[labnetwork] Quintel 7000 mask aligner and SVG 8800 Coater/Dev for sale
steve scoggin
scoggin at uark.edu
Mon Sep 13 13:32:50 EDT 2010
Steve W. Scoggin
Master Scientific Research Technologist
University of Arkansas
College of Engineering
Office of the Dean
3189 Bell Engineering Center
Fayetteville, Ar 72701
Office 479-575-6049
cell 479-236-6049
Fax 479-575-5500
www.hidec.uark.edu/?section=people&content=person&person=scoggin
Greetings,
Available for sale is the attached and below described Quintel 7000
mask aligner. The system is currently tooled for 100mm and 75mm round
wafers, can be tooled up to 200mm wafers. The system is complete and
in working condition. Also available is a SVG 8800 dual track
coater/developer also complete working condition. Tools are located
here in Fayetteville, Arkansas and available for inspection with notice.
Regards,
Steve W. Scoggin
Phone-479-236-6049
QUINTEL 7000 AL Autoloader Mask Aligner, complete, operational>
Wafer sizes from pieces 8" diameter or substrates up to 6'x6'>
Currently tooled for 4' with 5x5 Mask Holder (Optional 3' with 4x4
Mask> Plate)> Fully motorized X-Y-Theta alignment stage> Manual Tray
load for substrateloading/unloading> CCTV Splitfield microscope with
zoom> Has Optional Magna View (optical) splitfield / singlefield
microscope with> Magna View CCTV for Microscope> Simple Topside Mask
loading> UltraSense constant intensity UV power Supply> System set @
200Watt can be set to 350 Watt> UV Collimation lens for
improvedprinting resolution> Shock Isolation Table included as
Standard> > Options:> Robotic auto load handling> Pulsed exposure
timer sequencing> > Performance:> Print Modes: Soft, Pressure, Vacuum
contact> Print Resolution: =<1.0microns> Alignment Stage:> Alignment
Travel X-Y: Motorized with automatic re-centering> Alignment Travel
Theta: Motorized with automatic re-centering> StageScan: +/- 19mm> X-Y
Movement: +/-4mm> Theta RotationRange: +/-7 degrees> Mask / Wafer
Separation: 0 - 300 microns> MaskSize: 2.5X2.5'up to 9x9 (optional
mask plates required)> Topside Alignment Overlay: <0.5 microns>
Bottomside Alignment Overlay: >2microns> Operator/process dependant> >
UV LampHouse / UV Optics:> Lamphouse: 200/350 W (setup for 200)>
ExposureOptics: UV (350-450 nm) standard> UV Uniformity: +/- 4% 150mm
dia. / +/- 5% 200 mm dia.> > System Requirements:> Voltage: 240VAC
50Hz> Compressed Air: 6.2-7.6 bar (90-110PSI)> Vacuum: -0.7 bar (21'
Hg)> Nitrogen or CDA: 4.2 bar (60 PSI)> > System WxDxH:
1194x838x1194mm (47'x33'x47')> Weight: 340kg (750lb)> Operational when
de-installed> 1999 vintage.
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