[labnetwork] Lift-Off tool recommendations?

[Bill Flounders]

Vincent,
To date we have reserved lab network for policy and operational
related questions. Process related questions are better directed to 
"mems-talk".
I welcome alternate opinion from the group on this protocol.

However, since I am writing a reply, I offer the following:
I would not advocate an automated liftoff tool in our diverse environments.
I would invest the money in better control of substrate temp during 
evaporation
e.g. a cooled chuck or ebeam upgrade rather than thermal evap etc.
We have used an acetone filled hobby air brush to enhance lift off - 
very cheap and very effective.
Several groups have tried ultrasonic - many have experienced device 
damage from this strategy.
Sincerely,
Bill Flounders
UC Berkeley


Luciani, Vincent wrote:
>
> Hello Labnetwork,
>
> I want to help our users with their lift-off processing.
>
> I am seeking your thoughts and comments on an automated lift-tool.  
> There are hot solvent spray systems and batch immersion systems that 
> work well in production environments where mask layout is optimized 
> around a process.  As we all know, a user facility can bring extra 
> challenges to such tools since not all mask layouts are optimized for 
> success on a automatic lift-off tool.  Many folks simply rely on 
> extended time solvent soaks.  Has anyone had success with a particular 
> brand solvent spray tool in their lab or have you found success with a 
> different approach to the problem?
>
> Thanks,
>
> Vincent K. Luciani
>
> NanoFab manager
>
> Center for Nanoscale Science and Technology <http://www.cnst.nist.gov/>
>
> National Institute of Standards and Technology
>
> 100 Bureau Drive, MS 6201
>
> Gaithersburg, MD 20899-6200 USA
>
> +1-301-975-2886
>
>
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