[labnetwork] hotplates

BenZ zhang.bin at mtpvcorp.com
Fri Nov 19 16:14:38 EST 2010


You could use oven, or put a large silicon wafer on hotplate.
Ben

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Matthieu Nannini, Dr.
Sent: Friday, November 19, 2010 8:56 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] hotplates

Hi all,

I hate hotplates ! They are a pain. They get dirty, corroded, etc. I have
tried several models, some expensive some inexpensive and none of them were
acceptable. 
Could some of share what kind (make/model) of hotplate you have in your lab
for the following tasks ?
- chemical heating (RCA, piranha, etc.)
- wafer bake when a wafer is not processed in a coating track

Thanks a lot

Matthieu


-----------------------------------
Matthieu Nannini
McGill Nanotools Microfab
Manager
t: 514 398 3310
c: 514 758 3311
f: 514 398 8434
http://miam2.physics.mcgill.ca/
------------------------------------


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