[labnetwork] Cryopump configuration on a CVD tool

[Paolini, Steven]

I would highly advise against this practice, it is extremely risky. Dangerous gases could condense in the cryo and be released during regen even if the pop off valve is flanged and exhausted. Why not use the turbo to keep it under vacuum?

Steve Paolini
Harvard University Center for Nanoscale Systems

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Errol V. Porter
Sent: Thursday, December 06, 2012 11:31 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cryopump configuration on a CVD tool

Greetings members,

I wanted to see if there are any members currently using a cryopump on a CVD tool utilizing any of the following gases; germane, hydrogen, methane, silane, diborane or phosphine. Note the main pump being used during processing is a turbopump with the cryopump being used to keep the tool under vacuum while the tool is not being operated. If there are any users using  a similar configuration, how was the pump installed specifically to deal with the effluent that is released during a normal regeneration cycle.

Regards,

Errol Porter
University of Arkansas / HiDEC
700 W. Research Center Blvd
Fayetteville, AR 72701
Tel. 479 575-2519
Fax 479 575-2719
email: evporte at uark.edu<mailto:evporte at uark.edu>
http://www.hidec.uark.edu

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