[labnetwork] CVD Diborane Diffusion

[Siva Penmetsa]

Hi All,

We are trying to optimise Diborane furnace in a new CVD equipment.

We have performed few trials(all the souces are gases) at

Temperature 1000 C
Diborane Flow rate in the range 40 sccm to 100 sccm
Oxygen flow rate 2 SLPM
Nitrogen flow rate is 3 SLPM
Time 30 minutes

Instead of decrese in resistance we observed that the resistance incresed
to around 500 ohm/sq from around 50 ohm/sq

We apprecite your experience and inputs on how we can resduce the
resisitivity with better Diborane diffussion.

-- 
Thanks & Regards,
*Siva Prasad Raju Penmetsa*
*Senior Facility Technologist*
National Nano Fabrication Center
*Indian Institute of Science(IISc)*
Bangalore, India 560 054
 <siva at cense.iisc.ernet.in>
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