[labnetwork] RH question

[Garry J. Bordonaro]

Rick,

I have seen the range of 40-45% typically specified.  Our room is targeted
for 42% +/- 2%.  The most important thing is to keep the humidity stable, so
the smaller the % swing the better.


Garry Bordonaro
Photolithographic Engineer
Cornell NanoScale Facility
Cornell University
250 Duffield Hall
Ithaca, NY  14853-2700




On Tue, Aug 2, 2011 at 11:48 AM, Morrison, Richard H., Jr. <
rmorrison at draper.com> wrote:

> Hi Everyone,****
>
> ** **
>
> Draper Laboratory is in the design phase for a new 6,000 sqft cleanroom. We
> are lucky enough to have a chance to have a Class 10 photolithography area.
> My question is what are others using for a humidity spec for the
> photolithography area, we are thinking 45% +-3%. This is based on research
> done by Dave Carter here at Draper.****
>
> ** **
>
> Any thoughts?****
>
> ** **
>
> Rick****
>
> ** **
>
> ** **
>
> ** **
>
> ** **
>
> Rick Morrison****
>
> Senior Member Technical  Staff ****
>
> Acting Group Leader Mems Fabrication****
>
> Draper Laboratory****
>
> 555 Technology Square****
>
> Cambridge, MA  02139****
>
> ** **
>
> 617-258-3420****
>
> ** **
>
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