[labnetwork] Sputtering systems

[Vicky Diadiuk]

HI,
  We are beginning our search fo a new sputtering system & are  
considering the following:

AJA orion8	Orion-8
AJA ATC	ATC-1800
Torr	MagSput 3G3 RF/DC
Anatech	Anatec Hummer BC-20
Semicore	Triaxis

Do you have any experience with or comments about these tools?

Much appreciated,
  Vicky




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Dr. Vicky Diadiuk
Associate Director - Operations
Microsystems Technology Laboratories
Room 39-219
77 Mass Ave
Cambridge, MA 02139
Tel: (617) 253-0731
FAX: (617) 258-8500

http://www-mtl.mit.edu/

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