[labnetwork] piping materials in your cleanroom

[Iulian Codreanu]

Good Morning.

I am having some disagreements with the design company regarding the
piping materials that should be used in our new cleanroom and I need
your help.  The best answer I could get from them so far is something
like "this is common practice".

Could you please tell me what material your facility uses for the
process vacuum distribution system?

Also, what materials does your facility use for house N2 and for process
N2?  Do you have two separate N2 distribution systems?  Do you have two
separate bulk LN2 tanks or do you use purifiers for process N2?  In case
you use purifiers, are they at the facility level, bay level, tool
level, etc?  What type of purifier is most cost-effective over the long
term; the ones that can be regenerated (I hope there is such a thing) or
the ones that have to be replaced?

Thank you very much.

Iulian
-- 
iulian Codreanu, Ph.D.
Director, Penn NanoFab
200 South 33rd Street
Room 305 Moore Bldg
Philadelphia, PA 19104-6314
P: 215-898-9308
F: 215-573-2068
www.seas.upenn.edu/~nanofab