[labnetwork] RH question

[Morrison, Richard H., Jr.]

Hi Everyone,

 

Draper Laboratory is in the design phase for a new 6,000 sqft cleanroom.
We are lucky enough to have a chance to have a Class 10 photolithography
area. My question is what are others using for a humidity spec for the
photolithography area, we are thinking 45% +-3%. This is based on
research done by Dave Carter here at Draper.

 

Any thoughts?

 

Rick

 

 

 

 

Rick Morrison

Senior Member Technical  Staff 

Acting Group Leader Mems Fabrication

Draper Laboratory

555 Technology Square

Cambridge, MA  02139

 

617-258-3420

 

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