[labnetwork] Silicon Nitride question
Chris Balicki
cab24 at sfu.ca
Fri Apr 13 19:47:21 EDT 2012
Hello Everyone,
Here at Simon Fraser University, we are also optimizing our SiN LPCVD setup. Certainly, we appreciate the recent responses and recommendations.
The dry pump (Edward iQDP80 in our case) requires significant N2 purge flow. Currently, we supply this N2 via a membrane generator. Since the generator capacity has been taxed, current O2 levels are between 1.5-2.0%. Our pump exhaust is fed to an Edwards TPU via a ~15ft run of unheated SS tubing.
1. Are O2 levels of 1.5-2.0% harmful to dry pump operation? If so, what N2 purity is recommended?
2. What further measures are recommended to minimize pump exhaust buildup due to O2 content and unreacted silanes/byproducts?
Thanks,
Chris
---
Christopher Balicki
Clean Room Technician, EIT
4D LABS, Simon Fraser University
8888 University Drive
Burnaby, BC V5A 1S6
t: 778-782-8026 e: balicki at 4dlabs.ca w: www.4dlabs.ca
----- Original Message -----
From: "Richard H. Morrison, Jr." <rmorrison at draper.com>
To: labnetwork at mtl.mit.edu
Sent: Wednesday, April 11, 2012 5:08:56 AM
Subject: [labnetwork] Silicon Nitride question
Hi Everyone,
I am restarting a Silicon Nitride LPCVD process and I have a few questions. The process will use a EBARA dry pump therefore should I use a trap on the vacuum pump inlet to catch any particulate generated?
Any issue with excess hydrogen from the process going into the dry pump, do I need a burn box on the vacuum pump exhaust?
2 nd question has anybody tried to run the LPCVD process on a wafer with a platinum metal pattern on the surface? I was wondering if there maybe some adverse effect because of the catalytic nature of Platinum.
Thanks
Rick
Rick Morrison
Senior Member Technical Staff
Group Leader Microfabrication Operations
Draper Laboratory
555 Technology Square
Cambridge, MA 02139
W 617-258-3420
C 508-930-3461
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
More information about the labnetwork
mailing list