[labnetwork] Preferred sputtering target supplier (for TCOs)

[Morrison, Richard H., Jr.]

Here at Draper Labs we use Materion (was Williams) 845-279-0900.

Sometimes we use Angstrom Sciences   www.angstromsciences.com

Rick


-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu
[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bill Flounders
Sent: Thursday, August 11, 2011 8:46 PM
To: Kevin McPeak
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Preferred sputtering target supplier (for
TCOs)

Lesker provides high quality targets.
The material you are 'targeting' is finicky.
If you have no evidence of contamination
and no issues with debonding, I would question
process parameters before Lesker's target quality.

Bill Flounders
UC Berkeley

Kevin McPeak wrote:
> Dear labnetwork subscribers,
>
> Do any of you have recommendations for suppliers for sputtering
> targets? I have been using Lesker targets for my PVD75 sputterer. I am
> perfectly happy with their metal targets but haven't had the best of
> luck RF sputtering Al:ZnO films with their 2% Al2O3 /  98% ZnO target
> (copper backed and Indium bonded). My issues may not be related to
> their target at all but I am interested to hear if others on the list
> feel strongly about certain target suppliers, especially for TCO
> materials like Al:ZnO and ITO. Thanks in advance for your input.
>
> Regards,
> Kevin McPeak
>

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