891 
(607)351-1050 (cell) 
(607)255-8601 (fax) 
www.cnf.cornell.edu