[labnetwork] TMAH vs KOH

Wed May 18 12:20:36 EDT 2011

Dear all,

Having only one base dedicated bench running TMAH @ 85C I have now to make a choice between TMAH and KOH since new researcher are asking for KOH. Maintaining the 2 chemicals requires resources that I don't have.
Process wise, TMAH is better with oxide masks but KOH is better with SiN masks. KOH also etches faster and nicer.
My questions are in terms of safety: could you share your experiences with KOH vs TMAH in terms of ease of use, safety, etc...

Thanks

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Matthieu Nannini
McGill Nanotools Microfab
Manager
t: 514 398 3310
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f: 514 398 8434
http://miam2.physics.mcgill.ca/
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