[labnetwork] Preferred sputtering target supplier (for TCOs)

[David A. Bunzow]

I have historically used both Angstrom Sciences and Lesker for various target 
materials. I had good luck with several exotic/custom targets from Angstrom, but 
in head-to-head for same material I have not seen any measurable distinction in 
film quality, longevity or contamination.

David A. Bunzow
User Facilities Program Manager
The Molecular Foundry
Materials Science Division
Lawrence Berkeley National Laboratory
1 Cyclotron Road        MS 67-3207
Berkeley, CA   94720

Office:  510-486-4574
FAX:  510-486-7424
Cell:  701-541-2354


On 8/12/2011 4:01 AM, Morrison, Richard H., Jr. wrote:
> Here at Draper Labs we use Materion (was Williams) 845-279-0900.
>
> Sometimes we use Angstrom Sciences   www.angstromsciences.com
>
> Rick
>
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bill Flounders
> Sent: Thursday, August 11, 2011 8:46 PM
> To: Kevin McPeak
> Cc: labnetwork at mtl.mit.edu
> Subject: Re: [labnetwork] Preferred sputtering target supplier (for
> TCOs)
>
> Lesker provides high quality targets.
> The material you are 'targeting' is finicky.
> If you have no evidence of contamination
> and no issues with debonding, I would question
> process parameters before Lesker's target quality.
>
> Bill Flounders
> UC Berkeley
>
> Kevin McPeak wrote:
>> Dear labnetwork subscribers,
>>
>> Do any of you have recommendations for suppliers for sputtering
>> targets? I have been using Lesker targets for my PVD75 sputterer. I am
>> perfectly happy with their metal targets but haven't had the best of
>> luck RF sputtering Al:ZnO films with their 2% Al2O3 /  98% ZnO target
>> (copper backed and Indium bonded). My issues may not be related to
>> their target at all but I am interested to hear if others on the list
>> feel strongly about certain target suppliers, especially for TCO
>> materials like Al:ZnO and ITO. Thanks in advance for your input.
>>
>> Regards,
>> Kevin McPeak
>>
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