[labnetwork] Fwd: low temperature PECVD

[David A. Bunzow]

Low temperature (cryogenic to 300 C.) PECVD reactions involving silanes 
and N2O, NH3 and CxHy compounds was an area of technical expertise I 
practiced for many years in the IC industry.  I'm not sure what 
information you need, but I assure you these reactions can be carried 
out at RT if needed....

David A. Bunzow
User Facilities Program Manager
The Molecular Foundry
Materials Science Division
Lawrence Berkeley National Laboratory
1 Cyclotron Road        MS 67-3207
Berkeley, CA   94720

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FAX:  510-486-7424
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On 1/28/2011 7:09 AM, Matthieu Nannini, Dr. wrote:
> Hi all,
>
> The polymer the user wants to use is a heat decomposable material (QPAC 40<http://www.empowermaterials.com/products/qpac40/>)that starts to decompose into CO2 mainly (according to user) when temperature exceeds 240C.
> I'm more concerned about the possible reaction between silane and N2O.
>
> Matthieu
>
>
>
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