[labnetwork] wet bench issue
Morrison, Richard H., Jr.
rmorrison at draper.com
Thu Aug 11 13:55:48 EDT 2011
Hi Everyone,
When you mix bases and acids in wet benches with lip exhaust we
sometimes grow crystals, mostly with NH4OH and HCL baths, for instance a
bath with says 10% NH4OH next to a bath with 5% HCL. Besides dumping the
tanks every day, how can you keep the crystal growth down?
We solved that issues with BOE by covering the bath, but NH4OH and HCL
evolve lots of gas so lids are problematic.
Rick
Rick Morrison
Senior Member Technical Staff
Acting Group Leader Mems Fabrication
Draper Laboratory
555 Technology Square
Cambridge, MA 02139
617-258-3420
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