[labnetwork] PECVD process advice/experience

[Matthieu Nannini, Dr.]

Hi all,

First of all, happy new year to all of you and all the best for a prosperous year 2011.

I have a user here wanting to deposit PECVD oxide @ 200C because she has a polymer exposed which Tg is 240C. 
Do any of you have experience/recommendations about such a low temperature PECVD process ?
Putting a polymer in a PECVD chamber is not recommended I guess but hey we are a university lab and try to accommodate all of our users.

Thanks

Matthieu