[labnetwork] Fwd: low temperature PECVD

Matthieu Nannini, Dr. matthieu.nannini at mcgill.ca
Fri Jan 28 10:09:20 EST 2011


Hi all,

The polymer the user wants to use is a heat decomposable material (QPAC 40<http://www.empowermaterials.com/products/qpac40/>)that starts to decompose into CO2 mainly (according to user) when temperature exceeds 240C.
I'm more concerned about the possible reaction between silane and N2O.

Matthieu






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